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Patent applications and USPTO patent grants for Lee; Seog-Min.The latest application filed is for "apparatus for processing wafers".
Patent | Date |
---|---|
Apparatus for processing wafers Grant 9,666,459 - Yang , et al. May 30, 2 | 2017-05-30 |
Batch type apparatus for manufacturing semiconductor devices Grant 9,159,591 - Yang , et al. October 13, 2 | 2015-10-13 |
Apparatus For Processing Wafers App 20140261174 - YANG; Cheol-Kyu ;   et al. | 2014-09-18 |
Method of manufacturing a dielectric film in a capacitor Grant 7,425,761 - Choi , et al. September 16, 2 | 2008-09-16 |
Method of manufacturing a dielectric film in a capacitor App 20070099379 - Choi; Jae-hyoung ;   et al. | 2007-05-03 |
Substrate processing equipment having mass flow controller Grant 7,140,384 - Kang , et al. November 28, 2 | 2006-11-28 |
Mass flow controller and gas supplying apparatus having the same App 20040261705 - Kang, Sung-Ho ;   et al. | 2004-12-30 |
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