Lee; Sang-Hyeob

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lee; Sang-Hyeob.The latest application filed is for "deposition of metal films with tungsten liner".

Company Profile

4.33.30

Lee; Sang-Hyeob - Fremont CA
Lee; Sang Hyeob - Daejeon KR
Lee; Sang-Hyeob - Saratoga CA US
- Fremont CA US
Lee; Sang-Hyeob - Santa Clara CA
Lee; Sang-Hyeob - San Jose CA
Lee, Sang-Hyeob - Ichon-shi KR
Lee; Sang Hyeob - Ichon KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Deposition Of Metal Films With Tungsten Liner App 20220028793 - Lei; Yu ; et al.	2022-01-27
Deposition of metal films with tungsten liner Grant 11,171,045 - Lei , et al. November 9, 2	2021-11-09
Apparatus to improve substrate temperature uniformity Grant 10,793,951 - Tzu , et al. October 6, 2	2020-10-06
Method and apparatus for depositing cobalt in a feature Grant 10,714,388 - Park , et al.	2020-07-14
Deposition Of Metal Films App 20190341302 - Lei; Yu ; et al.	2019-11-07
Method And Apparatus For Depositing Cobalt In A Feature App 20190122924 - PARK; JIN HEE ; et al.	2019-04-25
Method and apparatus for depositing cobalt in a feature Grant 10,157,787 - Park , et al. Dec	2018-12-18
Apparatus To Improve Substrate Temperature Uniformity App 20180237916 - TZU; GWO-CHUAN ; et al.	2018-08-23
Apparatus to improve substrate temperature uniformity Grant 9,957,615 - Tzu , et al. May 1, 2	2018-05-01
Methods for forming barrier/seed layers for copper interconnect structures Grant 9,926,639 - Kim , et al. March 27, 2	2018-03-27
Method And Apparatus For Depositing Cobalt In A Feature App 20170178956 - PARK; Jin Hee ; et al.	2017-06-22
Method for producing ultra-thin tungsten layers with improved step coverage Grant 9,583,385 - Lee , et al. February 28, 2	2017-02-28
High efficiency plant expression promoter from Capsicum annuum serine hydroxymethyl transferase gene and uses thereof Grant 9,458,455 - Choi , et al. October 4, 2	2016-10-04
Tungsten growth modulation by controlling surface composition Grant 9,169,556 - Wu , et al. October 27, 2	2015-10-27
Method For Producing Ultra-thin Tungsten Layers With Improved Step Coverage App 20150279732 - Lee; Sang-Hyeob ; et al.	2015-10-01
Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance Grant 9,129,945 - Lee , et al. September 8, 2	2015-09-08
Method for producing ultra-thin tungsten layers with improved step coverage Grant 9,076,843 - Lee , et al. July 7, 2	2015-07-07
Apparatus To Improve Substrate Temperature Uniformity App 20150075432 - TZU; GWO-CHUAN ; et al.	2015-03-19
High Efficiency Plant Expression Promotor From Capcicum Annuum Serine Hydroxymethyl Transferase Gene And Uses Thereof App 20140373192 - Joung; Young Hee ; et al.	2014-12-18
Low temperature high pressure high H.sub.2/WF.sub.6 ratio W process for 3D NAND application Grant 8,900,999 - Wu , et al. December 2, 2	2014-12-02
Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance Grant 8,865,594 - Lee , et al. October 21, 2	2014-10-21
High temperature tungsten metallization process Grant 8,835,311 - Collins , et al. September 16, 2	2014-09-16
Temperature controlled lid assembly for tungsten nitride deposition Grant 8,821,637 - Gelatos , et al. September 2, 2	2014-09-02
High Temperature Tungsten Metallization Process App 20140187038 - COLLINS; Joshua ; et al.	2014-07-03
Solanum lycopersicum histidine decarboxylase gene-derived fruit-specific expression promoter and uses thereof Grant 8,729,340 - Joung , et al. May 20, 2	2014-05-20
Tungsten Growth Modulation By Controlling Surface Composition App 20140106083 - WU; KAI ; et al.	2014-04-17
Metal gate structures and methods for forming thereof Grant 8,637,390 - Ganguli , et al. January 28, 2	2014-01-28
High temperature tungsten metallization process Grant 08617985 -	2013-12-31
High temperature tungsten metallization process Grant 8,617,985 - Collins , et al. December 31, 2	2013-12-31
Method For Producing Ultra-thin Tungsten Layers With Improved Step Coverage App 20130168864 - Lee; Sang-Hyeob ; et al.	2013-07-04
Chemical Vapor Deposition (cvd) Of Ruthenium Films And Applications For Same App 20130146468 - KIM; HOON ; et al.	2013-06-13
High Temperature Tungsten Metallization Process App 20130109172 - COLLINS; JOSHUA ; et al.	2013-05-02
Root Specific expression promoter from Capsicum annuum aquaporin gene and uses thereof Grant 8,350,124 - Joung , et al. January 8, 2	2013-01-08
Formation Of Liner And Barrier For Tungsten As Gate Electrode And As Contact Plug To Reduce Resistance And Enhance Device Performance App 20120231626 - LEE; SANG-HYEOB ; et al.	2012-09-13
Root Specific Expression Promoter From Capsicum Annuum Aquaporin Gene And Uses Thereof App 20120090048 - Joung; Young Hee ; et al.	2012-04-12
Methods For Forming Barrier/seed Layers For Copper Interconnect Structures App 20120012465 - KIM; HOON ; et al.	2012-01-19
Solanum lycopersicum histidine decarboxylase gene-derived fruit-specific expression promoter and uses thereof App 20110321188 - Joung; Young Hee ; et al.	2011-12-29
Chemical Vapor Deposition Of Ruthenium Films Containing Oxygen Or Carbon App 20110312148 - KIM; HOON ; et al.	2011-12-22
Metal Gate Structures And Methods For Forming Thereof App 20110298062 - GANGULI; SESHADRI ; et al.	2011-12-08
Formation Of Liner And Barrier For Tungsten As Gate Electrode And As Contact Plug To Reduce Resistance And Enhance Device Performance App 20110233778 - Lee; Sang-Hyeob ; et al.	2011-09-29
Vapor deposition of tungsten materials Grant 7,732,327 - Lee , et al. June 8, 2	2010-06-08
Vapor Deposition Of Tungsten Materials App 20090081866 - LEE; SANG-HYEOB ; et al.	2009-03-26
Process For Tungsten Nitride Deposition By A Temperature Controlled Lid Assembly App 20080206987 - Gelatos; Avgerinos V. ; et al.	2008-08-28
Temperature Controlled Lid Assembly For Tungsten Nitride Deposition App 20080202425 - Gelatos; Avgerinos V. ; et al.	2008-08-28
Selective refractory metal and nitride capping Grant 7,157,798 - Fair , et al. January 2, 2	2007-01-02
Method for reducing tungsten film roughness and improving step coverage Grant 7,141,494 - Lee , et al. November 28, 2	2006-11-28
Method for the formation of diffusion barrier Grant 6,887,781 - Lee , et al. May 3, 2	2005-05-03
Method for reducing tungsten film roughness and improving step coverage App 20050031786 - Lee, Sang-Hyeob ; et al.	2005-02-10
Selective refractory metal and nitride capping Grant 6,844,258 - Fair , et al. January 18, 2	2005-01-18
Method for producing ultra-thin tungsten layers with improved step coverage Grant 6,635,965 - Lee , et al. October 21, 2	2003-10-21
Method for the formation of diffusion barrier App 20020081845 - Lee, Sang-Hyeob ; et al.	2002-06-27
Semiconductor device having a capacitor and method for the manufacture thereof App 20010005609 - Lee, Sang-Hyeob	2001-06-28
Method of manufacturing a gate electrode in a semiconductor device Grant 6,184,113 - Seo , et al. February 6, 2	2001-02-06

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