| Patent | Date |
|---|
Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM
App 20220276607 - Lee; Myungjun ; et al. | 2022-09-01 |
Super-resolution holographic microscope
Grant 11,428,947 - Lee , et al. August 30, 2 | 2022-08-30 |
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
Grant 11,314,205 - Lee , et al. April 26, 2 | 2022-04-26 |
Inspection apparatus and method based on coherent diffraction imaging (CDI)
Grant 11,275,034 - Yun , et al. March 15, 2 | 2022-03-15 |
Pupil Ellipsometry Measurement Apparatus And Method And Method Of Fabricating Semiconductor Device Using The Pupil Ellipsometry Measurement Method
App 20220074848 - JUNG; Jaehwang ; et al. | 2022-03-10 |
Multi-scale Spectral Imaging Apparatuses And Methods, And Methods Of Manufacturing Semiconductor Devices By Using The Imaging Methods
App 20220074867 - Jung; Jaehwang ; et al. | 2022-03-10 |
Metrology Apparatus And Method Based On Diffraction Using Oblique Illumination And Method Of Manufacturing Semiconductor Device Using The Metrology Method
App 20220005715 - LEE; Myungjun ; et al. | 2022-01-06 |
Through-focus Image-based Metrology Device, Operation Method Thereof, And Computing Device For Executing The Operation
App 20210396510 - Kim; Kwangsoo ; et al. | 2021-12-23 |
Holographic Microscope And Manufacturing Method Of Semiconductor Device Using The Same
App 20210200148 - Park; Seungbeom ; et al. | 2021-07-01 |
Inspection Apparatus And Method Based On Coherent Diffraction Imaging (cdi)
App 20210164919 - Yun; Kyungwon ; et al. | 2021-06-03 |
Super-resolution Holographic Microscope
App 20210080743 - LEE; Myungjun ; et al. | 2021-03-18 |
Imaging Ellipsometry (ie)-based Inspection Method And Method Of Fabricating Semiconductor Device By Using Ie-based Inspection Method
App 20210028035 - Lee; Myungjun ; et al. | 2021-01-28 |
Metrology using overlay and yield critical patterns
Grant 10,685,165 - Kandel , et al. | 2020-06-16 |
Process compatibility improvement by fill factor modulation
Grant 10,579,768 - Levinski , et al. | 2020-03-03 |
Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM
App 20190369557 - Lee; Myungjun ; et al. | 2019-12-05 |
Process-sensitive metrology systems and methods
Grant 10,216,096 - Lee , et al. Feb | 2019-02-26 |
Systems and methods for focus-sensitive metrology targets
Grant 10,209,627 - Lee , et al. Feb | 2019-02-19 |
Systems and methods for fabricating metrology targets with sub-resolution features
Grant 10,095,122 - Lee , et al. October 9, 2 | 2018-10-09 |
Systems and Methods for Focus-Sensitive Metrology Targets
App 20180196358 - Lee; Myungjun ; et al. | 2018-07-12 |
System and method for fabricating metrology targets oriented with an angle rotated with respect to device features
Grant 10,018,919 - Lee , et al. July 10, 2 | 2018-07-10 |
Process Compatibility Improvement by Fill Factor Modulation
App 20180157784 - Levinski; Vladimir ; et al. | 2018-06-07 |
System and Method for Fabricating Metrology Targets Oriented with an Angle Rotated with Respect to Device Features
App 20170343903 - Lee; Myungjun ; et al. | 2017-11-30 |
Process-Sensitive Metrology Systems and Methods
App 20170045826 - Lee; Myungjun ; et al. | 2017-02-16 |
Metrology Target Design For Tilted Device Designs
App 20170023358 - Lee; Myungjun ; et al. | 2017-01-26 |
Metal segments as landing pads and local interconnects in an IC device
Grant 9,466,604 - Woo , et al. October 11, 2 | 2016-10-11 |
Metrology Using Overlay And Yield Critical Patterns
App 20160253450 - Kandel; Daniel ; et al. | 2016-09-01 |
Secondary battery and circuit board assembly suitable for secondary battery
Grant 9,419,268 - Lee , et al. August 16, 2 | 2016-08-16 |
Metal Segments As Landing Pads And Local Interconnects In An Ic Device
App 20160141291 - WOO; Youngtag ; et al. | 2016-05-19 |
Diesel engine piston
Grant 9,121,336 - Lee , et al. September 1, 2 | 2015-09-01 |
Lithium rechargeable battery
Grant 9,040,192 - Lee , et al. May 26, 2 | 2015-05-26 |
Diesel Engine Piston
App 20130019838 - Lee; Myungjun ; et al. | 2013-01-24 |
Secondary Battery And Circuit Board Assembly Suitable For Secondary Battery
App 20110123838 - Lee; Seongjoon ; et al. | 2011-05-26 |
External case for secondary batteries and secondary battery using the external case
Grant 7,833,657 - Kim , et al. November 16, 2 | 2010-11-16 |
Lithium Rechargeable Battery
App 20090246620 - Lee; Seongjoon ; et al. | 2009-10-01 |
External case for secondary batteries and secondary battery using the external case
App 20080166628 - Kim; Heongsin ; et al. | 2008-07-10 |
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