Patent | Date |
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Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM App 20220276607 - Lee; Myungjun ;   et al. | 2022-09-01 |
Super-resolution holographic microscope Grant 11,428,947 - Lee , et al. August 30, 2 | 2022-08-30 |
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM Grant 11,314,205 - Lee , et al. April 26, 2 | 2022-04-26 |
Inspection apparatus and method based on coherent diffraction imaging (CDI) Grant 11,275,034 - Yun , et al. March 15, 2 | 2022-03-15 |
Pupil Ellipsometry Measurement Apparatus And Method And Method Of Fabricating Semiconductor Device Using The Pupil Ellipsometry Measurement Method App 20220074848 - JUNG; Jaehwang ;   et al. | 2022-03-10 |
Multi-scale Spectral Imaging Apparatuses And Methods, And Methods Of Manufacturing Semiconductor Devices By Using The Imaging Methods App 20220074867 - Jung; Jaehwang ;   et al. | 2022-03-10 |
Metrology Apparatus And Method Based On Diffraction Using Oblique Illumination And Method Of Manufacturing Semiconductor Device Using The Metrology Method App 20220005715 - LEE; Myungjun ;   et al. | 2022-01-06 |
Through-focus Image-based Metrology Device, Operation Method Thereof, And Computing Device For Executing The Operation App 20210396510 - Kim; Kwangsoo ;   et al. | 2021-12-23 |
Holographic Microscope And Manufacturing Method Of Semiconductor Device Using The Same App 20210200148 - Park; Seungbeom ;   et al. | 2021-07-01 |
Inspection Apparatus And Method Based On Coherent Diffraction Imaging (cdi) App 20210164919 - Yun; Kyungwon ;   et al. | 2021-06-03 |
Super-resolution Holographic Microscope App 20210080743 - LEE; Myungjun ;   et al. | 2021-03-18 |
Imaging Ellipsometry (ie)-based Inspection Method And Method Of Fabricating Semiconductor Device By Using Ie-based Inspection Method App 20210028035 - Lee; Myungjun ;   et al. | 2021-01-28 |
Metrology using overlay and yield critical patterns Grant 10,685,165 - Kandel , et al. | 2020-06-16 |
Process compatibility improvement by fill factor modulation Grant 10,579,768 - Levinski , et al. | 2020-03-03 |
Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM App 20190369557 - Lee; Myungjun ;   et al. | 2019-12-05 |
Process-sensitive metrology systems and methods Grant 10,216,096 - Lee , et al. Feb | 2019-02-26 |
Systems and methods for focus-sensitive metrology targets Grant 10,209,627 - Lee , et al. Feb | 2019-02-19 |
Systems and methods for fabricating metrology targets with sub-resolution features Grant 10,095,122 - Lee , et al. October 9, 2 | 2018-10-09 |
Systems and Methods for Focus-Sensitive Metrology Targets App 20180196358 - Lee; Myungjun ;   et al. | 2018-07-12 |
System and method for fabricating metrology targets oriented with an angle rotated with respect to device features Grant 10,018,919 - Lee , et al. July 10, 2 | 2018-07-10 |
Process Compatibility Improvement by Fill Factor Modulation App 20180157784 - Levinski; Vladimir ;   et al. | 2018-06-07 |
System and Method for Fabricating Metrology Targets Oriented with an Angle Rotated with Respect to Device Features App 20170343903 - Lee; Myungjun ;   et al. | 2017-11-30 |
Process-Sensitive Metrology Systems and Methods App 20170045826 - Lee; Myungjun ;   et al. | 2017-02-16 |
Metrology Target Design For Tilted Device Designs App 20170023358 - Lee; Myungjun ;   et al. | 2017-01-26 |
Metal segments as landing pads and local interconnects in an IC device Grant 9,466,604 - Woo , et al. October 11, 2 | 2016-10-11 |
Metrology Using Overlay And Yield Critical Patterns App 20160253450 - Kandel; Daniel ;   et al. | 2016-09-01 |
Secondary battery and circuit board assembly suitable for secondary battery Grant 9,419,268 - Lee , et al. August 16, 2 | 2016-08-16 |
Metal Segments As Landing Pads And Local Interconnects In An Ic Device App 20160141291 - WOO; Youngtag ;   et al. | 2016-05-19 |
Diesel engine piston Grant 9,121,336 - Lee , et al. September 1, 2 | 2015-09-01 |
Lithium rechargeable battery Grant 9,040,192 - Lee , et al. May 26, 2 | 2015-05-26 |
Diesel Engine Piston App 20130019838 - Lee; Myungjun ;   et al. | 2013-01-24 |
Secondary Battery And Circuit Board Assembly Suitable For Secondary Battery App 20110123838 - Lee; Seongjoon ;   et al. | 2011-05-26 |
External case for secondary batteries and secondary battery using the external case Grant 7,833,657 - Kim , et al. November 16, 2 | 2010-11-16 |
Lithium Rechargeable Battery App 20090246620 - Lee; Seongjoon ;   et al. | 2009-10-01 |
External case for secondary batteries and secondary battery using the external case App 20080166628 - Kim; Heongsin ;   et al. | 2008-07-10 |