| Patent | Date |
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Vertical memory devices and methods of manufacturing the same
Grant 9,343,475 - Jang , et al. May 17, 2 | 2016-05-17 |
Memory device and method of manufacturing the same
Grant 9,299,826 - Han , et al. March 29, 2 | 2016-03-29 |
Vertical memory devices and methods of manufacturing the same
Grant 9,184,178 - Jang , et al. November 10, 2 | 2015-11-10 |
Vertical Memory Devices and Methods of Manufacturing the Same
App 20150200203 - Jang; Kyung-Tae ; et al. | 2015-07-16 |
Methods of forming semiconductor devices including vertical channels and semiconductor devices formed using such methods
Grant 9,040,378 - Lee , et al. May 26, 2 | 2015-05-26 |
Semiconductor Device
App 20150137259 - HAN; Hauk ; et al. | 2015-05-21 |
Vertical Memory Devices And Methods Of Manufacturing The Same
App 20150091078 - Jang; Kyung-Tae ; et al. | 2015-04-02 |
Methods Of Forming Semiconductor Devices Including Vertical Channels And Semiconductor Devices Formed Using Such Methods
App 20150064885 - Lee; Bo-Young ; et al. | 2015-03-05 |
Three-dimensional semiconductor memory device with active patterns and electrodes arranged above a substrate
Grant 8,923,057 - Son , et al. December 30, 2 | 2014-12-30 |
Three-dimensional semiconductor memory device with active patterns and electrodes arranged above a substrate
Grant 08923057 - | 2014-12-30 |
Vertical memory devices and methods of manufacturing the same
Grant 8,916,922 - Jang , et al. December 23, 2 | 2014-12-23 |
Memory Device And Method Of Manufacturing The Same
App 20140264498 - HAN; Hauk ; et al. | 2014-09-18 |
Vertical Memory Devices And Methods Of Manufacturing The Same
App 20140070300 - Jang; Kyung-Tae ; et al. | 2014-03-13 |
Vertical semiconductor devices
Grant 8,564,046 - Kim , et al. October 22, 2 | 2013-10-22 |
Non-volatile memory devices including low-K dielectric gaps in substrates
Grant 8,536,652 - Lee , et al. September 17, 2 | 2013-09-17 |
Methods Of Forming Non-volatile Memory Devices Including Low-k Dielectric Gaps In Substrates And Devices So Formed
App 20120061763 - LEE; Bo-young ; et al. | 2012-03-15 |
Semiconductor Devices
App 20120007165 - LEE; Myoung-Bum ; et al. | 2012-01-12 |
Vertical Semiconductor Devices
App 20110303970 - Kim; Jin-Gyun ; et al. | 2011-12-15 |
Methods of Manufacturing Stacked Semiconductor Devices
App 20110237055 - Son; Yong-hoon ; et al. | 2011-09-29 |
Three-dimensional Semiconductor Device And Related Method Of Operation
App 20110199804 - SON; Yong-Hoon ; et al. | 2011-08-18 |
Nonvolatile memory device and method of fabricating the same
Grant 7,800,162 - Lee , et al. September 21, 2 | 2010-09-21 |
Methods of manufacturing semiconductor devices including metal oxide layers
Grant 7,790,591 - Yoo , et al. September 7, 2 | 2010-09-07 |
Semiconductor having buried word line cell structure and method of fabricating the same
Grant 7,723,755 - Lee , et al. May 25, 2 | 2010-05-25 |
Non-volatile memory device and method of manufacturing the same
Grant 7,696,563 - Hong , et al. April 13, 2 | 2010-04-13 |
Complementary metal-oxide-semiconductor transistor including multiple gate conductive layers and method of manufacturing the same
Grant 7,646,067 - Nam , et al. January 12, 2 | 2010-01-12 |
Non-volatile Memory Device, Memory Card And System
App 20090321810 - RYU; Min-Kyung ; et al. | 2009-12-31 |
Semiconductor device and method of manufacturing the same
Grant 7,585,756 - Nam , et al. September 8, 2 | 2009-09-08 |
Nonvolatile Memory Device And Method Of Fabricating The Same
App 20090159955 - LEE; Sung-hae ; et al. | 2009-06-25 |
Methods of Manufacturing Semiconductor Devices Including Metal Oxide Layers
App 20090124070 - Yoo; Dong Chul ; et al. | 2009-05-14 |
Semiconductor having buried word line cell structure and method of fabricating the same
App 20080211057 - Lee; Si-hyung ; et al. | 2008-09-04 |
Non-volatile memory device and method of manufacturing the same
App 20080067581 - Hong; Sug-Hun ; et al. | 2008-03-20 |
Semiconductor Device And Method Of Manufacturing The Same
App 20080042173 - NAM; Gab-Jin ; et al. | 2008-02-21 |
Complementary metal-oxide-semiconductor transistor and method of manufacturing the same
App 20080042213 - Nam; Gab-Jin ; et al. | 2008-02-21 |
Method Forming Silicon Oxynitride Gate Dielectric Layer With Uniform Nitrogen Concentration
App 20080032512 - KIM; Dong-Chan ; et al. | 2008-02-07 |
Heating chamber and method of heating a wafer
Grant 7,211,769 - Kim , et al. May 1, 2 | 2007-05-01 |
Semiconductor devices having contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus
Grant 7,176,533 - Chung , et al. February 13, 2 | 2007-02-13 |
Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process
Grant 6,953,741 - Chung , et al. October 11, 2 | 2005-10-11 |
Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus and related structures
App 20050095857 - Chung, Eun-Ae ; et al. | 2005-05-05 |
Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus
Grant 6,858,529 - Chung , et al. February 22, 2 | 2005-02-22 |
Wafer processing apparatus and wafer processing method using the same
Grant 6,849,555 - Lee , et al. February 1, 2 | 2005-02-01 |
Method of fabricating metal lines in a semiconductor device
Grant 6,787,468 - Kim , et al. September 7, 2 | 2004-09-07 |
Systems including heated shower heads for thin film deposition and related methods
App 20040149211 - Ahn, Jae-Young ; et al. | 2004-08-05 |
Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process and devices made thereby
App 20040121570 - Chung, Eun-Ae ; et al. | 2004-06-24 |
Semiconductor device fabrication method for filling high aspect ratio openings in insulators with aluminum
Grant 6,699,790 - Kim , et al. March 2, 2 | 2004-03-02 |
Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus and related structures
App 20040000693 - Chung, Eun-Ae ; et al. | 2004-01-01 |
Wafer processing apparatus and wafer processing method using the same
App 20030207522 - Lee, Jong-Myeong ; et al. | 2003-11-06 |
Methods for forming metal wiring layers and metal interconnects and metal interconnects formed thereby
Grant 6,602,782 - Lee , et al. August 5, 2 | 2003-08-05 |
Wafer processing apparatus and wafer processing method using the same
Grant 6,586,340 - Lee , et al. July 1, 2 | 2003-07-01 |
Method of forming a semiconductor device having contact using crack-protecting layer
Grant 6,573,147 - Moon , et al. June 3, 2 | 2003-06-03 |
Heating chamber and method of heating a wafer
App 20030000936 - Kim, Byung-Hee ; et al. | 2003-01-02 |
Method for forming metal wiring layer
App 20020160602 - Lee, Myoung-Bum ; et al. | 2002-10-31 |
Method for forming metal wiring layer
App 20020132469 - Lee, Jong-Myeong ; et al. | 2002-09-19 |
Wafer processing apparatus and wafer processing method using the same
App 20020132487 - Lee, Jong-Myeong ; et al. | 2002-09-19 |
Semiconductor device having contact using crack-protecting layer and method of forming the same
App 20020125543 - Moon, Kwang-jin ; et al. | 2002-09-12 |
Semiconductor device fabrication method
App 20020098682 - Kim, Byung-Hee ; et al. | 2002-07-25 |
Method of fabricating metal lines in a semiconductor device
App 20020090811 - Kim, Byung-Hee ; et al. | 2002-07-11 |
Methods for forming metal wiring layers and metal interconnects and metal interconnects formed thereby
App 20010053586 - Lee, Myoung-Bum ; et al. | 2001-12-20 |
Semiconductor device having capacitor and method of manufacturing the same
App 20010027004 - Park, Byung-Lyul ; et al. | 2001-10-04 |
Methods for fabricating CVD TiN barrier layers for capacitor structures
Grant 6,010,940 - Lee , et al. January 4, 2 | 2000-01-04 |
Stacked capacitors for integrated circuit devices and related methods
Grant 5,742,472 - Lee , et al. April 21, 1 | 1998-04-21 |
Method of forming a dielectric layer
Grant 5,656,337 - Park , et al. August 12, 1 | 1997-08-12 |
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