Lee; Martin E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lee; Martin E..The latest application filed is for "projection optical device and exposure apparatus".

Company Profile

0.36.19

Lee; Martin E. - San Jose CA US
Lee; Martin E. - Saratoga CA
Lee; Martin E. - Santa Clara County CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Projection optical device and exposure apparatus Grant 8,767,172 - Ebihara , et al. July 1, 2	2014-07-01
Projection optical device and exposure apparatus App 20110043781 - Ebihara; Akimitsu ; et al.	2011-02-24
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device App 20080180053 - Lee; Martin E.	2008-07-31
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device Grant 7,365,513 - Lee April 29, 2	2008-04-29
Projection Optical Device And Exposure Apparatus App 20080068568 - Ebihara; Akimitsu ; et al.	2008-03-20
Moving mechanism with high bandwidth response and low force transmissibility Grant 7,333,179 - Yuan , et al. February 19, 2	2008-02-19
Anti-Gravity Device for Supporting Weight and Reducing Transmissibility App 20070236854 - Lee; Martin E. ; et al.	2007-10-11
Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers App 20070030462 - Yuan; Bausan ; et al.	2007-02-08
Moving mechanism with high bandwidth response and low force transmissibility App 20060033903 - Yuan; Bausan ; et al.	2006-02-16
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device Grant 6,989,647 - Lee January 24, 2	2006-01-24
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device Grant 6,927,840 - Lee August 9, 2	2005-08-09
System and method for holding a device with minimal deformation Grant 6,888,620 - Lee , et al. May 3, 2	2005-05-03
Holder mover for a stage assembly Grant 6,882,126 - Watson , et al. April 19, 2	2005-04-19
Platform positioning system Grant 6,872,958 - Andeen , et al. March 29, 2	2005-03-29
Inspection tool for testing and adjusting a projection unit of a lithography system Grant H2,114 - Novak , et al. February 1, 2	2005-02-01
Guideless stage with isolated reaction stage Grant 6,841,965 - Lee January 11, 2	2005-01-11
Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device App 20050002009 - Lee, Martin E.	2005-01-06
Method of making exposure apparatus with dynamically isolated reaction frame Grant 6,747,732 - Lee June 8, 2	2004-06-08
Window Frame-guided Stage Mechanism App 20040095085 - Lee, Martin E.	2004-05-20
Exposure apparatus and method utilizing isolated reaction frame Grant 6,683,433 - Lee January 27, 2	2004-01-27
Support assembly for an exposure apparatus Grant 6,646,719 - Lee , et al. November 11, 2	2003-11-11
System and method for holding a device with minimal deformation App 20030098964 - Lee, Martin E. ; et al.	2003-05-29
Holder mover for a stage assembly App 20030098664 - Watson, Douglas C. ; et al.	2003-05-29
Sheet coils and linear motors comprising same, and stage units and microlithography apparatuscomprising said linear motors App 20030080631 - Kageyama, Shigeki ; et al.	2003-05-01
Method and apparatus for increasing flow capacity associated with a valve App 20030008532 - Yuan, Bau-San ; et al.	2003-01-09
Multiple point support assembly for a stage App 20020137358 - Binnard, Mike ; et al.	2002-09-26
Platform positioning system App 20020127050 - Andeen, Gerry B. ; et al.	2002-09-12
Wafer stage assembly App 20020109823 - Binnard, Michael ; et al.	2002-08-15
Support assembly for an exposure apparatus App 20020102481 - Lee, Martin E. ; et al.	2002-08-01
Exposure apparatus and method utilizing isolated reaction frame App 20020017889 - Lee, Martin E.	2002-02-14
Vertical direction force transducer Grant 6,323,494 - Lee November 27, 2	2001-11-27
Exposure apparatus and method utilizing isolated reaction frame Grant 6,316,901 - Lee November 13, 2	2001-11-13
Guideless stage with isolated reaction stage App 20010030522 - Lee, Martin E.	2001-10-18
Exposure apparatus and method utilizing isolated reaction frame App 20010019250 - Lee, Martin E.	2001-09-06
Exposure apparatus having reaction frame Grant 6,271,640 - Lee August 7, 2	2001-08-07
Method of making exposure apparatus with dynamically isolated reaction frame Grant 6,246,202 - Lee June 12, 2	2001-06-12
Exposure method, and method of making exposure apparatus having dynamically isolated support structure Grant 6,188,195 - Lee February 13, 2	2001-02-13
Exposure apparatus having dynamically isolated reaction frame Grant 6,175,404 - Lee January 16, 2	2001-01-16
Exposure apparatus having dynamically isolated reaction frame Grant 6,150,787 - Lee November 21, 2	2000-11-21
Exposure apparatus having dynamically isolated support structure Grant 6,151,105 - Lee November 21, 2	2000-11-21
X-Y stage with movable magnet plate Grant 6,130,490 - Lee October 10, 2	2000-10-10
Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame Grant 6,087,797 - Lee July 11, 2	2000-07-11
Method for making and operating an exposure apparatus having a reaction frame Grant 6,049,186 - Lee April 11, 2	2000-04-11
Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame Grant 6,020,710 - Lee February 1, 2	2000-02-01
Exposure apparatus having dynamically isolated reaction frame Grant 6,008,500 - Lee December 28, 1	1999-12-28
Lithography apparatus with movable stage and mechanical isolation of stage drive Grant 5,982,128 - Lee November 9, 1	1999-11-09
Double flexure support for stage drive coil Grant 5,942,871 - Lee August 24, 1	1999-08-24
Window frame-guided stage mechanism Grant 5,874,820 - Lee February 23, 1	1999-02-23
Direct reticle to wafer alignment using fluorescence for integrated circuit lithography Grant 5,838,450 - McCoy , et al. November 17, 1	1998-11-17
Guideless stage with isolated reaction frame Grant 5,744,924 - Lee April 28, 1	1998-04-28
Apparatus for measuring position of an X-Y stage Grant 5,552,888 - Sogard , et al. September 3, 1	1996-09-03
Guideless stage with isolated reaction stage Grant 5,528,118 - Lee June 18, 1	1996-06-18
Apparatus for projecting a series of images onto dies of a semiconductor wafer Grant 4,444,492 - Lee April 24, 1	1984-04-24
Apparatus for projecting a series of images onto dies of a semiconductor wafer Grant 4,425,037 - Hershel , et al. January 10, 1	1984-01-10

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