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Patent applications and USPTO patent grants for Lee; Kwangduk.The latest application filed is for "gas delivery systems and methods".
Patent | Date |
---|---|
Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ;   et al. | 2021-05-13 |
Reduced Hydrogen Deposition Processes App 20210143010 - Min; Xiaoquan ;   et al. | 2021-05-13 |
Reduced Defect Deposition Processes App 20210130949 - Min; Xiaoquan ;   et al. | 2021-05-06 |
Process Chamber Component Cleaning Method App 20200140999 - KWON; Byung Seok ;   et al. | 2020-05-07 |
Techniques for improved removal of sacrificial mask Grant 10,354,875 - Prasad , et al. July 16, 2 | 2019-07-16 |
Techniques For Improved Removal Of Sacrificial Mask App 20190214255 - Prasad; Rajesh ;   et al. | 2019-07-11 |
Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor Grant 9,646,818 - Reilly , et al. May 9, 2 | 2017-05-09 |
Defect Planarization App 20160284538 - Reilly; Patrick James ;   et al. | 2016-09-29 |
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