| Patent | Date |
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Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusion
Grant 8,778,598 - Kang , et al. July 15, 2 | 2014-07-15 |
Method Of Forming Fine Patterns Of Semiconductor Device By Using Double Patterning Process Which Uses Acid Diffusion
App 20140004705 - Kang; Yool ; et al. | 2014-01-02 |
Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusion
Grant 8,431,331 - Kang , et al. April 30, 2 | 2013-04-30 |
Method for forming fine patterns of a semiconductor device using a double patterning process
Grant 7,892,982 - Lee , et al. February 22, 2 | 2011-02-22 |
Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key
Grant 7,670,761 - Lee , et al. March 2, 2 | 2010-03-02 |
Method Of Forming Fine Patterns Of Semiconductor Device By Using Double Patterning Process Which Uses Acid Diffusion
App 20090274980 - Kang; Yool ; et al. | 2009-11-05 |
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
Grant 7,473,497 - Kim , et al. January 6, 2 | 2009-01-06 |
Optical element holder and projection exposure apparatus having the same
Grant 7,457,058 - Shim , et al. November 25, 2 | 2008-11-25 |
Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key
App 20080280381 - Lee; Doo-youl ; et al. | 2008-11-13 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same
Grant 7,449,383 - Yoon , et al. November 11, 2 | 2008-11-11 |
Overlay Mark Of Semiconductor Device And Semiconductor Device Including The Overlay Mark
App 20080230929 - Shin; Jang-ho ; et al. | 2008-09-25 |
Method for forming fine patterns of a semiconductor device using a double patterning process
App 20080124931 - Lee; Doo-youl ; et al. | 2008-05-29 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness
Grant 7,375,390 - Lee , et al. May 20, 2 | 2008-05-20 |
Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same
App 20080070361 - Yoon; Kwang-Sub ; et al. | 2008-03-20 |
Method Of Correcting A Designed Pattern Of A Mask
App 20080052660 - SHIM; Woo-seok ; et al. | 2008-02-28 |
DRAM devices having an increased density layout
Grant 7,221,014 - Goo , et al. May 22, 2 | 2007-05-22 |
Semiconductor Memory Device Having High Electrical Performance And Mask And Photolithography Friendliness
App 20070108491 - Lee; Jung-Hyeon ; et al. | 2007-05-17 |
Method for manufacturing semiconductor device with contact body extended in direction of bit line
Grant 7,205,241 - Park , et al. April 17, 2 | 2007-04-17 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness
Grant 7,176,512 - Lee , et al. February 13, 2 | 2007-02-13 |
Optical element holder and projection exposure apparatus having the same
App 20060291077 - Shim; Woo-Seok ; et al. | 2006-12-28 |
Semiconductor device and method of manufacturing the same
App 20060284259 - Lee; Jung-Hyeon ; et al. | 2006-12-21 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
Grant 7,132,708 - Ahn , et al. November 7, 2 | 2006-11-07 |
Method of forming self-aligned contact pads of non-straight type semiconductor memory device
Grant 7,064,051 - Lee , et al. June 20, 2 | 2006-06-20 |
Methods of manufacturing a capacitor and a semiconductor device
App 20060115954 - Shim; Woo-Seok ; et al. | 2006-06-01 |
Method of manufacturing a semiconductor device
App 20060073670 - Bae; Yong-Kug ; et al. | 2006-04-06 |
Dram devices having an increased density layout
App 20050269615 - Goo, Doo-hoon ; et al. | 2005-12-08 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
App 20050167758 - Ahn, Tae-hyuk ; et al. | 2005-08-04 |
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
App 20050164100 - Kim, In-sung ; et al. | 2005-07-28 |
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
Grant 6,893,779 - Kim , et al. May 17, 2 | 2005-05-17 |
Resist reflow measurement key and method of forming a fine pattern of a semiconductor device using the same
App 20050089776 - Lee, Doo-youl ; et al. | 2005-04-28 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
Grant 6,885,052 - Ahn , et al. April 26, 2 | 2005-04-26 |
Method of forming self-aligned contact pads of non-straight type semiconductor memory device
App 20050070080 - Lee, Eun-Mi ; et al. | 2005-03-31 |
Semiconductor memory device having high electrical performance and mask and photolithography friendliness
App 20050035387 - Lee, Jung-Hyeon ; et al. | 2005-02-17 |
Beam delivery methods, and systems, and wafer edge exposure apparatus delivering a plurality of laser beams
App 20040212809 - Shim, Woo-Seok ; et al. | 2004-10-28 |
Method for manufacturing semiconductor device with contact body extended in direction of bit line
App 20040127050 - Park, Chang-Min ; et al. | 2004-07-01 |
Semiconductor device having self-aligned contact and method of fabricating the same
Grant 6,716,746 - Kim , et al. April 6, 2 | 2004-04-06 |
Methods for forming resist pattern and fabricating semiconductor device using Si-containing water-soluble polymer
App 20040009436 - Lee, Si-hyeung ; et al. | 2004-01-15 |
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
App 20020137361 - Kim, In-sung ; et al. | 2002-09-26 |
Semiconductor memory device having storage node electrodes offset from each other
Grant 6,381,165 - Lee , et al. April 30, 2 | 2002-04-30 |
Semiconductor memory device having self-aligned contacts and method of fabricating the same
App 20010054719 - Ahn, Tae-hyuk ; et al. | 2001-12-27 |
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