Lee; Jared Ahmad

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lee; Jared Ahmad.The latest application filed is for "vertically adjustable plasma source".

Company Profile

19.34.51

Lee; Jared Ahmad - San Jose CA
Lee; Jared Ahmad - Santa Clara CA
- Santa Clara CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vertically Adjustable Plasma Source App 20220208531 - Tanaka; Tsutomu ; et al.	2022-06-30
Plasma Source With Ceramic Electrode Plate App 20220157569 - Moore; Robert B. ; et al.	2022-05-19
Thermally Uniform Deposition Station App 20220119948 - Lee; Jared Ahmad ; et al.	2022-04-21
Gas Distribution Plate For Thermal Deposition App 20210394144 - Lee; Jared Ahmad ; et al.	2021-12-23
Abatement and strip process chamber in a dual loadlock configuration Grant 11,177,136 - Lee , et al. November 16, 2	2021-11-16
Abatement and strip process chamber in a dual load lock configuration Grant 11,171,008 - Lee , et al. November 9, 2	2021-11-09
Enhanced Spatial Ald Of Metals Through Controlled Precursor Mixing App 20210305052 - Chan; Kelvin ; et al.	2021-09-30
Gas distribution plate for thermal deposition Grant 11,110,425 - Lee , et al. September 7, 2	2021-09-07
Enhanced spatial ALD of metals through controlled precursor mixing Grant 11,043,386 - Chan , et al. June 22, 2	2021-06-22
Abatement and strip process chamber in a load lock configuration Grant 10,943,788 - Salinas , et al. March 9, 2	2021-03-09
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20210010126 - Firouzdor; Vahid ; et al.	2021-01-14
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200411350 - LEE; Jared Ahmad ; et al.	2020-12-31
Spatial Wafer Processing With Improved Temperature Uniformity App 20200392621 - AuBuchon; Joseph ; et al.	2020-12-17
Plasma erosion resistant thin film coating for high temperature application Grant 10,815,562 - Firouzdor , et al. October 27, 2	2020-10-27
Spatial wafer processing with improved temperature uniformity Grant 10,787,739 - AuBuchon , et al. September 29, 2	2020-09-29
Abatement And Strip Process Chamber In A Load Lock Configuration App 20200144067 - SALINAS; Martin Jeffrey ; et al.	2020-05-07
Spatial Wafer Processing With Improved Temperature Uniformity App 20200131635 - AuBuchon; Joseph ; et al.	2020-04-30
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200126802 - LEE; Jared Ahmad ; et al.	2020-04-23
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200066563 - LEE; Jared Ahmad ; et al.	2020-02-27
Abatement and strip process chamber in a load lock configuration Grant 10,566,205 - Salinas , et al. Feb	2020-02-18
Abatement And Strip Process Chamber In A Load Lock Configuration App 20200051825 - SALINAS; Martin Jeffrey ; et al.	2020-02-13
Gas Distribution Plate For Thermal Deposition App 20200030766 - Lee; Jared Ahmad ; et al.	2020-01-30
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200027742 - LEE; Jared Ahmad ; et al.	2020-01-23
Method and apparatus for substrate transfer and radical confinement Grant 10,468,282 - Lee , et al. No	2019-11-05
Abatement and strip process chamber in a dual loadlock configuration Grant 10,453,694 - Lee , et al. Oc	2019-10-22
Segmented focus ring assembly Grant 10,276,354 - Lee , et al.	2019-04-30
Thin heated substrate support Grant 10,204,805 - Yousif , et al. Feb	2019-02-12
Method and apparatus for substrate transfer and radical confinement Grant 10,090,181 - Lee , et al. October 2, 2	2018-10-02
Method And Apparatus For Substrate Transfer And Radical Confinement App 20180247850 - LEE; Jared Ahmad ; et al.	2018-08-30
Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing App 20180240676 - Chan; Kelvin ; et al.	2018-08-23
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20180230587 - Firouzdor; Vahid ; et al.	2018-08-16
Particle reduction via throttle gate valve purge Grant 10,010,912 - Lee , et al. July 3, 2	2018-07-03
Plasma erosion resistant thin film coating for high temperature application Grant 9,976,211 - Firouzdor , et al. May 22, 2	2018-05-22
Substrate placement detection in semiconductor equipment using thermal response characteristics Grant 9,885,567 - Lee , et al. February 6, 2	2018-02-06
Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing App 20170306490 - Chan; Kelvin ; et al.	2017-10-26
Methods and apparatus for providing a gas mixture to a pair of process chambers Grant 9,587,789 - Lee , et al. March 7, 2	2017-03-07
Thin Heated Substrate Support App 20170040192 - YOUSIF; Imad ; et al.	2017-02-09
Apparatus for uniform pumping within a substrate process chamber Grant 9,464,732 - Reuter , et al. October 11, 2	2016-10-11
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20150307982 - Firouzdor; Vahid ; et al.	2015-10-29
Method for removing halogen-containing residues from substrate Grant 8,992,689 - Diaz , et al. March 31, 2	2015-03-31
Substrate Placement Detection In Semiconductor Equipment Using Thermal Response Characteristics App 20150063405 - LEE; JARED AHMAD ; et al.	2015-03-05
Particle Reduction Via Throttle Gate Valve Purge App 20140366953 - LEE; JARED AHMAD ; et al.	2014-12-18
Method extending the service interval of a gas distribution plate Grant 8,845,816 - Diaz , et al. September 30, 2	2014-09-30
Segmented Focus Ring Assembly App 20140110057 - LEE; Jared Ahmad ; et al.	2014-04-24
Method And Apparatus For Substrate Transfer And Radical Confinement App 20140087561 - Lee; Jared Ahmad ; et al.	2014-03-27
Methods And Apparatus For Providing A Gas Mixture To A Pair Of Process Chambers App 20140076850 - LEE; JARED AHMAD ; et al.	2014-03-20
Methods and apparatus for providing a gas mixture to a pair of process chambers Grant 8,616,224 - Lee , et al. December 31, 2	2013-12-31
Methods and apparatus for calibrating pressure gauges in a substrate processing system Grant 8,616,043 - Cruse , et al. December 31, 2	2013-12-31
Methods and apparatus for calibrating pressure gauges in a substrate processing system Grant 08616043 -	2013-12-31
Methods and apparatus for providing a gas mixture to a pair of process chambers Grant 08616224 -	2013-12-31
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20130337655 - Lee; Jared Ahmad ; et al.	2013-12-19
Thin Heated Substrate Support App 20130334199 - Yousif; Imad ; et al.	2013-12-19
Apparatus For Uniform Pumping Within A Substrate Process Chamber App 20130284287 - REUTER; PAUL BENJAMIN ; et al.	2013-10-31
Apparatus for radial delivery of gas to a chamber and methods of use thereof Grant 8,562,742 - Lee , et al. October 22, 2	2013-10-22
Abatement And Strip Process Chamber In A Load Lock Configuration App 20130224953 - SALINAS; Martin Jeffrey ; et al.	2013-08-29
Method And Apparatus For Wafer Temperature Measurement Using An Independent Light Source App 20130059403 - Lee; Jared Ahmad ; et al.	2013-03-07
Method Extending The Service Interval Of A Gas Distribution Plate App 20120222752 - Diaz; Adauto ; et al.	2012-09-06
Vacuum Chambers With Shared Pump App 20120222813 - Pal; Aniruddha ; et al.	2012-09-06
Method For Removing Halogen-containing Residues From Substrate App 20120222699 - Diaz; Adauto ; et al.	2012-09-06
Methods For Removing Byproducts From Load Lock Chambers App 20110304078 - LEE; JARED AHMAD ; et al.	2011-12-15
Method and apparatus for controlling gas flow to a processing chamber Grant 8,074,677 - Gold , et al. December 13, 2	2011-12-13
Twin Chamber Processing System App 20110265951 - XU; MING ; et al.	2011-11-03
Methods And Apparatus For Reducing Flow Splitting Errors Using Orifice Ratio Conductance Control App 20110265883 - CRUSE; JAMES P. ; et al.	2011-11-03
Apparatus For Radial Delivery Of Gas To A Chamber And Methods Of Use Thereof App 20110265887 - LEE; JARED AHMAD ; et al.	2011-11-03
Methods And Apparatus For Providing A Gas Mixture To A Pair Of Process Chambers App 20110265831 - LEE; JARED AHMAD ; et al.	2011-11-03
Process Chambers Having Shared Resources And Methods Of Use Thereof App 20110269314 - LEE; JARED AHMAD ; et al.	2011-11-03
System And Method For Calibrating Pressure Gauges In A Substrate Processing System App 20110265899 - CRUSE; JAMES P. ; et al.	2011-11-03
Method and apparatus for gas flow measurement Grant 7,975,558 - Lee , et al. July 12, 2	2011-07-12
Method and apparatus for controlling gas flow to a processing chamber Grant 7,846,497 - Gold , et al. December 7, 2	2010-12-07
Method And Apparatus For Gas Flow Measurement App 20100251828 - Lee; Jared Ahmad ; et al.	2010-10-07
Method and apparatus for controlling gas flow to a processing chamber Grant 7,775,236 - Gold , et al. August 17, 2	2010-08-17
Method And Apparatus Of A Substrate Etching System And Process App 20090272717 - Pamarthy; Sharma V. ; et al.	2009-11-05
Method And Apparatus For Controlling Gas Flow To A Processing Chamber App 20080202609 - GOLD; EZRA ROBERT ; et al.	2008-08-28
Method And Apparatus For Controlling Gas Flow To A Processing Chamber App 20080202610 - Gold; Ezra Robert ; et al.	2008-08-28
Method And Apparatus For Controlling Gas Flow To A Processing Chamber App 20080202588 - Gold; Ezra Robert ; et al.	2008-08-28

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