loadpatents
Patent applications and USPTO patent grants for Lee; Jae Chull.The latest application filed is for "cvd reactor cleaning methods and systems".
Patent | Date |
---|---|
Cvd Reactor Cleaning Methods And Systems App 20130263895 - Lee; Jae Chull ;   et al. | 2013-10-10 |
Load lock chamber with decoupled slit valve door seal compartment Grant 8,124,907 - Lee , et al. February 28, 2 | 2012-02-28 |
Multiple slot load lock chamber and method of operation Grant 8,061,949 - Kurita , et al. November 22, 2 | 2011-11-22 |
Valve door with ball coupling Grant 7,845,618 - Kim , et al. December 7, 2 | 2010-12-07 |
Decoupled chamber body Grant 7,845,891 - Lee , et al. December 7, 2 | 2010-12-07 |
Load lock chamber with heater in tube Grant 7,822,324 - Anwar , et al. October 26, 2 | 2010-10-26 |
Multiple Slot Load Lock Chamber and Method of Operation App 20100139889 - Kurita; Shinichi ;   et al. | 2010-06-10 |
Multiple slot load lock chamber and method of operation Grant 7,665,951 - Kurita , et al. February 23, 2 | 2010-02-23 |
Curved slit valve door with flexible coupling Grant 7,497,414 - Lee , et al. March 3, 2 | 2009-03-03 |
Load Lock Chamber With Heater In Tube App 20080118236 - Anwar; Suhail ;   et al. | 2008-05-22 |
Load Lock Chamber With Decoupled Slit Valve Door Seal Compartment App 20080087214 - Lee; Jae-Chull ;   et al. | 2008-04-17 |
Valve Door With Ball Coupling App 20080001113 - KIM; SAM HYUNGSAM ;   et al. | 2008-01-03 |
Multiple Slot Load Lock Chamber And Method Of Operation App 20070280816 - Kurita; Shinichi ;   et al. | 2007-12-06 |
Decoupled chamber body App 20070166133 - Lee; Jae-Chull ;   et al. | 2007-07-19 |
Curved slit valve door with flexible coupling App 20060151735 - Lee; Jae-Chull ;   et al. | 2006-07-13 |
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