| Patent | Date |
|---|
Etching Compositions And Methods For Fabricating Semiconductor Devices By Using The Same
App 20220267673 - CHO; Min Hyung ; et al. | 2022-08-25 |
Etchant Composition
App 20220025261 - KIM; Jung-ah ; et al. | 2022-01-27 |
Method of removing chemicals from a substrate
Grant 11,227,761 - Jeong , et al. January 18, 2 | 2022-01-18 |
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
Grant 11,149,234 - Park , et al. October 19, 2 | 2021-10-19 |
Etchant composition and method of fabricating semiconductor device
Grant 11,142,694 - Kim , et al. October 12, 2 | 2021-10-12 |
Compositions for removing photoresist
Grant 10,795,263 - Oh , et al. October 6, 2 | 2020-10-06 |
Method Of Removing Chemicals From A Substrate
App 20200286727 - JEONG; Ji-Hoon ; et al. | 2020-09-10 |
Etchant Composition And Method Of Fabricating Semiconductor Device
App 20200216758 - KIM; Jung-ah ; et al. | 2020-07-09 |
Chemical Mechanical Polishing Apparatus For Controlling Polishing Uniformity
App 20200185231 - Kim; In-kwon ; et al. | 2020-06-11 |
Method of treating substrates using supercritical fluids
Grant 10,679,843 - Jeong , et al. | 2020-06-09 |
Source supplier for a supercritical fluid, substrate processing apparatus having the same
Grant 10,668,403 - Oh , et al. | 2020-06-02 |
Slurry Composition For Chemical Mechanical Polishing
App 20200071566 - Park; Sang-hyun ; et al. | 2020-03-05 |
Spot heater and device for cleaning wafer using the same
Grant 10,576,582 - Kim , et al. | 2020-03-03 |
Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same
Grant 10,525,566 - Hong , et al. J | 2020-01-07 |
Method of cleaning a substrate and apparatus for performing the same
Grant 10,395,951 - Kim , et al. A | 2019-08-27 |
Cleaning Composition, Cleaning Apparatus, And Method Of Fabricating Semiconductor Device Using The Same
App 20190241844 - PARK; Mi Hyun ; et al. | 2019-08-08 |
Chemical liquid supply apparatus and semiconductor processing apparatus having the same
Grant 10,332,762 - Kim , et al. | 2019-06-25 |
Method Of Treating Substrates Using Supercritical Fluids
App 20190019669 - JEONG; Ji-Hoon ; et al. | 2019-01-17 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20180311764 - KIM; Young-Hoo ; et al. | 2018-11-01 |
Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same
Grant 10,083,829 - Jeong , et al. September 25, 2 | 2018-09-25 |
Compositions For Removing Photoresist
App 20180267409 - OH; Jung-Min ; et al. | 2018-09-20 |
Spot heater and device for cleaning wafer using the same
Grant 10,029,332 - Kim , et al. July 24, 2 | 2018-07-24 |
Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate
Grant 10,025,192 - Oh , et al. July 17, 2 | 2018-07-17 |
Chemical Mechanical Polishing Method, Method Of Manufacturing Semiconductor Device, And Semiconductor Manufacturing Apparatus
App 20180104792 - HONG; Myung-ki ; et al. | 2018-04-19 |
Source Supplier For A Supercritical Fluid, Substrate Processing Apparatus Having The Same
App 20180028936 - OH; JUNG-MIN ; et al. | 2018-02-01 |
Method Of Cleaning A Substrate And Apparatus For Performing The Same
App 20170330770 - KIM; Seok-Hoon ; et al. | 2017-11-16 |
Apparatus for treating wafers using supercritical fluid
Grant 9,754,806 - Lee , et al. September 5, 2 | 2017-09-05 |
Method Of Cleaning Substrate And Method Of Fabricating Semiconductor Device Using The Same
App 20170110316 - PARK; Mi-hyun ; et al. | 2017-04-20 |
Semiconductor Cleaning Process System And Methods Of Manufacturing Semiconductor Devices
App 20170069513 - OH; Jung-Min ; et al. | 2017-03-09 |
Chemical Liquid Supply Apparatus And Semiconductor Processing Apparatus Having The Same
App 20170062242 - KIM; YOUNG-HOO ; et al. | 2017-03-02 |
Apparatus For Treating Substrates Using Supercritical Fluids, Substrate Treatment System Including The Same And Method Of Treating Substrates Using The Same
App 20170008040 - JEONG; Ji-Hoon ; et al. | 2017-01-12 |
Methods Of Manufacturing Semiconductor Devices Using A Composition For Removing Photoresist And Methods Of Removing Photoresist From A Semiconductor Substrate
App 20160315019 - OH; Jung-Min ; et al. | 2016-10-27 |
Cleaning solution composition and method of cleaning semiconductor device using the same
Grant 9,394,509 - Bae , et al. July 19, 2 | 2016-07-19 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20160071745 - KIM; Young-Hoo ; et al. | 2016-03-10 |
Cleaning Solution Composition And Method Of Cleaning Semiconductor Device Using The Same
App 20150299629 - Bae; Sang-Won ; et al. | 2015-10-22 |
Apparatus For Treating Wafers Using Supercritical Fluid
App 20150162221 - Lee; Hyo-San ; et al. | 2015-06-11 |
Nozzle And Apparatus For Processing A Substrate Including The Same
App 20150151336 - KIM; KYOUNG-SEOB ; et al. | 2015-06-04 |
Apparatus for treating wafers using supercritical fluid
Grant 8,951,383 - Lee , et al. February 10, 2 | 2015-02-10 |
Substrate Processing Method And Substrate Processing System For Performing The Same
App 20140283886 - CHO; Yong-Jhin ; et al. | 2014-09-25 |
Substrate processing method and substrate processing system for performing the same
Grant 8,795,541 - Cho , et al. August 5, 2 | 2014-08-05 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,790,470 - Lee , et al. July 29, 2 | 2014-07-29 |
Integrated circuit capacitors having sidewall supports
Grant 8,766,343 - Kang , et al. July 1, 2 | 2014-07-01 |
Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device
Grant 8,685,272 - Kim , et al. April 1, 2 | 2014-04-01 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,585,917 - Lee , et al. November 19, 2 | 2013-11-19 |
Method of manufacturing a semiconductor device using an etchant
Grant 8,557,651 - Lee , et al. October 15, 2 | 2013-10-15 |
Fabricating method of semiconductor device
Grant 8,518,772 - Bai , et al. August 27, 2 | 2013-08-27 |
Vertical-type semiconductor device
Grant 8,344,385 - Kim , et al. January 1, 2 | 2013-01-01 |
Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole
Grant 8,211,804 - Lee , et al. July 3, 2 | 2012-07-03 |
Substrate Processing Method And Substrate Processing System For Performing The Same
App 20120152898 - CHO; YONG JHIN ; et al. | 2012-06-21 |
Integrated Circuit Capacitors Having Sidewall Supports
App 20120112317 - Kang; Dae-Hyuk ; et al. | 2012-05-10 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20120085495 - Lee; Hyo-San ; et al. | 2012-04-12 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20120080059 - Lee; Hyo-san ; et al. | 2012-04-05 |
Substrate Treatment Equipment And Method Of Treating Substrate Using The Same
App 20120064727 - Oh; Jung-min ; et al. | 2012-03-15 |
Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby
Grant 8,119,476 - Kang , et al. February 21, 2 | 2012-02-21 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,084,367 - Lee , et al. December 27, 2 | 2011-12-27 |
Fabricating Method Of Semiconductor Device
App 20110306204 - Bai; Keun-Hee ; et al. | 2011-12-15 |
Method Of Manufacturing A Semiconductor Device Using An Etchant
App 20110217833 - Lee; Hyo-San ; et al. | 2011-09-08 |
Methods Of Forming A Hole Having A Vertical Profile And Semiconductor Devices Having A Vertical Hole
App 20110201203 - Lee; Hyo-San ; et al. | 2011-08-18 |
Methods of Forming Integrated Circuit Capacitors Having Sidewall Supports and Capacitors Formed Thereby
App 20110159660 - Kang; Dae-Hyuk ; et al. | 2011-06-30 |
Method of removing photoresist and method of manufacturing a semiconductor device
Grant 7,959,738 - Kang , et al. June 14, 2 | 2011-06-14 |
Apparatus for Treating Wafers Using Supercritical Fluid
App 20110083807 - Lee; Hyo-san ; et al. | 2011-04-14 |
Vertical-type Semiconductor Device
App 20110073866 - Kim; Young-Hoo ; et al. | 2011-03-31 |
Apparatus for treating wafers using supercritical fluid
Grant 7,857,939 - Lee , et al. December 28, 2 | 2010-12-28 |
Method of manufacturing semiconductor device
App 20100267225 - Lee; Hyo-san ; et al. | 2010-10-21 |
PAA-based etchant, methods of using same, and resultant structures
Grant 7,709,277 - Lee , et al. May 4, 2 | 2010-05-04 |
Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device
App 20100035436 - Kim; Go-Un ; et al. | 2010-02-11 |
Composition For Cleaning Substrates And Method Of Forming Gate Using The Composition
App 20080160743 - LEE; Hyo-san ; et al. | 2008-07-03 |
Method of removing photoresist and method of manufacturing a semiconductor device
App 20080138972 - Kang; Dae-Hyuk ; et al. | 2008-06-12 |
Apparatus and method for treating wafers using supercritical fluid
App 20080029159 - Lee; Hyo-san ; et al. | 2008-02-07 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20070293054 - Lee; Hyo-San ; et al. | 2007-12-20 |
PAA-based etchant, methods of using same, and resultant structures
App 20070111532 - Lee; Hyo-san ; et al. | 2007-05-17 |
Composition for cleaning substrates and method of forming gate using the composition
App 20070051700 - Lee; Hyo-san ; et al. | 2007-03-08 |
PAA-based etchant, methods of using same, and resultant structures
Grant 7,176,041 - Lee , et al. February 13, 2 | 2007-02-13 |
Method of fabricating flash memory with u-shape floating gate
App 20060246666 - Han; Jeong-nam ; et al. | 2006-11-02 |
Cleaning solution and method of forming a metal pattern for a semiconductor device using the same
App 20060228890 - Lee; Hyo-san ; et al. | 2006-10-12 |
Etching solution and method for removing low-k dielectric layer
App 20060097220 - Kim; Mi-Young ; et al. | 2006-05-11 |
PAA- based etchant, methods of using same, and resultant structures
App 20050169096 - Lee, Hyo-san ; et al. | 2005-08-04 |
| 