Lee; Chih-Tsung
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lee; Chih-Tsung.The latest application filed is for "cvd device pumping liner".
Company Profile
13.39.45
- Lee; Chih-Tsung - Hsinchu TW
- LEE; Chih-tsung - Hsinchu City TW
- Lee; Chih-Tsung - Hsin-Chu TW
- LEE; CHIH-TSUNG - Nantou County TW
- Lee; Chih-Tsung - Hisnchu N/A TW
- LEE; Chih-Tsung - Hisnchu City TW
Patent Activity
| Patent | Date |
|---|---|
| Semiconductor fabrication apparatus Grant 11,443,961 - Lee , et al. September 13, 2 | 2022-09-13 |
| Method of using a polishing system Grant 11,358,252 - Lin , et al. June 14, 2 | 2022-06-14 |
| Display apparatus Grant 11,177,457 - Lee , et al. November 16, 2 | 2021-11-16 |
| Display Grant 11,119,539 - Lee , et al. September 14, 2 | 2021-09-14 |
| Cvd Device Pumping Liner App 20210079524 - YANG; Sheng-chun ; et al. | 2021-03-18 |
| Semiconductor Fabrication Apparatus App 20210066096 - LEE; Chih-Tsung ; et al. | 2021-03-04 |
| Display App 20210026412 - Lee; Chih-Tsung ; et al. | 2021-01-28 |
| Display App 20210029838 - Lee; Chih-Tsung ; et al. | 2021-01-28 |
| Flexible Device Array Substrate And Manufacturing Method Of Flexible Device Array Substrate App 20210027669 - Ke; Tsung-Ying ; et al. | 2021-01-28 |
| Method for forming semiconductor device structure with etch stop layer Grant 10,811,263 - Lee , et al. October 20, 2 | 2020-10-20 |
| Display Apparatus App 20200235334 - Lee; Chih-Tsung ; et al. | 2020-07-23 |
| Method For Forming Semiconductor Device Structure With Etch Stop Layer App 20200144063 - LEE; Ya-Ling ; et al. | 2020-05-07 |
| Method for forming semiconductor device structure with etch stop layer Grant 10,522,360 - Lee , et al. Dec | 2019-12-31 |
| Method Of Using A Polishing System App 20190337116 - LIN; Shih-Chi ; et al. | 2019-11-07 |
| Polishing system Grant 10,357,867 - Lin , et al. July 23, 2 | 2019-07-23 |
| Device and method for manufacturing a semiconductor structure Grant 10,269,573 - Lin , et al. | 2019-04-23 |
| Atomic layer deposition method for manufacturing semiconductor structure Grant 10,269,560 - Chiu , et al. | 2019-04-23 |
| PVD apparatus and method with deposition chamber having multiple targets and magnets Grant 10,190,209 - Kao , et al. Ja | 2019-01-29 |
| Method For Forming Semiconductor Device Structure With Etch Stop Layer App 20180166285 - LEE; Ya-Ling ; et al. | 2018-06-14 |
| Shower head apparatus and method for controlling plasma or gas distribution Grant 9,982,340 - Lee , et al. May 29, 2 | 2018-05-29 |
| Semiconductor film formation apparatus and process Grant 9,976,215 - Chou , et al. May 22, 2 | 2018-05-22 |
| Atomic Layer Deposition Method For Manufacturing Semiconductor Structure App 20170365483 - CHIU; YUN-TZU ; et al. | 2017-12-21 |
| Pvd Apparatus And Method With Deposition Chamber Having Multiple Targets And Magnets App 20170314121 - Kao; Chung-En ; et al. | 2017-11-02 |
| Polishing System App 20170312881 - LIN; Shih-Chi ; et al. | 2017-11-02 |
| Polishing system and polishing method Grant 9,718,164 - Lin , et al. August 1, 2 | 2017-08-01 |
| PVD apparatus and method with deposition chamber having multiple targets and magnets Grant 9,708,706 - Kao , et al. July 18, 2 | 2017-07-18 |
| Two-step shallow trench isolation (STI) process Grant 9,502,280 - Hong , et al. November 22, 2 | 2016-11-22 |
| Capacitive Touch Panel And Method Of Making The Same App 20160124542 - LEE; CHIH-TSUNG ; et al. | 2016-05-05 |
| UV curing system for semiconductors Grant 9,287,154 - Lien , et al. March 15, 2 | 2016-03-15 |
| CVD conformal vacuum/pumping guiding design Grant 9,234,278 - Chou , et al. January 12, 2 | 2016-01-12 |
| Electrostatic chuck with multi-zone control Grant 9,218,998 - Chen , et al. December 22, 2 | 2015-12-22 |
| Mechanisms for forming semiconductor device having stable dislocation profile Grant 9,214,514 - Hong , et al. December 15, 2 | 2015-12-15 |
| Device And Method For Manufacturing A Semiconductor Structure App 20150279632 - LIN; KUN-MO ; et al. | 2015-10-01 |
| Two-Step Shallow Trench Isolation (STI) Process App 20150179502 - Hong; Min Hao ; et al. | 2015-06-25 |
| Mechanisms For Forming Semiconductor Device Having Stable Dislocation Profile App 20150132913 - HONG; Min-Hao ; et al. | 2015-05-14 |
| Two-step shallow trench isolation (STI) process Grant 9,006,070 - Hong , et al. April 14, 2 | 2015-04-14 |
| Electrostatic chuck robotic system Grant 8,953,298 - Kao , et al. February 10, 2 | 2015-02-10 |
| Electrostatic Check with Multi-Zone Control App 20150016011 - Chen; Chia-Ho ; et al. | 2015-01-15 |
| Chemical vapor deposition film profile uniformity control Grant 8,916,480 - Kuo , et al. December 23, 2 | 2014-12-23 |
| Electrostatic chuck with multi-zone control Grant 8,902,561 - Chen , et al. December 2, 2 | 2014-12-02 |
| Method and apparatus for preparing polysilazane on a semiconductor wafer Grant 8,796,105 - Chou , et al. August 5, 2 | 2014-08-05 |
| Two-step Shallow Trench Isolation (sti) Process App 20140179071 - Hong; Min Hao ; et al. | 2014-06-26 |
| Polishing System And Polishing Method App 20140162534 - LIN; Shih-Chi ; et al. | 2014-06-12 |
| Two-step shallow trench isolation (STI) process Grant 8,692,299 - Hong , et al. April 8, 2 | 2014-04-08 |
| Two-step Shallow Trench Isolation (sti) Process App 20140054653 - Hong; Min Hao ; et al. | 2014-02-27 |
| Method And Apparatus For Preparing Polysilazane On A Semiconductor Wafer App 20140030866 - Chou; You-Hua ; et al. | 2014-01-30 |
| Integrated technology for partial air gap low K deposition Grant 8,624,394 - Chang , et al. January 7, 2 | 2014-01-07 |
| Uv Curing System For Semiconductors App 20130320235 - LIEN; Ming Huei ; et al. | 2013-12-05 |
| Semiconductor Film Formation Apparatus And Process App 20130295297 - CHOU; You-Hua ; et al. | 2013-11-07 |
| Shower Head Apparatus And Method For Controllign Plasma Or Gas Distribution App 20130267045 - LEE; Chih-Tsung ; et al. | 2013-10-10 |
| Valve Purge Assembly For Semiconductor Manufacturing Tools App 20130239889 - LIEN; Ming Huei ; et al. | 2013-09-19 |
| Electrostatic Chuck with Multi-Zone Control App 20130201596 - Chen; Chia-Ho ; et al. | 2013-08-08 |
| CVD Conformal Vacuum/Pumping Guiding Design App 20130189851 - Chou; You-Hua ; et al. | 2013-07-25 |
| Chemical Vapor Deposition Film Profile Uniformity Control App 20130149871 - Kuo; Ming-Shiou ; et al. | 2013-06-13 |
| Integrated Technology for Partial Air Gap Low K Deposition App 20130147046 - Chang; Hung Jui ; et al. | 2013-06-13 |
| Electrostatic Chuck Robotic System App 20130135784 - Kao; Chung-En ; et al. | 2013-05-30 |
| Apparatus And Method With Deposition Chamber Having Multiple Targets And Magnets App 20130136873 - KAO; Chung-En ; et al. | 2013-05-30 |
| Post ECP multi-step anneal/H.sub.2 treatment to reduce film impurity Grant 7,432,192 - Feng , et al. October 7, 2 | 2008-10-07 |
| Post ECP multi-step anneal/H2 treatment to reduce film impurity App 20060216930 - Feng; Hsien-Ping ; et al. | 2006-09-28 |
| Post ECP multi-step anneal/H2 treatment to reduce film impurity Grant 7,030,016 - Feng , et al. April 18, 2 | 2006-04-18 |
| Post ECP multi-step anneal/H2 treatment to reduce film impurity App 20050227479 - Feng, Hsien-Ping ; et al. | 2005-10-13 |
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