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Patent applications and USPTO patent grants for Ledger; Anthony M..The latest application filed is for "automatic rejection of diffraction effects in thin film metrology".
Patent | Date |
---|---|
Automatic rejection of diffraction effects in thin film metrology Grant 5,555,474 - Ledger September 10, 1 | 1996-09-10 |
Film thickness measurement of structures containing a scattering surface Grant 5,452,953 - Ledger September 26, 1 | 1995-09-26 |
Cofocal optical system for thickness measurements of patterned wafers Grant 5,436,725 - Ledger July 25, 1 | 1995-07-25 |
Apparatus and method for measuring the thickness of thin films Grant 5,365,340 - Ledger November 15, 1 | 1994-11-15 |
Apparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiation Grant 5,333,049 - Ledger July 26, 1 | 1994-07-26 |
Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations Grant 5,291,269 - Ledger March 1, 1 | 1994-03-01 |
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