loadpatents
Patent applications and USPTO patent grants for Lebouitz; Kyle S..The latest application filed is for "high-selectivity etching system and method".
Patent | Date |
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Etching chamber with subchamber Grant 9,576,824 - Lebouitz , et al. February 21, 2 | 2017-02-21 |
Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers Grant 8,703,003 - Lebouitz , et al. April 22, 2 | 2014-04-22 |
Pulsed etching cooling Grant 8,377,253 - Lebouitz , et al. February 19, 2 | 2013-02-19 |
High-selectivity Etching System And Method App 20120244715 - Lebouitz; Kyle S. ;   et al. | 2012-09-27 |
Pulsed-continuous etching Grant 8,257,602 - Lebouitz , et al. September 4, 2 | 2012-09-04 |
Selective Etching Of Semiconductor Substrate(s) That Preserves Underlying Dielectric Layers App 20100267242 - Lebouitz; Kyle S. ;   et al. | 2010-10-21 |
Pulsed-continuous Etching App 20100126963 - Lebouitz; Kyle S. ;   et al. | 2010-05-27 |
Pulsed Etching Cooling App 20100084094 - Lebouitz; Kyle S. ;   et al. | 2010-04-08 |
Pulsed etching cooling Grant 7,638,435 - Lebouitz , et al. December 29, 2 | 2009-12-29 |
Etching Chamber With Subchamber App 20090233449 - Lebouitz; Kyle S. ;   et al. | 2009-09-17 |
Pulsed-continuous Etching App 20090065477 - Lebouitz; Kyle S. ;   et al. | 2009-03-12 |
Pulsed Etching Cooling App 20080207001 - Lebouitz; Kyle S. ;   et al. | 2008-08-28 |
Method of making a cutting instrument having integrated sensors Grant 6,972,199 - Lebouitz , et al. December 6, 2 | 2005-12-06 |
Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto App 20050230046 - Lebouitz, Kyle S. ;   et al. | 2005-10-20 |
Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto Grant 6,887,337 - Lebouitz , et al. May 3, 2 | 2005-05-03 |
Method of fabricating epidermal abrasion device Grant 6,610,235 - Lebouitz , et al. August 26, 2 | 2003-08-26 |
Minimally invasive sensing system for measuring rigidity of anatomical matter App 20030055360 - Zeleznik, Matthew A. ;   et al. | 2003-03-20 |
Cutting instrument having integrated sensors Grant 6,494,882 - Lebouitz , et al. December 17, 2 | 2002-12-17 |
Microfabricated filter and shell constructed with a permeable membrane Grant 6,478,974 - Lebouitz , et al. November 12, 2 | 2002-11-12 |
Method of making a cutting instrument having integrated sensors App 20020116022 - Lebouitz, Kyle S. ;   et al. | 2002-08-22 |
Apparatus for etching semiconductor samples and a source for providing a gas by sublimination thereto App 20020033229 - Lebouitz, Kyle S. ;   et al. | 2002-03-21 |
Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device Grant 6,187,210 - Lebouitz , et al. February 13, 2 | 2001-02-13 |
Microfabricated cantilever ratchet valve, and method for using same Grant 5,970,998 - Talbot , et al. October 26, 1 | 1999-10-26 |
Microneedle with isotropically etched tip, and method of fabricating such a device Grant 5,928,207 - Pisano , et al. July 27, 1 | 1999-07-27 |
Microfabricated filter and shell constructed with a permeable membrane Grant 5,919,364 - Lebouitz , et al. July 6, 1 | 1999-07-06 |
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