| Patent | Date |
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Plasma Processing Apparatus And Techniques
App 20210375590 - Bhosle; Vikram M. ; et al. | 2021-12-02 |
Plasma processing apparatus and techniques
Grant 11,120,973 - Bhosle , et al. September 14, 2 | 2021-09-14 |
Plasma Processing Apparatus And Techniques
App 20200357611 - Bhosle; Vikram M. ; et al. | 2020-11-12 |
Boron implanting using a co-gas
Grant 10,290,466 - Koo , et al. | 2019-05-14 |
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System
App 20180087148 - Koo; Bon-Woong ; et al. | 2018-03-29 |
Boron Implanting Using A Co-Gas
App 20180068830 - Koo; Bon-Woong ; et al. | 2018-03-08 |
Boron implanting using a co-gas
Grant 9,865,430 - Koo , et al. January 9, 2 | 2018-01-09 |
Method of improving ion beam quality in a non-mass-analyzed ion implantation system
Grant 9,840,772 - Koo , et al. December 12, 2 | 2017-12-12 |
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System
App 20170247791 - Koo; Bon-Woong ; et al. | 2017-08-31 |
Method of cleaning an extraction electrode assembly using pulsed biasing
Grant 9,711,316 - Leavitt , et al. July 18, 2 | 2017-07-18 |
Method of improving ion beam quality in a non-mass-analyzed ion implantation system
Grant 9,677,171 - Koo , et al. June 13, 2 | 2017-06-13 |
Boron Implanting Using A Co-Gas
App 20160163510 - Koo; Bon-Woong ; et al. | 2016-06-09 |
Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System
App 20150354056 - Koo; Bon-Woong ; et al. | 2015-12-10 |
Method for implant productivity enhancement
Grant 9,034,743 - Kurunczi , et al. May 19, 2 | 2015-05-19 |
Method Of Cleaning An Extraction Electrode Assembly Using Pulsed Biasing
App 20150101634 - Leavitt; Christopher J. ; et al. | 2015-04-16 |
Method For Implant Productivity Enhancement
App 20150024580 - Kurunczi; Peter F. ; et al. | 2015-01-22 |
Apparatus and method for maskless patterned implantation
Grant 8,907,307 - Leavitt , et al. December 9, 2 | 2014-12-09 |
Technique and apparatus for monitoring ion mass, energy, and angle in processing systems
Grant 8,698,107 - Godet , et al. April 15, 2 | 2014-04-15 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,698,109 - Godet , et al. April 15, 2 | 2014-04-15 |
Method of improving ion beam quality in an implant system
Grant 8,669,538 - Koo , et al. March 11, 2 | 2014-03-11 |
Plasma processing apparatus
Grant 8,623,171 - Godet , et al. January 7, 2 | 2014-01-07 |
Apparatus And Method For Charge Neutralization During Processing Of A Workpiece
App 20130146790 - Kurunczi; Peter F. ; et al. | 2013-06-13 |
Apparatus and method for charge neutralization during processing of a workpiece
Grant 8,461,554 - Kurunczi , et al. June 11, 2 | 2013-06-11 |
Method And System For Controlling Critical Dimension And Roughness In Resist Features
App 20130135598 - Godet; Ludovic ; et al. | 2013-05-30 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,354,655 - Godet , et al. January 15, 2 | 2013-01-15 |
Method And System For Controlling Critical Dimension And Roughness In Resist Features
App 20120280140 - Godet; Ludovic ; et al. | 2012-11-08 |
Apparatus And Method For Maskless Patterned Implantion
App 20120228515 - Leavitt; Christopher J. ; et al. | 2012-09-13 |
Technique And Apparatus For Monitoring Ion Mass, Energy, And Angle In Processing Systems
App 20120175518 - Godet; Ludovic ; et al. | 2012-07-12 |
Control Apparatus For Plasma Immersion Ion Implantation Of A Dielectric Substrate
App 20120000421 - Miller; Timothy ; et al. | 2012-01-05 |
Plasma Processing Apparatus
App 20100255683 - GODET; Ludovic ; et al. | 2010-10-07 |
Method And Apparatus For Plasma Dose Measurement
App 20100155600 - Dzengeleski; Joseph P ; et al. | 2010-06-24 |
Method And Apparatuses For Providing Electrical Contact For Plasma Processing Applications
App 20080160212 - Koo; Bon-Woong ; et al. | 2008-07-03 |
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