| Patent | Date |
|---|
Low-E panels with ternary metal oxide dielectric layer and method for forming the same
Grant 9,045,363 - Hassan , et al. June 2, 2 | 2015-06-02 |
Low-E panel with improved dielectric layer and method for forming the same
Grant 9,011,969 - Hassan , et al. April 21, 2 | 2015-04-21 |
Ganged scanning of multiple magnetrons, especially two level folded magnetrons
Grant 8,961,756 - Inagawa , et al. February 24, 2 | 2015-02-24 |
Heat stable SnAl and SnMg based dielectrics
Grant 8,784,934 - Hassan , et al. July 22, 2 | 2014-07-22 |
Method of generating high purity bismuth oxide
Grant 8,747,626 - Ding , et al. June 10, 2 | 2014-06-10 |
Electrochromic device with improved transparent conductor and method for forming the same
Grant 8,665,511 - Le , et al. March 4, 2 | 2014-03-04 |
SEED LAYER FOR ZnO AND DOPED-ZnO THIN FILM NUCLEATION AND METHODS OF SEED LAYER DEPOSITION
App 20140048013 - Ding; Guowen ; et al. | 2014-02-20 |
METHODS AND APPARATUSES FOR LOW RESISTIVITY Ag THIN FILM USING COLLIMATED SPUTTERING
App 20130319847 - Ding; Guowen ; et al. | 2013-12-05 |
TCO materials for solar applications
Grant 8,557,615 - Ding , et al. October 15, 2 | 2013-10-15 |
Method and apparatus for sputtering onto large flat panels
Grant 8,500,975 - Le , et al. August 6, 2 | 2013-08-06 |
Electrochromic Device With Improved Transparent Conductor And Method For Forming The Same
App 20130163064 - Le; Hien Minh Huu ; et al. | 2013-06-27 |
Low-E Panel With Improved Dielectric Layer And Method For Forming The Same
App 20130164560 - Hassan; Mohd Fadzli Anwar ; et al. | 2013-06-27 |
Low-E Panels With Ternary Metal Oxide Dielectric Layer And Method For Forming The Same
App 20130164561 - Hassan; Mohd Fadzli Anwar ; et al. | 2013-06-27 |
Tco Materials For Solar Applications
App 20130143354 - Ding; Guowen ; et al. | 2013-06-06 |
Heat Stable SnAl and SnMg Based Dielectrics
App 20130136932 - Hassan; Mohd Fadzli Anwar ; et al. | 2013-05-30 |
Method Of Forming Ato With High Throughput And Ellipsometry Diagnostic Method For The Tco Process
App 20130136851 - Ding; Guowen ; et al. | 2013-05-30 |
Method Of Generating High Purity Bismuth Oxide
App 20130136919 - Ding; Guowen ; et al. | 2013-05-30 |
Low-E Panel with Improved Layer Texturing and Method for Forming the Same
App 20130108862 - Hassan; Mohd Fadzli Anwar ; et al. | 2013-05-02 |
Back Contacts For Thin Film Solar Cells
App 20130081688 - Liang; Haifan ; et al. | 2013-04-04 |
Method for forming transparent conductive oxide
Grant 8,361,835 - Komin , et al. January 29, 2 | 2013-01-29 |
Method for forming transparent conductive oxide
Grant 8,318,589 - Komin , et al. November 27, 2 | 2012-11-27 |
Nitrogen reactive sputtering of Cu-In-Ga-N for solar cells
Grant 8,298,849 - Ding , et al. October 30, 2 | 2012-10-30 |
Method of manufacturing thin film solar cells having a high conversion efficiency
Grant 8,252,624 - Tanner , et al. August 28, 2 | 2012-08-28 |
Nitrogen Reactive Sputtering of Cu-In-Ga-N For Solar Cells
App 20120196399 - Ding; Guowen ; et al. | 2012-08-02 |
Physical Vapor Deposition Tool with Gas Separation
App 20120168304 - Le; Hien Minh Huu ; et al. | 2012-07-05 |
High Performance Multi-Layer Back Contact Stack For Silicon Solar Cells
App 20120006385 - Hassan; Mohd Fadzli Anwar ; et al. | 2012-01-12 |
Floating Grid Module Design For Thin Film Silicon Solar Cells
App 20110180122 - Tanner; David ; et al. | 2011-07-28 |
Manufacture Of Thin Film Solar Cells With High Conversion Efficiency
App 20110174362 - Tanner; David ; et al. | 2011-07-21 |
Method Of Manufacturing Thin Film Solar Cells Having A High Conversion Efficiency
App 20110177648 - Tanner; David ; et al. | 2011-07-21 |
Reliability Of Back End Of Line Process By Adding Pvd Oxide Film
App 20110162704 - Le; Hien-Minh Huu ; et al. | 2011-07-07 |
Remote plasma clean process with cycled high and low pressure clean steps
Grant 7,967,913 - Hua , et al. June 28, 2 | 2011-06-28 |
Conductive Contact Layer Formed On A Transparent Conductive Layer By A Reactive Sputter Deposition
App 20110126875 - Le; Hien-Minh Huu ; et al. | 2011-06-02 |
Method And Apparatus For Improving Photovoltaic Efficiency
App 20110088763 - Le; Hien-Minh Huu ; et al. | 2011-04-21 |
Selective Etch of Laser Scribed Solar Cell Substrate
App 20100323471 - Le; Hien-Minh Huu ; et al. | 2010-12-23 |
Solar Cell Substrate and Methods of Manufacture
App 20100313945 - Le; Hien-Minh Huu ; et al. | 2010-12-16 |
Method For Forming Transparent Conductive Oxide
App 20100311204 - KOMIN; VALERY V. ; et al. | 2010-12-09 |
Substrate Support In A Reactive Sputter Chamber
App 20100163406 - LE; HIEN-MINH HUU ; et al. | 2010-07-01 |
Transparent Conductive Film With High Surface Roughness Formed By A Reactive Sputter Deposition
App 20100132783 - Le; Hien-Minh Huu ; et al. | 2010-06-03 |
Transparent Conductive Film With High Transmittance Formed By A Reactive Sputter Deposition
App 20100133094 - Le; Hien-Minh Huu ; et al. | 2010-06-03 |
Remote Plasma Clean Process With Cycled High And Low Pressure Clean Steps
App 20100095979 - Hua; Zhong Qiang ; et al. | 2010-04-22 |
Photovoltaic Production Line
App 20100047954 - Su; Tzay-Fa (Jeff) ; et al. | 2010-02-25 |
Bonding of target tiles to backing plate with patterned bonding agent
Grant 7,644,745 - Le , et al. January 12, 2 | 2010-01-12 |
Forming metal silicide on silicon-containing features of a substrate
Grant 7,485,556 - Byun , et al. February 3, 2 | 2009-02-03 |
Substrate temperature regulating support pins
Grant 7,461,794 - Le , et al. December 9, 2 | 2008-12-09 |
Swinging Magnets To Improve Target Utilization
App 20080296142 - LE; HIEN-MINH HUU ; et al. | 2008-12-04 |
Ganged Scanning of Multiple Magnetrons, Especially Two Level Folded Magnetrons
App 20080029387 - INAGAWA; Makoto ; et al. | 2008-02-07 |
Magnetron Assembly
App 20080023319 - LE; HIEN MINH HUU ; et al. | 2008-01-31 |
Multiple target tiles with complementary beveled edges forming a slanted gap therebetween
Grant 7,316,763 - Hosokawa , et al. January 8, 2 | 2008-01-08 |
Flexible magnetron including partial rolling support and centering pins
App 20070151841 - Inagawa; Makoto ; et al. | 2007-07-05 |
Multiple zone sputtering target created through conductive and insulation bonding
App 20070056845 - Ye; Yan ; et al. | 2007-03-15 |
Substrate temperature regulating support pins
App 20070040041 - Le; Hien-Minh Huu ; et al. | 2007-02-22 |
Method and apparatus for sputtering onto large flat panels
App 20070012562 - Le; Hien Minh Huu ; et al. | 2007-01-18 |
Process kit design to reduce particle generation
App 20060292310 - Le; Hien-Minh Huu ; et al. | 2006-12-28 |
Bonding of target tiles to backing plate with patterned bonding agent
App 20060283703 - Le; Hien-Minh Huu ; et al. | 2006-12-21 |
Multiple scanning magnetrons
App 20060272935 - Le; Hien-Minh Huu ; et al. | 2006-12-07 |
Multiple target tiles with complementary beveled edges forming a slanted gap therebetween
App 20060266638 - Hosokawa; Akihiro ; et al. | 2006-11-30 |
Sputtering target tiles having structured edges separated by a gap
App 20060266639 - Le; Hien-Minh Huu ; et al. | 2006-11-30 |
Forming metal silicide on silicon-containing features of a substrate
App 20060211202 - Byun; Jeong Soo ; et al. | 2006-09-21 |
Reducing particle generation during sputter deposition
Grant 7,041,200 - Le , et al. May 9, 2 | 2006-05-09 |
Method and apparatus for depositing dielectric films
Grant 6,946,408 - Le , et al. September 20, 2 | 2005-09-20 |
Method and apparatus for depositing dielectric films
App 20050136691 - Le, Hien-Minh Huu ; et al. | 2005-06-23 |
Method and apparatus for forming an anti-reflective coating on a substrate
Grant 6,750,156 - Le , et al. June 15, 2 | 2004-06-15 |
Reducing particle generation during sputter deposition
App 20030196890 - Le, Hien-Minh Huu ; et al. | 2003-10-23 |
Method and apparatus for forming an anti-reflective coating on a substrate
App 20030077914 - Le, Hien-Minh Huu ; et al. | 2003-04-24 |
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