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Patent applications and USPTO patent grants for LE; Dung Huu.The latest application filed is for "passive control for through silicon via tilt in icp chamber".
Patent | Date |
---|---|
Passive Control For Through Silicon Via Tilt In Icp Chamber App 20140273460 - REYLAND; David ;   et al. | 2014-09-18 |
Wafer Edge Protection and Efficiency Using Inert Gas and Ring App 20140179108 - Le; Dung Huu ;   et al. | 2014-06-26 |
Removal Of Trapped Silicon With A Cleaning Gas App 20110274836 - Le; Dung Huu ;   et al. | 2011-11-10 |
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