Le; Andrew V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Le; Andrew V..The latest application filed is for "advanced in-situ particle detection system for semiconductor substrate processing systems".

Company Profile

6.8.10

Le; Andrew V. - Los Gatos CA
Le; Andrew V. - San Jose CA
LE; Andrew V. - Branford CT
Le; Andrew V. - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Advanced in-situ particle detection system for semiconductor substrate processing systems Grant 10,883,932 - Zhang , et al. January 5, 2	2021-01-05
Advanced coating method and materials to prevent HDP-CVD chamber arcing Grant 10,655,223 - Zhang , et al.	2020-05-19
Arcing detection apparatus for plasma processing Grant 10,580,626 - Zhang , et al.	2020-03-03
Advanced In-situ Particle Detection System For Semiconductor Substrate Processing Systems App 20190323960 - ZHANG; Lin ; et al.	2019-10-24
Advanced in-situ particle detection system for semiconductor substrate processing systems Grant 10,365,216 - Zhang , et al. July 30, 2	2019-07-30
Self Regulating Bioreactor Apparatus And Methods App 20190218492 - ENGLER; Alexander J. ; et al.	2019-07-18
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures Grant 10,330,612 - Zhang , et al.	2019-06-25
Advanced Coating Method And Materials To Prevent Hdp-cvd Chamber Arcing App 20190169743 - ZHANG; Lin ; et al.	2019-06-06
Advanced coating method and materials to prevent HDP-CVD chamber arcing Grant 10,208,380 - Zhang , et al. Feb	2019-02-19
Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber Grant 10,002,745 - Zhang , et al. June 19, 2	2018-06-19
Advanced In-situ Particle Detection System For Semiconductor Substrate Processing Systems App 20180156727 - ZHANG; Lin ; et al.	2018-06-07
Plasma Treatment Process For In-situ Chamber Cleaning Efficiency Enhancemnet In Plasma Processing Chamber App 20170323768 - ZHANG; Lin ; et al.	2017-11-09
Advanced Coating Method And Materials To Prevent Hdp-cvd Chamber Arcing App 20170159176 - ZHANG; Lin ; et al.	2017-06-08
Arcing Detection Apparatus For Plasma Processing App 20170162370 - ZHANG; Lin ; et al.	2017-06-08
High Productivity Pecvd Tool For Wafer Processing Of Semiconductor Manufacturing App 20170114462 - ZHANG; Lin ; et al.	2017-04-27
Multi-function X-ray Metrology Tool For Production Inspection/monitoring Of Thin Films And Multidimensional Structures App 20160077025 - ZHANG; Lin ; et al.	2016-03-17
Erosion resistant slit valve Grant 6,764,265 - Kunze , et al. July 20, 2	2004-07-20
Erosion resistant slit valve App 20030129044 - Kunze, Charles S. ; et al.	2003-07-10

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