Patent | Date |
---|
Magnesium Ion Selective Membranes App 20210231601 - NYGAARD; Thomas Pedersen ;   et al. | 2021-07-29 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system Grant 9,019,466 - Leenders , et al. April 28, 2 | 2015-04-28 |
Method and apparatus for controlled slurry distribution Grant 7,887,396 - Laursen , et al. February 15, 2 | 2011-02-15 |
Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation Grant 7,622,052 - Quarantello , et al. November 24, 2 | 2009-11-24 |
Lithographic Apparatus, Reflective Member And A Method of Irradiating The Underside Of A Liquid Supply System App 20090027636 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2009-01-29 |
Method and apparatus for controlling slurry distribution Grant 7,314,402 - Laursen , et al. January 1, 2 | 2008-01-01 |
Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system Grant 7,264,537 - Laursen , et al. September 4, 2 | 2007-09-04 |
Method for polishing copper on a workpiece surface App 20060255016 - Svirchevski; Julia ;   et al. | 2006-11-16 |
Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization Grant 7,115,017 - Laursen , et al. October 3, 2 | 2006-10-03 |
Method And Apparatus For Controlled Slurry Distribution App 20060151110 - Laursen; Thomas ;   et al. | 2006-07-13 |
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,960,115 - Weldon , et al. November 1, 2 | 2005-11-01 |
Multizone carrier with process monitoring system for chemical-mechanical planarization tool Grant 6,923,711 - Laursen , et al. August 2, 2 | 2005-08-02 |
Detection system for chemical-mechanical planarization tool App 20050026542 - Battal, Tezer ;   et al. | 2005-02-03 |
Method for planarizing a work piece App 20050016861 - Laursen, Thomas ;   et al. | 2005-01-27 |
Flexible snapshot in endpoint detection Grant 6,821,794 - Laursen , et al. November 23, 2 | 2004-11-23 |
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,805,613 - Weldon , et al. October 19, 2 | 2004-10-19 |
Multiprobe detection system for chemical-mechanical planarization tool App 20040038624 - Weldon, Matthew ;   et al. | 2004-02-26 |
Method for polishing copper on a workpiece surface App 20030134576 - Chadda, Saket ;   et al. | 2003-07-17 |
Method and apparatus for controlling slurry distribution App 20030092363 - Laursen, Thomas ;   et al. | 2003-05-15 |
Flexible snapshot in endpoint detection App 20030087459 - Laursen, Thomas ;   et al. | 2003-05-08 |
Multizone slurry delivery for chemical mechanical polishing tool App 20020173232 - Laursen, Thomas | 2002-11-21 |
Multizone carrier with process monitoring system for chemical-mechanical planarization tool App 20020098777 - Laursen, Thomas ;   et al. | 2002-07-25 |
Sacrificial deposit to improve damascene pattern planarization in semiconductor wafers Grant 6,258,711 - Laursen July 10, 2 | 2001-07-10 |