Lau; Allen K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lau; Allen K..The latest application filed is for "gas diffuser mounting plate for reduced particle generation".
- Lau; Allen K. - Cupertino CA
- Lau; Allen K. - San Jose CA
| Patent | Date |
|---|---|
| Gas diffuser support structure for reduced particle generation Grant 10,927,461 - Lau , et al. February 23, 2 | 2021-02-23 |
| Chamber liner Grant 10,923,327 - Li , et al. February 16, 2 | 2021-02-16 |
| Gas diffuser mounting plate for reduced particle generation Grant 10,883,174 - Lau , et al. January 5, 2 | 2021-01-05 |
| Gas Diffuser Mounting Plate For Reduced Particle Generation App 20200165726 - LAU; Allen K. ; et al. | 2020-05-28 |
| Gas Diffuser Support Structure For Reduced Particle Generation App 20200071833 - LAU; Allen K. ; et al. | 2020-03-05 |
| Chamber Liner App 20200043706 - LI; Jianheng ; et al. | 2020-02-06 |
| Showerhead support structures Grant 9,822,449 - Tiner , et al. November 21, 2 | 2017-11-21 |
| Gas Diffuser Having Grooved Hollow Cathodes App 20170178867 - KUDELA; Jozef ; et al. | 2017-06-22 |
| Showerhead Support Structures App 20170081763 - TINER; Robin L. ; et al. | 2017-03-23 |
| Ring Assembly For Substrate Processing Chamber App 20100065216 - Tiller; Jennifer ; et al. | 2010-03-18 |
| Ring assembly for substrate processing chamber App 20070283884 - Tiller; Jennifer ; et al. | 2007-12-13 |
| Coil and coil support for generating a plasma App 20070062452 - Pancham; Ian A. ; et al. | 2007-03-22 |
| Build-in LOTO device on equipment breaker panel Grant 7,148,435 - Lau , et al. December 12, 2 | 2006-12-12 |
| Build-in loto device on equipment breaker panel App 20060151306 - Lau; Allen K. ; et al. | 2006-07-13 |
| Coil and coil support for generating a plasma App 20040118521 - Pancham, Ian A. ; et al. | 2004-06-24 |
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