LATTARD; Ludovic

Patent Applications and Registrations

Patent applications and USPTO patent grants for LATTARD; Ludovic.The latest application filed is for "method and system for the removal and/or avoidance of contamination in charged particle beam systems".

Company Profile

3.4.10

LATTARD; Ludovic - Delft NL
LATTARD; Ludovic - Garching DE
LATTARD; Ludovic - COUBLEVIE FR
Lattard; Ludovic - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems App 20210237129 - SMITS; Marc ; et al.	2021-08-05
Method and system for the removal and/or avoidance of contamination in charged particle beam systems Grant 10,987,705 - Smits , et al. April 27, 2	2021-04-27
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems App 20200230665 - SMITS; Marc ; et al.	2020-07-23
Method and system for the removal and/or avoidance of contamination in charged particle beam systems Grant 10,632,509 - Smits , et al.	2020-04-28
Edge Bead Removal System And Method Of Treating A Substrate App 20200096867 - LATTARD; Ludovic ; et al.	2020-03-26
Method For Electronic Lithography With Electrostatic Screening App 20190057838 - LATTARD; Ludovic ; et al.	2019-02-21
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems App 20180236505 - SMITS; Marc ; et al.	2018-08-23
Method and system for the removal and/or avoidance of contamination in charged particle beam systems Grant 9,981,293 - Smits , et al. May 29, 2	2018-05-29
Method And System For The Removal And/or Avoidance Of Contamination In Charged Particle Beam Systems App 20170304878 - Smits; Marc ; et al.	2017-10-26
Semiconductor device, method for manufacturing semiconductor devices and mask systems used in the manufacturing of semiconductor devices Grant 8,018,070 - Blawid , et al. September 13, 2	2011-09-13
Semiconductor Device, Method for Manufacturing Semiconductor Devices and Mask Systems Used in the Manufacturing of Semiconductor Devices App 20080261395 - Blawid; Stefan ; et al.	2008-10-23
Method for Processing a Structure of a Semiconductor Component, and Structure in a Semiconductor Component App 20080061338 - Lattard; Ludovic ; et al.	2008-03-13
Hard Mask Layer Stack And A Method Of Patterning App 20070243707 - Manger; Dirk ; et al.	2007-10-18
Device and a method and mask for forming a device App 20070218627 - Lattard; Ludovic ; et al.	2007-09-20

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