Lansford; Jeremy

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lansford; Jeremy.The latest application filed is for "method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer".

Company Profile

0.9.1

Lansford; Jeremy - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for providing etch uniformity using zoned temperature control Grant 6,746,616 - Fulford , et al. June 8, 2	2004-06-08
Method and apparatus for monitoring consumable performance Grant 6,567,718 - Campbell , et al. May 20, 2	2003-05-20
Method for controlling deposition parameters based on polysilicon grain size feedback Grant 6,511,898 - Sonderman , et al. January 28, 2	2003-01-28
Feed-forward control of an etch processing tool Grant 6,485,990 - Lansford November 26, 2	2002-11-26
Feedback control of polish buff time as a function of scratch count Grant 6,335,286 - Lansford January 1, 2	2002-01-01
Feedback control of deposition thickness based on polish planarization Grant 6,291,253 - Lansford , et al. September 18, 2	2001-09-18
Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing Grant 6,276,989 - Campbell , et al. August 21, 2	2001-08-21
Method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer App 20010000773 - Campbell, William Jarrett ; et al.	2001-05-03
Method for characterizing polish pad lots to eliminate or reduce tool requalification after changing a polishing pad Grant 6,217,412 - Campbell , et al. April 17, 2	2001-04-17
Reduced variation in interconnect resistance using run-to-run control of chemical-mechanical polishing during semiconductor fabrication Grant 6,157,078 - Lansford December 5, 2	2000-12-05

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