Lanio; Stefan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lanio; Stefan.The latest application filed is for "secondary charged particle imaging system".

Company Profile

3.43.41

Lanio; Stefan - Erding DE
Lanio; Stefan - US
Lanio; Stefan - Munich DE
Lanio; Stefan - Rossdorf DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Secondary Charged Particle Imaging System App 20210151284 - Firnkes; Matthias ; et al.	2021-05-20
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen Grant 10,991,544 - Firnkes , et al. April 27, 2	2021-04-27
Charged Particle Beam Device, Objective Lens Module, Electrode Device, And Method Of Inspecting A Specimen App 20200381208 - Firnkes; Matthias ; et al.	2020-12-03
Simplified particle emitter and method of operating thereof Grant 10,699,867 - Lanio , et al.	2020-06-30
Method of operating a charged particle beam specimen inspection system Grant 10,522,327 - Erel , et al. Dec	2019-12-31
On-axis illumination and alignment for charge control during charged particle beam inspection Grant 10,168,614 - Goldenshtein , et al. J	2019-01-01
On-axis Illumination And Alignment For Charge Control During Charged Particle Beam Inspection App 20180364564 - Goldenshtein; Alex ; et al.	2018-12-20
Method Of Operating A Charged Particle Beam Specimen Inspection System App 20180330919 - Erel; Gilad ; et al.	2018-11-15
System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics Grant 10,103,004 - Firnkes , et al. October 16, 2	2018-10-16
Simplified Particle Emitter And Method Of Operating Thereof App 20180254165 - LANIO; Stefan ; et al.	2018-09-06
Charged particle beam specimen inspection system and method for operation thereof Grant 10,056,228 - Erel , et al. August 21, 2	2018-08-21
System for imaging a secondary charged particle beam with adaptive secondary charged particle optics Grant 9,953,805 - Firnkes , et al. April 24, 2	2018-04-24
Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam Grant 9,805,908 - Firnkes , et al. October 31, 2	2017-10-31
Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device Grant 9,697,983 - Lanio , et al. July 4, 2	2017-07-04
Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device Grant 9,666,406 - Lanio , et al. May 30, 2	2017-05-30
System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device Grant 9,666,405 - Lanio , et al. May 30, 2	2017-05-30
System For Imaging A Secondary Charged Particle Beam With Adaptive Secondary Charged Particle Optics App 20170076910 - Firnkes; Matthias ; et al.	2017-03-16
System And Method For Imaging A Secondary Charged Particle Beam With Adaptive Secondary Charged Particle Optics App 20170003235 - Firnkes; Matthias ; et al.	2017-01-05
Beam separator device, charged particle beam device and methods of operating thereof Grant 9,472,373 - Lanio , et al. October 18, 2	2016-10-18
Signal Charged Particle Deflection Device, Signal Charged Particle Detection System, Charged Particle Beam Device And Method Of Detection Of A Signal Charged Particle Beam App 20160240347 - Firnkes; Matthias ; et al.	2016-08-18
Scanning Charged Particle Beam Device Having An Aberration Correction Aperture And Method Of Operating Thereof App 20160189916 - Frosien; Jurgen ; et al.	2016-06-30
Charged Particle Beam Specimen Inspection System And Method For Operation Thereof App 20160035537 - Erel; Gilad ; et al.	2016-02-04
Secondary Electron Optics And Detection Device App 20150228452 - LANIO; Stefan ; et al.	2015-08-13
Electron beam device with dispersion compensation, and method of operating same Grant 9,048,068 - Lanio , et al. June 2, 2	2015-06-02
Contamination reduction electrode for particle detector Grant 8,963,084 - Lanio February 24, 2	2015-02-24
Switchable multi perspective detector, optics therefore and method of operating thereof Grant 8,963,083 - Firnkes , et al. February 24, 2	2015-02-24
Switchable Multi Perspective Detector, Optics Therefore And Method Of Operating Thereof App 20150021474 - FIRNKES; Matthias ; et al.	2015-01-22
Octopole device and method for spot size improvement Grant 8,816,270 - Kramer , et al. August 26, 2	2014-08-26
Contamination Reduction Electrode For Particle Detector App 20140191127 - Lanio; Stefan	2014-07-10
Secondary Electron Optics And Detection Device App 20140175277 - Lanio; Stefan ; et al.	2014-06-26
Switchable multi perspective detector, optics therefor and method of operating thereof Grant 8,723,117 - Lanio , et al. May 13, 2	2014-05-13
Octopole Device And Method For Spot Size Improvement App 20140103201 - Kramer; Aleksandra ; et al.	2014-04-17
Contamination Reduction Electrode For Particle Detector App 20130320228 - Lanio; Stefan	2013-12-05
Shielding member having a charge control electrode, and a charged particle beam apparatus Grant 8,563,927 - Winkler , et al. October 22, 2	2013-10-22
Switchable Multi Perspective Detector, Optics Therefor And Method Of Operating Thereof App 20130270438 - LANIO; Stefan ; et al.	2013-10-17
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens Grant 8,481,958 - Lanio July 9, 2	2013-07-09
Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator Grant 8,373,136 - Schoenecker , et al. February 12, 2	2013-02-12
Shielding Member Having A Charge Control Electrode, And A Charged Particle Beam Apparatus App 20130026385 - WINKLER; Dieter ; et al.	2013-01-31
Simplified Particle Emitter And Method Of Operating Thereof App 20120091359 - LANIO; Stefan ; et al.	2012-04-19
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens Grant 8,158,954 - Lanio April 17, 2	2012-04-17
Multi-axis Lens, Beam System Making Use Of The Compound Lens, And Method Of Manufacturing The Compound Lens App 20120037813 - LANIO; Stefan	2012-02-16
Electron Beam Device With Dispersion Compensation, And Method Of Operating Same App 20110272577 - LANIO; Stefan ; et al.	2011-11-10
Achromatic Beam Deflector, Achromatic Beam Separator, Charged Particle Device, Method Of Operating An Achromatic Beam Deflector, And Method Of Operating An Achromatic Beam Separator App 20110089322 - SCHOENECKER; Gerald ; et al.	2011-04-21
Charged particle beam device with aperture Grant 7,763,866 - Frosien , et al. July 27, 2	2010-07-27
Double stage charged particle beam energy width reduction system for charged particle beam system Grant 7,679,054 - Frosien , et al. March 16, 2	2010-03-16
Multi-axis Lens, Beam System Making Use Of The Compound Lens, And Method Of Manufacturing The Compound Lens App 20090261266 - LANIO; STEFAN	2009-10-22
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens Grant 7,576,917 - Lanio August 18, 2	2009-08-18
Charged particle beam energy width reduction system for charged particle beam system Grant 7,507,956 - Frosien , et al. March 24, 2	2009-03-24
Single stage charged particle beam energy width reduction system for charged particle beam system Grant 7,468,517 - Frosien , et al. December 23, 2	2008-12-23
Analyzing system and charged particle beam device Grant 7,439,500 - Frosien , et al. October 21, 2	2008-10-21
Adjustable Aperture Element For Particle Beam Device, Method Of Operating And Manufacturing Thereof App 20080135786 - Lanio; Stefan ; et al.	2008-06-12
High current density particle beam system Grant 7,335,894 - Frosien , et al. February 26, 2	2008-02-26
Charged Particle Beam Device with Aperture App 20070257207 - Frosien; Jurgen ; et al.	2007-11-08
Double Stage Charged Particle Beam Energy Width Reduction System For Charged Particle Beam System App 20070200069 - Frosien; Jurgen ; et al.	2007-08-30
Single stage charged particle beam energy width reduction system for charged particle beam system App 20070158561 - Frosien; Jurgen ; et al.	2007-07-12
Charged particle beam energy width reduction system for charged particle beam system App 20070069150 - Frosien; Jurgen ; et al.	2007-03-29
Analyzing system and charged particle beam device App 20060226361 - Frosien; Juergen ; et al.	2006-10-12
Stabilized emitter and method for stabilizing same App 20060226753 - Adamec; Pavel ; et al.	2006-10-12
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens App 20060163488 - Lanio; Stefan	2006-07-27
High current density particle beam system App 20060151711 - Frosien; Juergen ; et al.	2006-07-13
Particle beam apparatus Grant 6,667,478 - Frosien , et al. December 23, 2	2003-12-23
Particle beam apparatus for tilted observation of a specimen Grant 6,627,890 - Lanio September 30, 2	2003-09-30
Particle beam apparatus App 20030062478 - Frosien, Jurgen ; et al.	2003-04-03
Particle beam apparatus for tilted observation of a specimen App 20030010926 - Lanio, Stefan	2003-01-16
Particle beam apparatus Grant 6,407,387 - Frosien , et al. June 18, 2	2002-06-18
Particle beam system App 20020067482 - Lanio, Stefan ; et al.	2002-06-06
Dynamically compensated objective lens-detection device and method Grant 6,232,601 - Schmitt , et al. May 15, 2	2001-05-15
Optical unit Grant 6,051,838 - Frosien , et al. April 18, 2	2000-04-18
Gun lens for generating a particle beam Grant 5,895,919 - Frosien , et al. April 20, 1	1999-04-20
Scanning electron beam device Grant 5,422,486 - Herrmann , et al. June 6, 1	1995-06-06
Alpha-type electron energy filter Grant 4,760,261 - Rose , et al. July 26, 1	1988-07-26

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