| Patent | Date |
|---|
Patterning scheme to improve EUV resist and hard mask selectivity
Grant 11,437,238 - Fung , et al. September 6, 2 | 2022-09-06 |
Deposition Of Boron Films
App 20220199401 - Lin; Yung-Chen ; et al. | 2022-06-23 |
Tin Oxide And Tin Carbide Materials For Semiconductor Patterning Applications
App 20220189786 - LIN; Yung-chen ; et al. | 2022-06-16 |
Method Of Forming Interconnect For Semiconductor Device
App 20210125864 - Jiang; Hao ; et al. | 2021-04-29 |
Diamond-like carbon as mandrel
Grant 10,954,129 - Koshizawa , et al. March 23, 2 | 2021-03-23 |
Method of etching hardmasks containing high hardness materials
Grant 10,867,795 - Fung , et al. December 15, 2 | 2020-12-15 |
Film Stack For Lithography Applications
App 20200273705 - SINGH; Tejinder ; et al. | 2020-08-27 |
Patterning Scheme To Improve EUV Resist And Hard Mask Selectivity
App 20200013620 - Fung; Nancy ; et al. | 2020-01-09 |
Diamond-Like Carbon As Mandrel
App 20180358229 - Koshizawa; Takehito ; et al. | 2018-12-13 |
Methods Of Etching Hardmasks Containing High Hardness Materials
App 20180337047 - FUNG; Nancy ; et al. | 2018-11-22 |
Methods for coating a substrate with an amphiphilic compound
Grant 9,245,848 - Duong , et al. January 26, 2 | 2016-01-26 |
Plasma treatment of low-K surface to improve barrier deposition
Grant 9,245,793 - Limdulpaiboon , et al. January 26, 2 | 2016-01-26 |
Combinatorial plasma enhanced deposition and etch techniques
Grant 9,245,744 - Shanker , et al. January 26, 2 | 2016-01-26 |
Method to control depth profiles of dopants using a remote plasma source
Grant 9,224,644 - Niyogi , et al. December 29, 2 | 2015-12-29 |
Methods for forming resistive switching memory elements
Grant 9,178,145 - Kumar , et al. November 3, 2 | 2015-11-03 |
High metal ionization sputter gun
Grant 9,175,382 - Yang , et al. November 3, 2 | 2015-11-03 |
High throughput current-voltage combinatorial characterization tool and method for combinatorial solar test substrates
Grant 9,176,181 - Wang , et al. November 3, 2 | 2015-11-03 |
Resistive-switching memory element
Grant 9,147,841 - Chiang , et al. September 29, 2 | 2015-09-29 |
Method and system of improved uniformity testing
Grant 9,105,563 - Chen , et al. August 11, 2 | 2015-08-11 |
High throughput quantum efficiency combinatorial characterization tool and method for combinatorial solar test substrates
Grant 9,103,871 - Wang , et al. August 11, 2 | 2015-08-11 |
Methods and Apparatus for Combinatorial PECVD or PEALD
App 20150184298 - Shao; ShouQian ; et al. | 2015-07-02 |
Plasma Treatment of Low-K Surface to Improve Barrier Deposition
App 20150179509 - Limdulpaiboon; Ratsamee ; et al. | 2015-06-25 |
Resistive-Switching Memory Element
App 20150147866 - Chiang; Tony P. ; et al. | 2015-05-28 |
Methods and apparatus for combinatorial PECVD or PEALD
Grant 9,023,438 - Shao , et al. May 5, 2 | 2015-05-05 |
Hydrogen plasma cleaning of germanium oxide surfaces
Grant 8,987,143 - Limdulpaiboon , et al. March 24, 2 | 2015-03-24 |
Resistive-switching memory element
Grant 8,980,709 - Chiang , et al. March 17, 2 | 2015-03-17 |
Methods for Coating a Substrate with an Amphiphilic Compound
App 20150001555 - Duong; Anh ; et al. | 2015-01-01 |
Combinatorial processing using high deposition rate sputtering
Grant 8,920,618 - Yang , et al. December 30, 2 | 2014-12-30 |
Control of film composition in co-sputter deposition by using collimators
Grant 8,906,207 - Yang , et al. December 9, 2 | 2014-12-09 |
Nucleation interface for high-k layer on germanium
Grant 8,901,677 - Greer , et al. December 2, 2 | 2014-12-02 |
Methods and systems for dispensing different liquids for high productivity combinatorial processing
Grant 8,893,923 - Kahlon , et al. November 25, 2 | 2014-11-25 |
Nonvolatile memory elements with metal-deficient resistive-switching metal oxides
Grant 8,889,479 - Kumar , et al. November 18, 2 | 2014-11-18 |
Methods for coating a substrate with an amphiphilic compound
Grant 8,871,860 - Duong , et al. October 28, 2 | 2014-10-28 |
Screening of Surface Passivation Processes for Germanium Channels
App 20140315331 - Niyogi; Sandip ; et al. | 2014-10-23 |
Methods for forming resistive switching memory elements
Grant 8,865,518 - Kumar , et al. October 21, 2 | 2014-10-21 |
Formation of a zinc passivation layer on titanium or titanium alloys used in semiconductor processing
Grant 8,859,427 - Kong , et al. October 14, 2 | 2014-10-14 |
Hydrogen Plasma Cleaning of Germanium Oxide Surfaces
App 20140273493 - Limdulpaiboon; Ratsamee ; et al. | 2014-09-18 |
Methods of Plasma Surface Treatment in a PVD Chamber
App 20140262749 - Bodke; Ashish ; et al. | 2014-09-18 |
Channel-Last Methods for Making FETS
App 20140264281 - Niyogi; Sandip ; et al. | 2014-09-18 |
Atomic Layer Deposition of Reduced-Leakage Post-Transition Metal Oxide Films
App 20140273525 - Pang; Kurt ; et al. | 2014-09-18 |
Controlling Radical Lifetimes in a Remote Plasma Chamber
App 20140273309 - Niyogi; Sandip ; et al. | 2014-09-18 |
Apparatus and method for testing electromigration in semiconductor devices
Grant 8,836,365 - Wang , et al. September 16, 2 | 2014-09-16 |
Nucleation Interface for High-K Layer on Germanium
App 20140252565 - Greer; Frank ; et al. | 2014-09-11 |
Surface treatment methods and systems for substrate processing
Grant 8,822,313 - Lang , et al. September 2, 2 | 2014-09-02 |
Combinatorial processing using a remote plasma source
Grant 8,821,987 - Shanker , et al. September 2, 2 | 2014-09-02 |
Method and apparatus for high-K gate performance improvement and combinatorial processing
Grant 8,821,985 - Shao , et al. September 2, 2 | 2014-09-02 |
Methods for forming resistive switching memory elements
App 20140231744 - Kumar; Nitin ; et al. | 2014-08-21 |
Flowable film dielectric gap fill process
Grant 8,809,161 - Gauri , et al. August 19, 2 | 2014-08-19 |
Combinatorial Plasma Enhanced Deposition and EtchTechniques
App 20140227880 - Shanker; Sunil ; et al. | 2014-08-14 |
Method to Control Depth Profiles of Dopants Using a Remote Plasma Source
App 20140179100 - Niyogi; Sandip ; et al. | 2014-06-26 |
Sputter Gun
App 20140174918 - Yang; Hong Sheng ; et al. | 2014-06-26 |
High Deposition Rate Chamber with Co-Sputtering Capabilities
App 20140174907 - Yang; Hong Sheng ; et al. | 2014-06-26 |
Methods and Systems for Reducing Particles During Physical Vapor Deposition
App 20140174911 - Lang; Chi-I | 2014-06-26 |
Multi-Piece Target and Magnetron to Prevent Sputtering of Target Backing Materials
App 20140174921 - Yang; Hong Sheng ; et al. | 2014-06-26 |
Surface Treatment Methods and Systems for Substrate Processing
App 20140179113 - Lang; Chi-I ; et al. | 2014-06-26 |
Methods and Systems for Controlling Gate Dielectric Interfaces of MOSFETs
App 20140179095 - Niyogi; Sandip ; et al. | 2014-06-26 |
Methods and Systems for Reducing Particles During Physical Vapor Deposition
App 20140174914 - Lang; Chi-I | 2014-06-26 |
Combinatorial Processing Using a Remote Plasma Source
App 20140166616 - Shanker; Sunil ; et al. | 2014-06-19 |
Customizing Etch Selectivity with Sequential Multi-Stage Etches with Complementary Etchants
App 20140170857 - Lang; Chi-I ; et al. | 2014-06-19 |
Methods and Apparatus for Combinatorial PECVD or PEALD
App 20140170335 - Shao; ShouQian ; et al. | 2014-06-19 |
Contamination Control, Rinsing, and Purging Methods to Extend the Life of Components within Combinatorial Processing Systems
App 20140144471 - Kahlon; Satbir ; et al. | 2014-05-29 |
Methods and Systems for Dispensing Different Liquids for High Productivity Combinatorial Processing
App 20140144512 - Kahlon; Satbir ; et al. | 2014-05-29 |
Combinatorial plasma enhanced deposition and etch techniques
Grant 8,726,838 - Shanker , et al. May 20, 2 | 2014-05-20 |
Formation of a zinc passivation layer on titanium or titanium alloys used in semiconductor processing
Grant 8,728,879 - Kong , et al. May 20, 2 | 2014-05-20 |
Method and Apparatus for High-K Gate Performance Improvement and Combinatorial Processing
App 20140127422 - Shao; ShouQian ; et al. | 2014-05-08 |
Graphene Barrier Layers for Interconnects and Methods for Forming the Same
App 20140106561 - Niyogi; Sandip ; et al. | 2014-04-17 |
Method and system of improved reliability testing
Grant 8,683,420 - Wang , et al. March 25, 2 | 2014-03-25 |
Plasma processing of metal oxide films for resistive memory device applications
Grant 8,679,988 - Lee , et al. March 25, 2 | 2014-03-25 |
High Throughput Quantum Efficiency Combinatorial Characterization Tool and Method for Combinatorial Solar Test Substrates
App 20140071435 - Wang; Yun ; et al. | 2014-03-13 |
Combinatorial approach to the development of cleaning formulations for glue removal in semiconductor applications
Grant 8,657,966 - Kalyankar , et al. February 25, 2 | 2014-02-25 |
Flowable Film Dielectric Gap Fill Process
App 20140017904 - GAURI; Vishal ; et al. | 2014-01-16 |
Resistive-Switching Memory Element
App 20140014892 - Chiang; Tony P. ; et al. | 2014-01-16 |
High Throughput Current-Voltage Combinatorial Characterization Tool and Method for Combinatorial Solar Test Substrates
App 20130342230 - Wang; Yun ; et al. | 2013-12-26 |
High throughput quantum efficiency combinatorial characterization tool and method for combinatorial solar test substrates
Grant 8,614,787 - Wang , et al. December 24, 2 | 2013-12-24 |
Methods for Forming Nickel Oxide Films for Use With Resistive Switching Memory Devices
App 20130334491 - Sun; Zhi-Wen Wen ; et al. | 2013-12-19 |
Methods for Coating a Substrate with an Amphiphilic Compound
App 20130338305 - Duong; Anh ; et al. | 2013-12-19 |
Methods for forming nickel oxide films for use with resistive switching memory devices/US
Grant 8,609,475 - Sun , et al. December 17, 2 | 2013-12-17 |
Stamp usage to enhance surface layer functionalization and selectivity
Grant 8,580,344 - Kalyankar , et al. November 12, 2 | 2013-11-12 |
System and method for increasing productivity of organic light emitting diode material screening
Grant 8,580,584 - Wang , et al. November 12, 2 | 2013-11-12 |
CVD flowable gap fill
Grant 8,580,697 - Lang , et al. November 12, 2 | 2013-11-12 |
Substrate processing including a masking layer
Grant 8,575,021 - Boussie , et al. November 5, 2 | 2013-11-05 |
High throughput current-voltage combinatorial characterization tool and method for combinatorial solar test substrates
Grant 8,552,755 - Wang , et al. October 8, 2 | 2013-10-08 |
Methods for improving selectivity of electroless deposition processes
Grant 8,551,560 - Tong , et al. October 8, 2 | 2013-10-08 |
Methods for forming resistive switching memory elements
App 20130260508 - Kumar; Nitin ; et al. | 2013-10-03 |
Methods for coating a substrate with an amphiphilic compound
Grant 8,535,972 - Fresco , et al. September 17, 2 | 2013-09-17 |
Methods For Forming Nickel Oxide Films For Use With Resistive Switching Memory Devices/us
App 20130230962 - Sun; Zhi-Wen ; et al. | 2013-09-05 |
Substrate Processing Including A Masking Layer
App 20130217238 - Boussie; Thomas R. ; et al. | 2013-08-22 |
High Throughput Current-Voltage Combinatorial Characterization Tool and Method for Combinatorial Solar Test Substrates
App 20130214808 - Wang; Yun ; et al. | 2013-08-22 |
Flowable film dielectric gap fill process
Grant 8,481,403 - Gauri , et al. July 9, 2 | 2013-07-09 |
Combinatorial Processing Using High Deposition Rate Sputtering
App 20130167773 - Yang; Hong Sheng ; et al. | 2013-07-04 |
High Throughput Processing Using Metal Organic Chemical Vapor Deposition
App 20130171350 - Kraus; Philip A. ; et al. | 2013-07-04 |
Methods for forming resistive switching memory elements
Grant 8,476,107 - Kumar , et al. July 2, 2 | 2013-07-02 |
Layer Thickness Measurement
App 20130162995 - Huang; Shuogang ; et al. | 2013-06-27 |
Profiled Sputter Target
App 20130146442 - YANG; HONG SHENG ; et al. | 2013-06-13 |
Resistive-switching Memory Element
App 20130140511 - Chiang; Tony ; et al. | 2013-06-06 |
Combinatorial Deposition Based On A Spot Apparatus
App 20130125818 - Wright; Jason ; et al. | 2013-05-23 |
Plasma Processing Of Metal Oxide Films For Resistive Memory Device Applications
App 20130130464 - Lee; Albert ; et al. | 2013-05-23 |
Method and System of Improved Uniformity Testing
App 20130122614 - Chen; Charlene ; et al. | 2013-05-16 |
Vapor based combinatorial processing
Grant 8,440,259 - Chiang , et al. May 14, 2 | 2013-05-14 |
High throughput current-voltage combinatorial characterization tool and method for combinatorial solar test substrates
Grant 8,432,177 - Wang , et al. April 30, 2 | 2013-04-30 |
High Metal Ionization Sputter Gun
App 20130101750 - Yang; Hong Sheng ; et al. | 2013-04-25 |
Method and Apparatus for Enhanced Film Uniformity
App 20130101749 - Yang; Hong Sheng ; et al. | 2013-04-25 |
Substrate processing including a masking layer
Grant 8,426,970 - Fresco , et al. April 23, 2 | 2013-04-23 |
Nonvolatile Memory Elements with Metal-Deficient Resistive-Switching Metal Oxides
App 20130071982 - Kumar; Nitin ; et al. | 2013-03-21 |
Method and system of improved uniformity testing
Grant 8,370,096 - Chen , et al. February 5, 2 | 2013-02-05 |
System And Method For Increasing Productivity Of Organic Light Emitting Diode Material Screening
App 20130023066 - Wang; Yun ; et al. | 2013-01-24 |
Nonvolatile memory elements with metal deficient resistive switching metal oxides
Grant 8,344,375 - Kumar , et al. January 1, 2 | 2013-01-01 |
Formation of A Zinc Passivation Layer on Titanium or Titanium Alloys Used in
App 20120325109 - Kong; Bob ; et al. | 2012-12-27 |
Vapor based combinatorial processing
Grant 8,334,015 - Chiang , et al. December 18, 2 | 2012-12-18 |
Formation Of A Zinc Passivation Layer On Titanium Or Titanium Alloys Used In Semiconductor Processing
App 20120295436 - Kong; Bob ; et al. | 2012-11-22 |
System and method for increasing productivity of organic light emitting diode material screening
Grant 8,298,837 - Wang , et al. October 30, 2 | 2012-10-30 |
Resistive-switching memory element
Grant 8,298,891 - Chiang , et al. October 30, 2 | 2012-10-30 |
Control Of Film Composition In Co-sputter Deposition By Using Collimators
App 20120258255 - Yang; Hong Sheng ; et al. | 2012-10-11 |
Methods for forming nickel oxide films for use with resistive switching memory devices
Grant 8,283,214 - Sun , et al. October 9, 2 | 2012-10-09 |
System and Method for Increasing Productivity of Organic Light Emitting Diode Material Screening
App 20120244644 - Wang; Yun ; et al. | 2012-09-27 |
Techniques to improve characteristics of processed semiconductor substrates
Grant 8,252,685 - Duong , et al. August 28, 2 | 2012-08-28 |
Method and System of Improved Uniformity Testing
App 20120136601 - Chen; Charlene ; et al. | 2012-05-31 |
Apparatus and Method for Testing Electromigration in Semiconductor Devices
App 20120136468 - Wang; Yun ; et al. | 2012-05-31 |
Method and System of Improved Reliability Testing
App 20120119768 - Wang; Yun ; et al. | 2012-05-17 |
Vapor Based Combinatorial Processing
App 20120090545 - Chiang; Tony P. ; et al. | 2012-04-19 |
Nonvolatile Memory Elements With Metal Deficient Resistive Switching Metal Oxides
App 20120074376 - Kumar; Nitin ; et al. | 2012-03-29 |
Formation of a zinc passivation layer on titanium or titanium alloys used in semiconductor processing
Grant 8,143,164 - Kong , et al. March 27, 2 | 2012-03-27 |
Techniques To Improve Characteristics Of Processed Semiconductor Substrates
App 20120052694 - Duong; Anh Ngoc ; et al. | 2012-03-01 |
Nonvolatile memory elements with metal-deficient resistive-switching metal oxides
Grant 8,097,878 - Kumar , et al. January 17, 2 | 2012-01-17 |
Substrate Processing Including A Masking Layer
App 20120001320 - Fresco; Zachary ; et al. | 2012-01-05 |
High Throughput Current-Voltage Combinatorial Characterization Tool and Method for Combinatorial Solar Test Substrates
App 20110279141 - Wang; Yun ; et al. | 2011-11-17 |
High Throughput Quantum Efficiency Combinatorial Characterization Tool and Method for Combinatorial Solar Test Substrates
App 20110279810 - Wang; Yun ; et al. | 2011-11-17 |
Combinatorial Plasma Enhanced Deposition And Etch Techniques
App 20110244690 - Shanker; Sunil ; et al. | 2011-10-06 |
Methods For Forming Resistive Switching Memory Elements
App 20110201149 - Kumar; Nitin ; et al. | 2011-08-18 |
Methods for forming resistive switching memory elements
Grant 7,972,897 - Kumar , et al. July 5, 2 | 2011-07-05 |
Combinatorial Approach To The Development Of Cleaning Formulations For Glue Removal In Semiconductor Applications
App 20110146727 - Kalyankar; Nikhil D. ; et al. | 2011-06-23 |
Post-CMP cleaning compositions and methods of using same
Grant 7,919,446 - Fresco , et al. April 5, 2 | 2011-04-05 |
CVD flowable gap fill
Grant 7,915,139 - Lang , et al. March 29, 2 | 2011-03-29 |
Method of forming a layer to enhance ALD nucleation on a substrate
Grant 7,902,064 - Chiang , et al. March 8, 2 | 2011-03-08 |
Flowable film dielectric gap fill process
Grant 7,888,233 - Gauri , et al. February 15, 2 | 2011-02-15 |
Methods for treating substrates in preparation for subsequent processes
Grant 7,884,036 - Tong , et al. February 8, 2 | 2011-02-08 |
Substrate processing including a masking layer
Grant 7,879,710 - Fresco , et al. February 1, 2 | 2011-02-01 |
Formation of a Zinc Passivation Layer on Titanium or Titanium Alloys Used in Semiconductor Processing
App 20100203731 - Kong; Bob ; et al. | 2010-08-12 |
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
Grant 7,745,328 - Yim , et al. June 29, 2 | 2010-06-29 |
H2-based plasma treatment to eliminate within-batch and batch-to-batch etch drift
Grant 7,727,906 - Shanker , et al. June 1, 2 | 2010-06-01 |
Methods for forming resistive switching memory elements
Grant 7,704,789 - Sun , et al. April 27, 2 | 2010-04-27 |
Methods for forming resistive switching memory elements
Grant 7,678,607 - Chiang , et al. March 16, 2 | 2010-03-16 |
Concentrated electroless solution for selective deposition of cobalt-based capping/barrier layers
Grant 7,658,790 - Gorer , et al. February 9, 2 | 2010-02-09 |
Methods for forming nonvolatile memory elements with resistive-switching metal oxides
Grant 7,629,198 - Kumar , et al. December 8, 2 | 2009-12-08 |
Methods For Improving Selectivity of Electroless Deposition Processes
App 20090291275 - Tong; Jinhong ; et al. | 2009-11-26 |
Stamp Usage To Enhance Surface Layer Functionalization And Selectivity
App 20090232966 - Kalyankar; Nikhil D. ; et al. | 2009-09-17 |
CVD flowable gap fill
Grant 7,582,555 - Lang , et al. September 1, 2 | 2009-09-01 |
Techniques to Improve Characteristics of Processed Semiconductor Substrates
App 20090124081 - Duong; Anh Ngoc ; et al. | 2009-05-14 |
Flowable film dielectric gap fill process
Grant 7,524,735 - Gauri , et al. April 28, 2 | 2009-04-28 |
Pulsed bias having high pulse frequency for filling gaps with dielectric material
Grant 7,514,375 - Shanker , et al. April 7, 2 | 2009-04-07 |
Methods For Processing A Substrate Having A Backside Layer
App 20090075095 - Ivanov; Igor ; et al. | 2009-03-19 |
Vapor Based Combinatorial Processing
App 20090061083 - Chiang; Tony P. ; et al. | 2009-03-05 |
Vapor Based Combinatorial Processing
App 20090061644 - Chiang; Tony P. ; et al. | 2009-03-05 |
Low Dielectric (low K) Barrier Films With Oxygen Doping By Plasma-enhanced Chemical Vapor Deposition (pecvd)
App 20090053902 - Yim; Kang Sub ; et al. | 2009-02-26 |
Stress profile modulation in STI gap fill
Grant 7,482,245 - Yu , et al. January 27, 2 | 2009-01-27 |
Methods for coating a substrate with an amphiphilic compound
App 20090014846 - Fresco; Zachary M. ; et al. | 2009-01-15 |
Halogen-free noble gas assisted H.sub.2 plasma etch process in deposition-etch-deposition gap fill
Grant 7,476,621 - Nguyen , et al. January 13, 2 | 2009-01-13 |
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
Grant 7,465,659 - Yim , et al. December 16, 2 | 2008-12-16 |
Resolving of fluorine loading effect in the vacuum chamber
Grant 7,435,684 - Lang , et al. October 14, 2 | 2008-10-14 |
Nonvolatile memory elements with metal-deficient resistive-switching metal oxides
App 20080219039 - Kumar; Nitin ; et al. | 2008-09-11 |
Methods for forming nonvolatile memory elements with resistive-switching metal oxides
App 20080220601 - Kumar; Nitin ; et al. | 2008-09-11 |
Methods for forming resistive switching memory elements
App 20080185572 - Chiang; Tony ; et al. | 2008-08-07 |
Methods for forming resistive switching memory elements
App 20080185567 - Kumar; Nitin ; et al. | 2008-08-07 |
Strain engineering--HDP thin film with tensile stress for FEOL and other applications
Grant 7,381,451 - Lang , et al. June 3, 2 | 2008-06-03 |
Helium-based etch process in deposition-etch-deposition gap fill
Grant 7,344,996 - Lang , et al. March 18, 2 | 2008-03-18 |
Substrate processing including a masking layer
App 20070166989 - Fresco; Zachary ; et al. | 2007-07-19 |
Hydrogen treatment enhanced gap fill
Grant 7,211,525 - Shanker , et al. May 1, 2 | 2007-05-01 |
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
Grant 7,157,384 - Yim , et al. January 2, 2 | 2007-01-02 |
CVD plasma assisted lower dielectric constant SICOH film
Grant 7,153,787 - Cho , et al. December 26, 2 | 2006-12-26 |
New Low Dielectric (low K) Barrier Films With Oxygen Doping By Plasma-enhanced Chemical Vapor Deposition (pecvd)
App 20060246737 - Yim; Kang Sub ; et al. | 2006-11-02 |
CVD plasma assisted lower dielectric constant SICOH film
Grant 6,943,127 - Cho , et al. September 13, 2 | 2005-09-13 |
CVD plasma assisted lower dielectric constant sicoh film
App 20050153572 - Cho, Seon-Mee ; et al. | 2005-07-14 |
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
App 20050130440 - Yim, Kang Sub ; et al. | 2005-06-16 |
Method of depositing a low k dielectric barrier film for copper damascene application
Grant 6,849,562 - Lang , et al. February 1, 2 | 2005-02-01 |
Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
Grant 6,838,393 - Yim , et al. January 4, 2 | 2005-01-04 |
Method for depositing a low-k material having a controlled thickness range
App 20040161536 - Lang, Chi-I ; et al. | 2004-08-19 |
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds
Grant 6,709,715 - Lang , et al. March 23, 2 | 2004-03-23 |
Method of depositing a low k dielectric barrier film for copper damascene application
App 20030165618 - Lang, Chi-I ; et al. | 2003-09-04 |
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (pecvd)
App 20030139035 - Yim, Kang Sub ; et al. | 2003-07-24 |
CVD plasma assisted lower dielectric constant sicoh film
App 20030104708 - Cho, Seon-Mee ; et al. | 2003-06-05 |
Cvd Plasma Assisted Lower Dielectric Constant Sicoh Film
App 20030003768 - Cho, Seon-Mee ; et al. | 2003-01-02 |
CVD plasma assisted lower dielectric constant sicoh film
Grant 6,486,082 - Cho , et al. November 26, 2 | 2002-11-26 |
Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound
Grant 6,413,583 - Moghadam , et al. July 2, 2 | 2002-07-02 |
Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
Grant 6,086,952 - Lang , et al. July 11, 2 | 2000-07-11 |
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