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Patent applications and USPTO patent grants for Lammer; Marco.The latest application filed is for "method for producing a micromechanical component having a thin-layer capping".
Patent | Date |
---|---|
Micromechanical actuator having multiple joints Grant 8,791,620 - Rudhard , et al. July 29, 2 | 2014-07-29 |
Micromechanical component and method for its production Grant 8,165,324 - Feyh , et al. April 24, 2 | 2012-04-24 |
Method for producing a micromechanical component having a thin-layer capping Grant 7,851,248 - Kronmueller , et al. December 14, 2 | 2010-12-14 |
Method For Producing A Micromechanical Component Having A Thin-layer Capping App 20100003790 - Kronmueller; Silvia ;   et al. | 2010-01-07 |
Micromechanical Component and Method for its Production App 20090232334 - Feyh; Ando ;   et al. | 2009-09-17 |
Micromechanical actuator App 20080151342 - Rudhard; Joachim ;   et al. | 2008-06-26 |
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