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Patent applications and USPTO patent grants for Lammer; Gertraud.The latest application filed is for "particle-optical projection system".
Patent | Date |
---|---|
Particle-optical projection system Grant 7,388,217 - Buschbeck , et al. June 17, 2 | 2008-06-17 |
Particle-optical projection system App 20070125956 - Buschbeck; Herbert ;   et al. | 2007-06-07 |
Particle-optic electrostatic lens Grant 7,199,373 - Stengl , et al. April 3, 2 | 2007-04-03 |
Pattern-definition device for maskless particle-beam exposure apparatus Grant 7,084,411 - Lammer-Pachlinger , et al. August 1, 2 | 2006-08-01 |
Particle-optical projection system App 20050201246 - Buschbeck, Herbert ;   et al. | 2005-09-15 |
Pattern-definition device for maskless particle-beam exposure apparatus App 20050087701 - Lammer-Pachlinger, Wolfgang ;   et al. | 2005-04-28 |
Particle-optic electrostatic lens App 20050072933 - Stengl, Gerhard ;   et al. | 2005-04-07 |
Maskless particle-beam system for exposing a pattern on a substrate Grant 6,768,125 - Platzgummer , et al. July 27, 2 | 2004-07-27 |
Maskless particle-beam system for exposing a pattern on a substrate App 20030155534 - Platzgummer, Elmar ;   et al. | 2003-08-21 |
Thermal control of image pattern distortions App 20020148976 - Chalupka, Alfred ;   et al. | 2002-10-17 |
Particle-optical imaging system for lithography purposes Grant 6,326,632 - Buschbeck , et al. December 4, 2 | 2001-12-04 |
Lithographic imaging of a structure pattern onto one or more fields on a substrate App 20010036588 - Buschbeck, Herbert ;   et al. | 2001-11-01 |
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