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Patent applications and USPTO patent grants for Lambda Physik GmbH.The latest application filed is for "beam delivery system for molecular fluorine (f2) laser".
Patent | Date |
---|---|
Beam delivery system for molecular fluorine (F2) laser Grant 6,219,368 - Govorkov April 17, 2 | 2001-04-17 |
Ablated laser feature shape reproduction control Grant 6,172,329 - Shoemaker , et al. January 9, 2 | 2001-01-09 |
Wavelength calibration tool for narrow band excimer lasers Grant 6,160,831 - Kleinschmidt , et al. December 12, 2 | 2000-12-12 |
F.sub.2 (157nm) laser employing neon as the buffer gas Grant 6,157,662 - Scaggs , et al. December 5, 2 | 2000-12-05 |
Optically pumped laser with multi-facet gain medium Grant 6,081,542 - Scaggs June 27, 2 | 2000-06-27 |
Diode pumped laser with frequency conversion into UV and DUV range Grant 6,002,697 - Govorkov , et al. December 14, 1 | 1999-12-14 |
Hybrid laser resonator with special line narrowing Grant 5,946,337 - Govorkov , et al. August 31, 1 | 1999-08-31 |
Apparatus for laser machining with a plurality of beams Grant 5,676,866 - in den Baumen , et al. October 14, 1 | 1997-10-14 |
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