Patent | Date |
---|
Processes to pattern small features for advanced patterning needs Grant 9,960,038 - Washburn , et al. May 1, 2 | 2018-05-01 |
All-organic inductor-capacitor tank circuit for radio frequency sensor applications Grant 9,642,258 - Diao , et al. May 2, 2 | 2017-05-02 |
All-organic Inductor-capacitor Tank Circuit For Radio Frequency Sensor Applications App 20160050757 - Diao; Liyong ;   et al. | 2016-02-18 |
Methods of producing structures using a developer-soluble layer with multilayer technology Grant 8,877,430 - Washburn , et al. November 4, 2 | 2014-11-04 |
Processes To Pattern Small Features For Advanced Patterning Needs App 20120164390 - Washburn; Carlton Ashley ;   et al. | 2012-06-28 |
Methods Of Producing Structures Using A Developer-soluble Layer With Multilayer Technology App 20120034419 - Washburn; Carlton Ashley ;   et al. | 2012-02-09 |
Crosslinkable fill compositions for uniformly protecting via and contact holes Grant 7,998,318 - Lamb, III , et al. August 16, 2 | 2011-08-16 |
Automated process and apparatus for planarization of topographical surfaces Grant 7,790,231 - McCutcheon , et al. September 7, 2 | 2010-09-07 |
Planarization method for multi-layer lithography processing Grant 7,455,955 - Shih , et al. November 25, 2 | 2008-11-25 |
Lithography pattern shrink process and articles Grant 7,449,230 - Sabnis , et al. November 11, 2 | 2008-11-11 |
Lithography pattern shrink process and articles Grant 7,122,296 - Sabnis , et al. October 17, 2 | 2006-10-17 |
Fill material for dual damascene processes Grant 7,026,237 - Lamb, III , et al. April 11, 2 | 2006-04-11 |
Anti-reflective coating compositions for use with low k dielectric materials Grant 6,893,684 - Puligadda , et al. May 17, 2 | 2005-05-17 |
Contact planarization materials that generate no volatile byproducts or residue during curing Grant 6,716,767 - Shih , et al. April 6, 2 | 2004-04-06 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Grant 6,670,425 - Puligadda , et al. December 30, 2 | 2003-12-30 |
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings Grant 6,663,916 - Puligadda , et al. December 16, 2 | 2003-12-16 |
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating Grant 5,368,989 - Flaim , et al. November 29, 1 | 1994-11-29 |
Base-soluble polyimide release layers for use in microlithographic processing Grant 5,281,690 - Flaim , et al. January 25, 1 | 1994-01-25 |
Multifunctional photolithographic compositions Grant 5,110,697 - Lamb, III , et al. May 5, 1 | 1992-05-05 |