LAM; Pui Leng
Patent Applications and Registrations
Patent applications and USPTO patent grants for LAM; Pui Leng.The latest application filed is for "method and apparatus for lithographic process performance determination".
- LAM; Pui Leng - Veldhoven NL
| Patent | Date |
|---|---|
| Method And Apparatus For Lithographic Process Performance Determination App 20220291593 - WERKMAN; Roy ; et al. | 2022-09-15 |
| Alignment system and method and device manufactured thereby Grant 7,259,828 - Tolsma , et al. August 21, 2 | 2007-08-21 |
| Alignment system and method and device manufactured thereby App 20050254030 - Tolsma, Hoite Pieter Theodoor ; et al. | 2005-11-17 |
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