Lam; Kin-sang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lam; Kin-sang.The latest application filed is for "system, method and apparatus for reducing plasma noise on power path of electrostatic chuck".
- Lam; Kin-sang - Austin TX
- Lam, Kin-Sang - Hopewell Junction NY
- Lam; Kin-Sang - San Antonio TX
| Patent | Date |
|---|---|
| System, Method And Apparatus For Reducing Plasma Noise On Power Path Of Electrostatic Chuck App 20120160807 - Lam; Kin-sang ; et al. | 2012-06-28 |
| Process Of Forming An Electronic Device Including Depositing A Conductive Layer Over A Seed Layer App 20090114542 - Boyapati; Sriranga S. ; et al. | 2009-05-07 |
| A Low Thermal Budget (mol) Liner, A Semiconductor Device Comprising Said Liner And Method Of Forming Said Semiconductor Device App 20050221612 - Brown, Laura ; et al. | 2005-10-06 |
| Controlled gas supply line apparatus and process for infilm and onfilm defect reduction Grant 6,814,837 - Lam , et al. November 9, 2 | 2004-11-09 |
| Anti-reflective coating and methods of making the same App 20020197835 - Sun, Sey-Ping ; et al. | 2002-12-26 |
| Method and apparatus for reducing wafer to wafer deposition variation Grant 6,417,014 - Lam , et al. July 9, 2 | 2002-07-09 |
| Magnet assembly for enhanced sputter target erosion Grant 5,282,947 - Brugge , et al. February 1, 1 | 1994-02-01 |
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