Lam; Hyman W. H.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lam; Hyman W. H..The latest application filed is for "apparatus for depositing metal films with plasma treatment".
- Lam; Hyman W. H. - San Jose CA
| Patent | Date |
|---|---|
| Apparatus and method for providing uniform flow of gas Grant RE48,994 - Yudovsky , et al. March 29, 2 | 2022-03-29 |
| Apparatus for depositing metal films with plasma treatment Grant 11,133,155 - Yao , et al. September 28, 2 | 2021-09-28 |
| Gas feedthrough assembly Grant 10,640,870 - Yao , et al. | 2020-05-05 |
| Apparatus For Depositing Metal Films With Plasma Treatment App 20200020509 - YAO; DAPING ; et al. | 2020-01-16 |
| Apparatus for depositing metal films with plasma treatment Grant 10,453,657 - Yao , et al. Oc | 2019-10-22 |
| Apparatus for providing plasma to a process chamber Grant 9,982,343 - Kao , et al. May 29, 2 | 2018-05-29 |
| Apparatus For Depositing Metal Films With Plasma Treatment App 20180012732 - YAO; DAPING ; et al. | 2018-01-11 |
| Gas Feedthrough Assembly App 20170306488 - YAO; Daping ; et al. | 2017-10-26 |
| Apparatus For Selectively Sealing A Gas Feedthrough App 20160326648 - Lam; Hyman W. H. ; et al. | 2016-11-10 |
| Apparatuses and methods for atomic layer deposition Grant 9,017,776 - Lam , et al. April 28, 2 | 2015-04-28 |
| Process chamber lid design with built-in plasma source for short lifetime species Grant 9,004,006 - Kao , et al. April 14, 2 | 2015-04-14 |
| Apparatus For Providing Plasma To A Process Chamber App 20140165911 - KAO; CHIEN-TEH ; et al. | 2014-06-19 |
| Apparatus For Providing Plasma To A Process Chamber App 20140165912 - KAO; CHIEN-TEH ; et al. | 2014-06-19 |
| Apparatuses and methods for atomic layer deposition Grant 8,747,556 - Lam , et al. June 10, 2 | 2014-06-10 |
| Modular Chemical Delivery System App 20140137961 - KAO; CHIEN-TEH ; et al. | 2014-05-22 |
| Apparatuses And Methods For Atomic Layer Deposition App 20140087091 - Lam; Hyman W.H. ; et al. | 2014-03-27 |
| Apparatuses and methods for atomic layer deposition Grant 8,293,015 - Lam , et al. October 23, 2 | 2012-10-23 |
| Process Chamber Lid Design With Built-in Plasma Source For Short Lifetime Species App 20110265721 - Kao; Chien-Teh ; et al. | 2011-11-03 |
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