Lam; Hyman

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lam; Hyman.The latest application filed is for "chamber matching and calibration".

Company Profile

1.6.12

Lam; Hyman - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber Matching And Calibration App 20220005713 - Lu; Xuesong ; et al.	2022-01-06
Apparatus and method for providing uniform flow of gas Grant RE47,440 - Yudovsky , et al.	2019-06-18
Processing chamber gas delivery system with hot-swappable ampoule Grant 9,447,497 - Wu , et al. September 20, 2	2016-09-20
Deposition chambers with UV treatment and methods of use Grant 9,252,024 - Lam , et al. February 2, 2	2016-02-02
Apparatus and method for providing uniform flow of gas Grant 9,109,754 - Yudovsky , et al. August 18, 2	2015-08-18
Deposition Chambers With Uv Treatment And Methods Of Use App 20140342555 - Lam; Hyman ; et al.	2014-11-20
Processing Chamber Gas Delivery System with Hot-Swappable Ampoule App 20140261733 - Wu; Dien-Yeh ; et al.	2014-09-18
Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency App 20140174362 - Kao; Chien-Teh ; et al.	2014-06-26
Apparatus and Method for Providing Uniform Flow of Gas App 20130098477 - Yudovsky; Joseph ; et al.	2013-04-25
Apparatuses And Methods For Atomic Layer Deposition App 20130008984 - Lam; Hyman ; et al.	2013-01-10
Apparatuses and methods for atomic layer deposition Grant 8,291,857 - Lam , et al. October 23, 2	2012-10-23
Apparatuses And Methods For Atomic Layer Deposition App 20120000422 - Lam; Hyman ; et al.	2012-01-05
Apparatuses And Methods For Atomic Layer Deposition App 20100003406 - Lam; Hyman ; et al.	2010-01-07

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