Lam; Hieu A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lam; Hieu A..The latest application filed is for "method of double patterning using sacrificial structure".

Company Profile

0.8.9

Lam; Hieu A. - Richardson TX
Lam; Hieu A - Richardson TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for determining an etch property using an endpoint signal Grant 8,048,326 - Yue , et al. November 1, 2	2011-11-01
Method and system for predicting process performance using material processing tool and sensor data Grant 7,844,559 - Lam , et al. November 30, 2	2010-11-30
Process system health index and method of using the same Grant 7,713,760 - Yue , et al. May 11, 2	2010-05-11
Method Of Double Patterning Using Sacrificial Structure App 20090311634 - Yue; Hongyu ; et al.	2009-12-17
Method And System For Predicting Process Performance Using Material Processing Tool And Sensor Data App 20090099991 - LAM; Hieu A. ; et al.	2009-04-16
Method and apparatus for using a pressure control system to monitor a plasma processing system Grant 7,430,496 - Yue , et al. September 30, 2	2008-09-30
Method for automatic configuration of processing system Grant 7,213,478 - Harada , et al. May 8, 2	2007-05-08
Method and system of discriminating substrate type Grant 7,211,196 - Lam , et al. May 1, 2	2007-05-01
Controlling a material processing tool and performance data Grant 7,167,766 - Lam , et al. January 23, 2	2007-01-23
Method and apparatus for using a pressure control system to monitor a plasma processing system App 20050283321 - Yue, Hongyu ; et al.	2005-12-22
Method and system for predicting process performance using material processing tool and sensor data App 20050252884 - Lam, Hieu A. ; et al.	2005-11-17
Controlling a material processing tool and performance data App 20050234574 - Lam, Hieu A. ; et al.	2005-10-20
Method and system of discriminating substrate type App 20050211669 - Lam, Hieu A. ; et al.	2005-09-29
Method for automatic configuration of processing system App 20050015176 - Harada, Satoshi ; et al.	2005-01-20
Process system health index and method of using the same App 20040259276 - Yue, Hongyu ; et al.	2004-12-23
Method and system of determining chamber seasoning condition by optical emission Grant 6,825,920 - Lam , et al. November 30, 2	2004-11-30
Method and system of determining chamber seasoning condition by optical emission App 20040008336 - Lam, Hieu A. ; et al.	2004-01-15

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