Patent | Date |
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Secure intra-chip hardware micro-segmentation using charged particle beam processing Grant 11,063,756 - Monahan , et al. July 13, 2 | 2021-07-13 |
Precision substrate material multi-processing using miniature-column charged particle beam arrays Grant 11,037,756 - Lam , et al. June 15, 2 | 2021-06-15 |
Secure permanent integrated circuit personalization Grant 10,978,303 - Smayling , et al. April 13, 2 | 2021-04-13 |
Precision substrate material multi-processing using miniature-column charged particle beam arrays Grant 10,734,192 - Lam , et al. | 2020-08-04 |
Secure permanent integrated circuit personalization Grant 10,659,229 - Smayling , et al. | 2020-05-19 |
Precision substrate material multi-processing using miniature-column charged particle beam arrays Grant 10,658,153 - Lam , et al. | 2020-05-19 |
Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays Grant 10,607,845 - Monahan , et al. | 2020-03-31 |
Secure intra-chip hardware micro-segmentation using charged particle beam processing Grant 10,523,433 - Monahan , et al. Dec | 2019-12-31 |
Secure permanent integrated circuit personalization Grant 10,341,108 - Smayling , et al. | 2019-07-02 |
Secure permanent integrated circuit personalization Grant 10,312,091 - Smayling , et al. | 2019-06-04 |
System and method for management of network monitoring information Grant 10,205,642 - Chen , et al. Feb | 2019-02-12 |
Alignment and registration targets for charged particle beam substrate patterning and inspection Grant 10,026,589 - Monahan , et al. July 17, 2 | 2018-07-17 |
Alignment and registration targets for charged particle beam substrate patterning and inspection Grant 10,020,166 - Monahan , et al. July 10, 2 | 2018-07-10 |
Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays Grant 10,020,200 - Monahan , et al. July 10, 2 | 2018-07-10 |
Precision substrate material multi-processing using miniature-column charged particle beam arrays Grant 9,881,817 - Lam , et al. January 30, 2 | 2018-01-30 |
Precision material modification using miniature-column charged particle beam arrays Grant 9,824,859 - Smayling , et al. November 21, 2 | 2017-11-21 |
Precision material modification using miniature-column charged particle beam arrays Grant 9,822,443 - Smayling , et al. November 21, 2 | 2017-11-21 |
Precision substrate material removal using miniature-column charged particle beam arrays Grant 9,673,114 - Lam , et al. June 6, 2 | 2017-06-06 |
Charged particle beam substrate inspection using both vector and raster scanning Grant 9,620,332 - Lam , et al. April 11, 2 | 2017-04-11 |
Alignment and registration targets for multiple-column charged particle beam lithography and inspection Grant 9,595,419 - Monahan , et al. March 14, 2 | 2017-03-14 |
Precision deposition using miniature-column charged particle beam arrays Grant 9,556,521 - Prescop , et al. January 31, 2 | 2017-01-31 |
Alignment and registration targets for multiple-column charged particle beam lithography and inspection Grant 9,478,395 - Monahan , et al. October 25, 2 | 2016-10-25 |
Charged particle beam substrate inspection using both vector and raster scanning Grant 9,466,463 - Lam , et al. October 11, 2 | 2016-10-11 |
Precision substrate material removal using miniature-column charged particle beam arrays Grant 9,466,464 - Lam , et al. October 11, 2 | 2016-10-11 |
Precision deposition using miniature-column charged particle beam arrays Grant 9,453,281 - Prescop , et al. September 27, 2 | 2016-09-27 |
System And Method For Management Of Network Monitoring Information App 20160080222 - CHEN; YuLing ;   et al. | 2016-03-17 |
System and method for management of network monitoring information Grant 9,210,053 - Chen , et al. December 8, 2 | 2015-12-08 |
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems Grant 9,207,539 - Lam , et al. December 8, 2 | 2015-12-08 |
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp Grant 9,184,027 - Lam , et al. November 10, 2 | 2015-11-10 |
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems Grant 8,999,628 - Lam , et al. April 7, 2 | 2015-04-07 |
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp Grant 8,999,627 - Lam , et al. April 7, 2 | 2015-04-07 |
System And Method For Management Of Network Monitoring Information App 20140258296 - Chen; YuLing ;   et al. | 2014-09-11 |
Fluorine plasma synthesis for carbon monofluorides Grant 3,904,501 - Lagow , et al. September 9, 1 | 1975-09-09 |