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Patent applications and USPTO patent grants for LALOVIC; Ivan.The latest application filed is for "hyperspectral sensing system and processing methods for hyperspectral data".
Patent | Date |
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Hyperspectral Sensing System And Processing Methods For Hyperspectral Data App 20210231497 - TUFILLARO; Nicholas ;   et al. | 2021-07-29 |
Hyperspectral Sensing System And Processing Methods For Hyperspectral Data App 20210231498 - TUFILLARO; Nicholas ;   et al. | 2021-07-29 |
Hyperspectral sensing system and processing methods for hyperspectral data Grant 11,073,423 - Tufillaro , et al. July 27, 2 | 2021-07-27 |
Hyperspectral Sensing System And Methods App 20210033589 - TUFILLARO; Nicholas ;   et al. | 2021-02-04 |
Hyperspectral Sensing System App 20200371081 - LALOVIC; Ivan | 2020-11-26 |
Hyperspectral Sensing System App 20200371082 - LALOVIC; Ivan | 2020-11-26 |
Hyperspectral Sensing System And Processing Methods For Hyperspectral Data App 20200025613 - TUFILLARO; Nicholas ;   et al. | 2020-01-23 |
Hyperspectral Sensing System App 20190302083 - LALOVIC; Ivan | 2019-10-03 |
Wafer-based light source parameter control Grant 10,036,960 - Lalovic , et al. July 31, 2 | 2018-07-31 |
Wafer-based Light Source Parameter Control App 20180011409 - Lalovic; Ivan ;   et al. | 2018-01-11 |
Wafer-based light source parameter control Grant 9,715,180 - Lalovic , et al. July 25, 2 | 2017-07-25 |
Wafer-based Light Source Parameter Control App 20150070673 - Lalovic; Ivan ;   et al. | 2015-03-12 |
Laser system Grant 8,170,078 - Ershov , et al. May 1, 2 | 2012-05-01 |
Laser system Grant 7,999,915 - Ershov , et al. August 16, 2 | 2011-08-16 |
Laser System App 20110102759 - Ershov; Alexander I. ;   et al. | 2011-05-05 |
Laser system Grant 7,885,309 - Ershov , et al. February 8, 2 | 2011-02-08 |
Method for removal of immersion lithography medium in immersion lithography processes Grant 7,741,012 - Pawloski , et al. June 22, 2 | 2010-06-22 |
Laser system App 20100108913 - Ershov; Alexander I. ;   et al. | 2010-05-06 |
Laser system App 20080165337 - Ershov; Alexander I. ;   et al. | 2008-07-10 |
Laser spectral engineering for lithographic process Grant 7,382,815 - Spangler , et al. June 3, 2 | 2008-06-03 |
Laser spectral engineering for lithographic process Grant 7,298,770 - Spangler , et al. November 20, 2 | 2007-11-20 |
Laser spectral engineering for lithographic process Grant 7,139,301 - Kroyan , et al. November 21, 2 | 2006-11-21 |
Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy Grant 7,087,907 - Lalovic , et al. August 8, 2 | 2006-08-08 |
Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system Grant 7,081,956 - Lalovic , et al. July 25, 2 | 2006-07-25 |
Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems Grant 7,014,966 - Pawloski , et al. March 21, 2 | 2006-03-21 |
Extreme ultraviolet (EUV) lithography masks Grant 6,984,475 - Levinson , et al. January 10, 2 | 2006-01-10 |
Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system Grant 6,977,717 - Lalovic , et al. December 20, 2 | 2005-12-20 |
Laser spectral engineering for lithographic process App 20050068997 - Spangler, Ronald L. ;   et al. | 2005-03-31 |
Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems App 20050048223 - Pawloski, Adam R. ;   et al. | 2005-03-03 |
Laser spectral engineering for lithographic process App 20050041701 - Spangler, Ronald L. ;   et al. | 2005-02-24 |
Laser spectral engineering for lithographic process Grant 6,853,653 - Spangler , et al. February 8, 2 | 2005-02-08 |
Lithography contrast enhancement technique by varying focus with wavelength modulation Grant 6,829,040 - Kye , et al. December 7, 2 | 2004-12-07 |
Laser spectral engineering for lithographic process App 20040146082 - Kroyan, Armen ;   et al. | 2004-07-29 |
Laser spectral engineering for lithographic process Grant 6,671,294 - Kroyan , et al. December 30, 2 | 2003-12-30 |
Laser spectral engineering for lithographic process App 20020167975 - Spangler, Ronald L. ;   et al. | 2002-11-14 |
Laser spectral engineering for lithographic process App 20020048288 - Kroyan, Armen ;   et al. | 2002-04-25 |
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