Lally; Kevin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lally; Kevin.The latest application filed is for "real-time parameter tuning using wafer thickness".

Company Profile

0.8.9

Lally; Kevin - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Real-time parameter tuning for etch processes Grant 7,801,635 - Funk , et al. September 21, 2	2010-09-21
Real-time parameter tuning using wafer thickness Grant 7,642,102 - Funk , et al. January 5, 2	2010-01-05
Damage assessment of a wafer using optical metrology Grant 7,623,978 - Lally , et al. November 24, 2	2009-11-24
Measuring a damaged structure formed on a wafer using optical metrology Grant 7,619,731 - Lally , et al. November 17, 2	2009-11-17
Creating a library for measuring a damaged structure formed on a wafer using optical metrology Grant 7,576,851 - Lally , et al. August 18, 2	2009-08-18
Method of using a wafer-thickness-dependant profile library Grant 7,571,074 - Funk , et al. August 4, 2	2009-08-04
Fault detection and classification (FDC) using a run-to-run controller Grant 7,477,960 - Willis , et al. January 13, 2	2009-01-13
Method of Using a Wafer-Thickness-Dependant Profile Library App 20080183411 - Funk; Merritt ; et al.	2008-07-31
Real-Time Parameter Tuning For Etch Processes App 20080183312 - Funk; Merritt ; et al.	2008-07-31
Real-Time Parameter Tuning Using Wafer Thickness App 20080183412 - Funk; Merritt ; et al.	2008-07-31
Measuring A Damaged Structure Formed On A Wafer Using Optical Metrology App 20080137078 - LALLY; Kevin ; et al.	2008-06-12
Measuring a damaged structure formed on a wafer using optical metrology Grant 7,324,193 - Lally , et al. January 29, 2	2008-01-29
Measuring a damaged structure formed on a wafer using optical metrology App 20070229806 - Lally; Kevin ; et al.	2007-10-04
Measuring a damaged structure formed on a wafer using optical metrology App 20070229807 - Lally; Kevin ; et al.	2007-10-04
Damage assessment of a wafer using optical metrology App 20070232045 - Lally; Kevin ; et al.	2007-10-04
Creating a library for measuring a damaged structure formed on a wafer using optical metrology App 20070233404 - Lally; Kevin ; et al.	2007-10-04
Fault detection and classification (FDC) using a run-to-run controller App 20060184264 - Willis; James E. ; et al.	2006-08-17

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