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Digital photolithography using compact eye module layout Grant 10,409,172 - Markle , et al. Sept | 2019-09-10 |
Environmental control of systems for photolithography process Grant 10,036,966 - Johnston , et al. July 31, 2 | 2018-07-31 |
Parallel image processing system Grant 10,037,589 - Keane , et al. July 31, 2 | 2018-07-31 |
Methods and apparatus for vibration damping stage Grant 10,031,427 - Johnston , et al. July 24, 2 | 2018-07-24 |
Illumination system with monitoring optical output power Grant 9,907,152 - Kaskey , et al. February 27, 2 | 2018-02-27 |
Optical projection array exposure system Grant 9,733,573 - Markle , et al. August 15, 2 | 2017-08-15 |
Compact Eye Module Layout App 20170219934 - MARKLE; David ;   et al. | 2017-08-03 |
Environmental Control Of Systems For Photolithography Process App 20170168403 - JOHNSTON; Benjamin M. ;   et al. | 2017-06-15 |
Methods And Apparatus For Vibration Damping Stage App 20170090303 - JOHNSTON; Benjamin M. ;   et al. | 2017-03-30 |
Optical imaging writer system Grant 9,519,226 - Chen , et al. December 13, 2 | 2016-12-13 |
System and method for manufacturing multiple light emitting diodes in parallel Grant 9,507,271 - Chen , et al. November 29, 2 | 2016-11-29 |
Pixel blending for multiple charged-particle beam lithography Grant 9,405,203 - Chen , et al. August 2, 2 | 2016-08-02 |
Illumination System With Monitoring Optical Output Power App 20160219684 - KASKEY; Jeffrey ;   et al. | 2016-07-28 |
Optical Projection Array Exposure System App 20160124316 - MARKLE; David ;   et al. | 2016-05-05 |
Optical projection array exposure system Grant 9,250,509 - Markle , et al. February 2, 2 | 2016-02-02 |
System and method for manufacturing three dimensional integrated circuits Grant 9,025,136 - Chen , et al. May 5, 2 | 2015-05-05 |
Method and system for handling substrates Grant 8,914,143 - Kaskey , et al. December 16, 2 | 2014-12-16 |
Pixel Blending For Multiple Charged-Particle Beam Lithography App 20140192334 - CHEN; Jang Fung ;   et al. | 2014-07-10 |
Optical Imaging Writer System App 20140192336 - CHEN; Jang Fung ;   et al. | 2014-07-10 |
Parallel Image Processing System App 20140192065 - KEANE; BARRY ;   et al. | 2014-07-10 |
Parallel image processing system Grant 8,669,989 - Keane , et al. March 11, 2 | 2014-03-11 |
Optical imaging writer system Grant 8,670,106 - Chen , et al. March 11, 2 | 2014-03-11 |
Optical Projection Array Exposure System App 20130321786 - MARKLE; David ;   et al. | 2013-12-05 |
Illumination System App 20130207544 - Kaskey; Jeffrey ;   et al. | 2013-08-15 |
Optical imaging writer system Grant 8,395,752 - Laidig March 12, 2 | 2013-03-12 |
Optical imaging writer system Grant 8,390,786 - Laidig March 5, 2 | 2013-03-05 |
Optical imaging writer system Grant 8,390,781 - Laidig March 5, 2 | 2013-03-05 |
Optical Imaging Writer System App 20130003029 - LAIDIG; Thomas | 2013-01-03 |
Optical Imaging Writer System App 20120307225 - Chen; Jang Fung ;   et al. | 2012-12-06 |
Optical Imaging Writer System App 20120264066 - Chen; Jang Fung ;   et al. | 2012-10-18 |
Optical Imaging Writer System App 20120262686 - LAIDIG; Thomas | 2012-10-18 |
Optical Imaging Writer System App 20120265332 - LAIDIG; Thomas | 2012-10-18 |
Parallel Image Processing System App 20120262465 - KEANE; Barry ;   et al. | 2012-10-18 |
Optical imaging writer system Grant 8,253,923 - Chen , et al. August 28, 2 | 2012-08-28 |
Method, program product and apparatus for performing mask feature pitch decomposition for use in a multiple exposure process Grant 8,132,130 - Chen , et al. March 6, 2 | 2012-03-06 |
System and Method for Manufacturing Three Dimensional Integrated Circuits App 20120026478 - Chen; Jang Fung ;   et al. | 2012-02-02 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 8,039,180 - Laidig , et al. October 18, 2 | 2011-10-18 |
Scattering Bar OPC Application Method for Sub-Half Wavelength Lithography Patterning App 20110143268 - Laidig; Thomas ;   et al. | 2011-06-16 |
CPL mask and a method and program product for generating the same Grant 7,892,703 - Chen , et al. February 22, 2 | 2011-02-22 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,892,707 - Laidig , et al. February 22, 2 | 2011-02-22 |
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems Grant 7,856,606 - Eurlings , et al. December 21, 2 | 2010-12-21 |
Method of two dimensional feature model calibration and optimization Grant 7,820,341 - Laidig , et al. October 26, 2 | 2010-10-26 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography Grant 7,774,736 - Broeke , et al. August 10, 2 | 2010-08-10 |
Scattering Bar Opc Application Method For Sub-half Wavelength Lithography Patterning Field Of The Invention App 20090233186 - Laidig; Thomas ;   et al. | 2009-09-17 |
Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography Grant 7,550,235 - Shi , et al. June 23, 2 | 2009-06-23 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography Grant 7,549,140 - Van Den Broeke , et al. June 16, 2 | 2009-06-16 |
Method for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated PSM Grant 7,523,438 - Hsu , et al. April 21, 2 | 2009-04-21 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,485,396 - Laidig , et al. February 3, 2 | 2009-02-03 |
Method for performing full-chip manufacturing reliability checking and correction Grant 7,434,195 - Hsu , et al. October 7, 2 | 2008-10-07 |
Scattering bar OPC application method for sub-half wavelength lithography patterning App 20080206656 - Laidig; Thomas ;   et al. | 2008-08-28 |
Eigen decomposition based OPC model Grant 7,398,508 - Shi , et al. July 8, 2 | 2008-07-08 |
Scattering bar OPC application method for sub-half wavelength lithography patterning Grant 7,354,681 - Laidig , et al. April 8, 2 | 2008-04-08 |
Optical proximity correction using chamfers and rounding at corners Grant 7,355,681 - Laidig , et al. April 8, 2 | 2008-04-08 |
Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence Grant 7,349,066 - Eurlings , et al. March 25, 2 | 2008-03-25 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography Grant 7,247,574 - Broeke , et al. July 24, 2 | 2007-07-24 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography App 20070162889 - Broeke; Douglas Van Den ;   et al. | 2007-07-12 |
Feature optimization using enhanced interference mapping lithography Grant 7,231,629 - Laidig June 12, 2 | 2007-06-12 |
Method of two dimensional feature model calibration and optimization App 20070117030 - Laidig; Thomas ;   et al. | 2007-05-24 |
CPL mask and a method and program product for generating the same App 20070065733 - Chen; Jang Fung ;   et al. | 2007-03-22 |
Method of two dimensional feature model calibration and optimization Grant 7,175,940 - Laidig , et al. February 13, 2 | 2007-02-13 |
Method, program product and apparatus for performing mask feature pitch decomposition for use in a multiple exposure process App 20070031740 - Chen; Jang Fung ;   et al. | 2007-02-08 |
Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence App 20060250589 - Eurlings; Markus Franciscus Antonius ;   et al. | 2006-11-09 |
Method for performing full-chip manufacturing reliability checking and correction App 20060080633 - Hsu; Michael ;   et al. | 2006-04-13 |
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems App 20060010417 - Eurlings; Markus Franciscus Antonius ;   et al. | 2006-01-12 |
Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM Grant 6,951,701 - Hsu , et al. October 4, 2 | 2005-10-04 |
Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM App 20050186491 - Hsu, Michael ;   et al. | 2005-08-25 |
Eigen decomposition based OPC model App 20050149902 - Shi, Xuelong ;   et al. | 2005-07-07 |
Feature optimization using enhanced interference mapping lithography App 20050149900 - Laidig, Thomas | 2005-07-07 |
Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography App 20050142449 - Shi, Xuelong ;   et al. | 2005-06-30 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography App 20050125765 - Broeke, Doug Van Den ;   et al. | 2005-06-09 |
Scattering bar OPC application method for sub-half wavelength lithography patterning App 20050074677 - Laidig, Thomas ;   et al. | 2005-04-07 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography Grant 6,851,103 - Van Den Broeke , et al. February 1, 2 | 2005-02-01 |
Hybrid phase-shift mask Grant 6,835,510 - Chen , et al. December 28, 2 | 2004-12-28 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography App 20040209170 - Broeke, Douglas Van Den ;   et al. | 2004-10-21 |
Hybrid phase-shift mask App 20040067423 - Chen, Jang Fung ;   et al. | 2004-04-08 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography App 20040010770 - Broeke, Doug Van Den ;   et al. | 2004-01-15 |
Optical proximity correction method utilizing serifs having variable dimensions Grant 6,670,081 - Laidig , et al. December 30, 2 | 2003-12-30 |
Hybrid phase-shift mask Grant 6,623,895 - Chen , et al. September 23, 2 | 2003-09-23 |
Method of two dimensional feature model calibration and optimization App 20030082463 - Laidig, Thomas ;   et al. | 2003-05-01 |
Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM App 20030073013 - Hsu, Michael ;   et al. | 2003-04-17 |
Optical proximity correction method utilizing serifs having variable dimensions App 20020028393 - Laidig, Thomas ;   et al. | 2002-03-07 |
Hybrid phase-shift mask App 20020015899 - Chen, Jang Fung ;   et al. | 2002-02-07 |
Vertex based geometry engine system for use in integrated circuit design Grant 5,887,155 - Laidig March 23, 1 | 1999-03-23 |