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Lai; Yun-Sen Patent Filings

Lai; Yun-Sen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lai; Yun-Sen.The latest application filed is for "method and system for detecting tool errors to stop a process recipe for a single chamber".

Company Profile
0.2.2
  • Lai; Yun-Sen - Taoyuan County TW
  • Lai; Yun Sen - Chu-Nan TW
  • Lai; Yun Sen - Hsinchu Hsien TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method and system for detecting tool errors to stop a process recipe for a single chamber
Grant 7,908,024 - Chen , et al. March 15, 2
2011-03-15
Method And System For Detecting Tool Errors To Stop A Process Recipe For A Single Chamber
App 20090254208 - Chen; Chun-Hsiang ;   et al.
2009-10-08
Sealing material structure of organic electroluminescent display panel and method for manufacturing the same
App 20060012300 - Lan; Wen-Jeng ;   et al.
2006-01-19
Method for STI-top rounding control
Grant 6,225,187 - Huang , et al. May 1, 2
2001-05-01

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