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Patent applications and USPTO patent grants for Lai; Kahkeen.The latest application filed is for "method for preparing silicon wafer with rough surface and silicon wafer".
Patent | Date |
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Method for forming MEMS cavity structure Grant 11,332,364 - Goh , et al. May 17, 2 | 2022-05-17 |
Method for preparing silicon wafer with rough surface and silicon wafer Grant 11,305,988 - Goh , et al. April 19, 2 | 2022-04-19 |
MEMS microphone Grant 11,310,606 - Tong , et al. April 19, 2 | 2022-04-19 |
Method For Preparing Silicon Wafer With Rough Surface And Silicon Wafer App 20220063995 - Goh; Wooicheang ;   et al. | 2022-03-03 |
Mems Conductive Member And Preparation Method Of Conductive Coating Layers App 20220002144 - Tu; Lanlan ;   et al. | 2022-01-06 |
Method for preparing silicon wafer with rough surface and silicon wafer Grant 11,192,782 - Goh , et al. December 7, 2 | 2021-12-07 |
Deep Cavity Etching Method App 20210371274 - Zhong; Xiaohui ;   et al. | 2021-12-02 |
Planarization Method App 20210336596 - Loo; Lieng ;   et al. | 2021-10-28 |
Planarization Method App 20210336125 - Loo; Lieng ;   et al. | 2021-10-28 |
Piezoelectric type and capacitive type combined MEMS microphone Grant 11,159,895 - Tong , et al. October 26, 2 | 2021-10-26 |
Method for processing conductive structure Grant 11,111,134 - Loo , et al. September 7, 2 | 2021-09-07 |
MEMS microphone and manufacturing method for making same Grant 10,947,110 - Loo , et al. March 16, 2 | 2021-03-16 |
Motion Control Structure And Actuator App 20210002125 - Tao; Ze ;   et al. | 2021-01-07 |
Piezoelectric Type And Capacitive Type Combined Mems Microphone App 20200413203 - Tong; Bei ;   et al. | 2020-12-31 |
Mems Microphone App 20200413204 - Tong; Bei ;   et al. | 2020-12-31 |
Method For Manufacturing Polycrystalline Silicon Thin Film, Polycrystalline Silicon Thin Film, And Acoustic Sensor App 20200389747 - Goh; Kianheng ;   et al. | 2020-12-10 |
Plane Polishing Method Of Silicon Wafer And Processing Method Of Silicon Wafer App 20200357656 - Loo; Lieng ;   et al. | 2020-11-12 |
Plane polishing method of silicon wafer and processing method of silicon wafer Grant 10,818,511 - Loo , et al. October 27, 2 | 2020-10-27 |
MEMS microphone and manufacturing method for making same App 20200048080 - Loo; Lieng ;   et al. | 2020-02-13 |
Method for processing conductive structure App 20190337799 - Loo; Lieng ;   et al. | 2019-11-07 |
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