Lahiri; Indrajit

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lahiri; Indrajit.The latest application filed is for "method for monitoring the position of a semiconductor processing robot".

Company Profile

0.5.7

Lahiri; Indrajit - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Removal of process residues on the backside of a substrate Grant 8,083,963 - Delgadino , et al. December 27, 2	2011-12-27
Method For Monitoring The Position Of A Semiconductor Processing Robot App 20100145513 - Yim; Pyongwon ; et al.	2010-06-10
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support Grant 7,582,167 - Kaszuba , et al. September 1, 2	2009-09-01
Removal Of Process Residues On The Backside Of A Substrate App 20080194111 - Delgadino; Gerardo A. ; et al.	2008-08-14
Apparatus For Reducing Entrapment Of Foreign Matter Along A Moveable Shaft Of A Substrate Support App 20080017115 - Kaszuba; Andrzej ; et al.	2008-01-24
Plasma Dielectric Etch Process Including Ex-situ Backside Polymer Removal For Low-dielectric Constant Material App 20070238305 - Delgadino; Gerardo A. ; et al.	2007-10-11
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support Grant 7,279,049 - Kaszuba , et al. October 9, 2	2007-10-09
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material Grant 7,276,447 - Delgadino , et al. October 2, 2	2007-10-02
Method For Monitoring The Position Of A Semiconductor Processing Robot App 20060224276 - Yim; Pyongwon ; et al.	2006-10-05
Method and apparatus for monitoring the position of a semiconductor processing robot Grant 7,107,125 - Yim , et al. September 12, 2	2006-09-12
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support App 20050172905 - Kaszuba, Andrzej ; et al.	2005-08-11
Method and apparatus for monitoring the position of a semiconductor processing robot App 20050096794 - Yim, Pyongwon ; et al.	2005-05-05

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