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Patent applications and USPTO patent grants for LaFlamme, Jr.; Arthur H..The latest application filed is for "high throughput thermal treatment system and method of operating".
Patent | Date |
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Reduced maintenance chemical oxide removal (COR) processing system Grant 8,409,399 - LaFlamme, Jr. , et al. April 2, 2 | 2013-04-02 |
High throughput thermal treatment system and method of operating Grant 8,303,715 - Hamelin , et al. November 6, 2 | 2012-11-06 |
Processing system and method for chemically treating a substrate Grant 7,964,058 - Hamelin , et al. June 21, 2 | 2011-06-21 |
Reduced contaminant gas injection system and method of using Grant 7,743,731 - Enomoto , et al. June 29, 2 | 2010-06-29 |
High Throughput Thermal Treatment System And Method Of Operating App 20100025368 - Hamelin; Thomas ;   et al. | 2010-02-04 |
Processing system and method for treating a substrate Grant 7,651,583 - Kent , et al. January 26, 2 | 2010-01-26 |
Reduced Maintenance Chemical Oxide Removal (COR) Processing System App 20090226633 - LaFlamme, JR.; Arthur H. ;   et al. | 2009-09-10 |
Method and apparatus for improved baffle plate Grant 7,461,614 - Fink , et al. December 9, 2 | 2008-12-09 |
Chemical processing system and method Grant 7,462,243 - Laflamme, Jr. , et al. December 9, 2 | 2008-12-09 |
Electronic device processing equipment having contact gasket between chamber parts Grant 6,695,318 - Golovato , et al. February 24, 2 | 2004-02-24 |
Etching system and etching chamber Grant 6,558,506 - Freeman , et al. May 6, 2 | 2003-05-06 |
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