Patent | Date |
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Residual layer thickness measurement and correction Grant 8,647,554 - Jones , et al. February 11, 2 | 2014-02-11 |
Method for expelling gas positioned between a substrate and a mold Grant 8,282,383 - Choi , et al. October 9, 2 | 2012-10-09 |
Imprint lithography method Grant 8,268,220 - Xu , et al. September 18, 2 | 2012-09-18 |
Imprint lithography method Grant 8,142,703 - Xu , et al. March 27, 2 | 2012-03-27 |
Chucking system comprising an array of fluid chambers Grant 8,033,813 - Cherala , et al. October 11, 2 | 2011-10-11 |
Preserving filled features when vacuum wiping Grant 8,021,594 - Shackleton , et al. September 20, 2 | 2011-09-20 |
Method for controlling distribution of fluid components on a body Grant 7,981,481 - Xu , et al. July 19, 2 | 2011-07-19 |
Method to provide a layer with uniform etch characteristics Grant 7,939,131 - Xu , et al. May 10, 2 | 2011-05-10 |
Desirable Wetting And Release Between An Imprint Lithography Mold And A Polymerizable Composition App 20110031651 - Xu; Frank Y. ;   et al. | 2011-02-10 |
Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor Grant 7,845,931 - Xu , et al. December 7, 2 | 2010-12-07 |
Method of providing desirable wetting and release characteristics between a mold and a polymerizable composition Grant 7,837,921 - Xu , et al. November 23, 2 | 2010-11-23 |
Residual Layer Thickness Measurement and Correction App 20100286811 - Jones; Christopher E. ;   et al. | 2010-11-11 |
Method for fast filling of templates for imprint lithography using on template dispense Grant 7,811,505 - McMackin , et al. October 12, 2 | 2010-10-12 |
Method for Expelling Gas Positioned Between a Substrate and a Mold App 20100143521 - Choi; Byung-Jin ;   et al. | 2010-06-10 |
Method for expelling gas positioned between a substrate and a mold Grant 7,691,313 - Choi , et al. April 6, 2 | 2010-04-06 |
Chucking System Comprising an Array of Fluid Chambers App 20100059914 - Cherala; Anshuman ;   et al. | 2010-03-11 |
Chucking system comprising an array of fluid chambers Grant 7,635,263 - Cherala , et al. December 22, 2 | 2009-12-22 |
Preserving Filled Features When Vacuum Wiping App 20090256289 - Shackleton; Steven C. ;   et al. | 2009-10-15 |
Contact Angle Attenuations on Multiple Surfaces App 20090136654 - Xu; Frank Y. ;   et al. | 2009-05-28 |
Method of creating a turbulent flow of fluid between a mold and a substrate Grant 7,531,025 - McMackin , et al. May 12, 2 | 2009-05-12 |
Imprint lithography template to facilitate control of liquid movement Grant 7,473,090 - McMackin , et al. January 6, 2 | 2009-01-06 |
Partial vacuum environment imprinting Grant 7,462,028 - Cherala , et al. December 9, 2 | 2008-12-09 |
Polymerization Technique to Attenuate Oxygen Inhibition of Solidification of Liquids and Composition Therefor App 20080085465 - Xu; Frank Y. ;   et al. | 2008-04-10 |
Moat system for an imprint lithography template Grant 7,309,225 - McMackin , et al. December 18, 2 | 2007-12-18 |
Partial Vacuum Environment Imprinting App 20070275114 - Cherala; Anshuman ;   et al. | 2007-11-29 |
Imprint Lithography Template to Facilitate Control of Liquid Movement App 20070243279 - McMackin; Ian M. ;   et al. | 2007-10-18 |
System for controlling a volume of material on a mold Grant 7,281,919 - Shackleton , et al. October 16, 2 | 2007-10-16 |
Residual Layer Thickness Measurement and Correction App 20070228593 - Jones; Christopher E. ;   et al. | 2007-10-04 |
Preserving Filled Features when Vacuum Wiping App 20070228608 - Shackleton; Steven C. ;   et al. | 2007-10-04 |
System for creating a turbulent flow of fluid between a mold and a substrate Grant 7,270,533 - McMackin , et al. September 18, 2 | 2007-09-18 |
Chucking system comprising an array of fluid chambers App 20070190200 - Cherala; Anshuman ;   et al. | 2007-08-16 |
Method For Controlling Distribution Of Fluid Components On A Body App 20070141271 - Xu; Frank ;   et al. | 2007-06-21 |
Method For Expelling Gas Positioned Between A Substrate And A Mold App 20070114686 - Choi; Byung-Jin ;   et al. | 2007-05-24 |
Single phase fluid imprint lithography method Grant 7,090,716 - McMackin , et al. August 15, 2 | 2006-08-15 |
Method of providing desirable wetting and release characterstics between a mold and a polymerizable composition App 20060175736 - Xu; Frank Y. ;   et al. | 2006-08-10 |
Imprint lithography template to facilitate control of liquid movement App 20060177535 - McMackin; Ian M. ;   et al. | 2006-08-10 |
Method for fast filling of templates for imprint lithography using on template dispense App 20060121728 - McMackin; Ian M. ;   et al. | 2006-06-08 |
System for controlling a volume of material on a mold App 20060121141 - Shackleton; Steven C. ;   et al. | 2006-06-08 |
Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor App 20060062922 - Xu; Frank Y. ;   et al. | 2006-03-23 |
Moat system for an imprint lithography template App 20060032437 - McMackin; Ian M. ;   et al. | 2006-02-16 |
Method to provide a layer with uniform etch characteristics App 20060035029 - Xu; Frank Y. ;   et al. | 2006-02-16 |
Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing App 20050270312 - Lad, Pankaj B. ;   et al. | 2005-12-08 |
Materials and methods for imprint lithography App 20050160934 - Xu, Frank Y. ;   et al. | 2005-07-28 |
Single phase fluid imprint lithography method App 20050072755 - McMackin, Ian M. ;   et al. | 2005-04-07 |
System for creating a turbulent flow of fluid between a mold and a substrate App 20050074512 - McMackin, Ian M. ;   et al. | 2005-04-07 |
Method of creating a turbulent flow of fluid between a mold and a substrate App 20050072757 - McMackin, Ian M. ;   et al. | 2005-04-07 |