Lach; Otto
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lach; Otto.The latest application filed is for "method and apparatus for liquid treatment of wafer shaped articles".
- Lach; Otto - Treffen AT
| Patent | Date |
|---|---|
| Device and method for processing wafer-shaped articles Grant 9,484,229 - Lach , et al. November 1, 2 | 2016-11-01 |
| Grounded chuck Grant 9,190,310 - Brugger , et al. November 17, 2 | 2015-11-17 |
| Apparatus for liquid treatment of wafer shaped articles Grant 9,147,593 - Lach , et al. September 29, 2 | 2015-09-29 |
| Device for holding wafer shaped articles Grant 9,130,002 - Frank , et al. September 8, 2 | 2015-09-08 |
| Method and apparatus for liquid treatment of wafer shaped articles Grant 9,093,482 - Brugger , et al. July 28, 2 | 2015-07-28 |
| Method And Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20140102637 - BRUGGER; Michael ; et al. | 2014-04-17 |
| Apparatus For Liquid Treatment Of Wafer Shaped Articles App 20140097580 - LACH; Otto ; et al. | 2014-04-10 |
| High temperature chuck and method of using same Grant 8,613,288 - Brugger , et al. December 24, 2 | 2013-12-24 |
| Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin Grant 8,608,146 - Brugger , et al. December 17, 2 | 2013-12-17 |
| Device And Method For Processing Wafer-shaped Articles App 20130118535 - LACH; Otto ; et al. | 2013-05-16 |
| Device For Treating Surfaces Of Wafer-shaped Articles App 20120305036 - LACH; Otto ; et al. | 2012-12-06 |
| Device For Holding Wafer Shaped Articles App 20110272874 - FRANK; Dieter ; et al. | 2011-11-10 |
| Grounded Chuck App 20110254236 - BRUGGER; Michael ; et al. | 2011-10-20 |
| High Temperature Chuck And Method Of Using Same App 20110146728 - BRUGGER; Michael ; et al. | 2011-06-23 |
| Reinforced Pin For Being Used In A Pin Chuck, And A Pin Chuck Using Such Reinforced Pin App 20110148022 - BRUGGER; Michael ; et al. | 2011-06-23 |
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