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Patent applications and USPTO patent grants for La Tulipe; Douglas C. JR..The latest application filed is for "post-etch removal of fluorocarbon-based residues from a hybrid dielectric structure".
Patent | Date |
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Post-etch removal of fluorocarbon-based residues from a hybrid dielectric structure App 20070059922 - Clevenger; Lawrence A. ;   et al. | 2007-03-15 |
Back End Interconnect With A Shaped Interface App 20060292852 - Clevenger; Lawrence A. ;   et al. | 2006-12-28 |
Oxidized Tantalum Nitride As An Improved Hardmask In Dual-damascene Processing App 20050208742 - America, William G. ;   et al. | 2005-09-22 |
Crystallographic Modification of Hard mask Properties App 20050112862 - Clevenger, Lawrence A. ;   et al. | 2005-05-26 |
Method for depositing a metal layer on a semiconductor interconnect structure having a capping layer App 20040115921 - Clevenger, Larry ;   et al. | 2004-06-17 |
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