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Liquid processing apparatus Grant 11,031,261 - Takiguchi , et al. June 8, 2 | 2021-06-08 |
Developing apparatus, developing method and storage medium Grant 10,289,004 - Yoshihara , et al. | 2019-05-14 |
Substrate Processing Apparatus, Substrate Processing Method, And Computer-readable Recording Medium App 20190084118 - Kubota; Minoru ;   et al. | 2019-03-21 |
Developing method, developing apparatus and storage medium Grant 10,120,285 - Yoshihara , et al. November 6, 2 | 2018-11-06 |
Liquid Processing Apparatus App 20180308719 - TAKIGUCHI; Yasushi ;   et al. | 2018-10-25 |
Liquid processing apparatus Grant 10,014,190 - Takiguchi , et al. July 3, 2 | 2018-07-03 |
Substrate cleaning apparatus, substrate cleaning method, and storage medium Grant 9,947,556 - Takiguchi , et al. April 17, 2 | 2018-04-17 |
Developing Method, Developing Apparatus And Storage Medium App 20170090291 - YOSHIHARA; Kousuke ;   et al. | 2017-03-30 |
Developing apparatus, developing method and storage medium Grant 9,575,411 - Yoshihara , et al. February 21, 2 | 2017-02-21 |
Developing Apparatus, Developing Method And Storage Medium App 20170045821 - YOSHIHARA; Kousuke ;   et al. | 2017-02-16 |
Developing method, developing apparatus and storage medium Grant 9,568,829 - Yoshihara , et al. February 14, 2 | 2017-02-14 |
Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method Grant 9,214,363 - Kyouda , et al. December 15, 2 | 2015-12-15 |
Developing Apparatus, Developing Method And Storage Medium App 20150036110 - YOSHIHARA; Kousuke ;   et al. | 2015-02-05 |
Developing Method, Developing Apparatus And Storage Medium App 20150036109 - YOSHIHARA; Kousuke ;   et al. | 2015-02-05 |
Liquid Processing Apparatus App 20150027503 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Storage Medium App 20150027492 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |
Coating and developing apparatus, coating and developing method, and storage medium Grant 8,757,089 - Hontake , et al. June 24, 2 | 2014-06-24 |
Substrate treatment method, coating treatment apparatus, and substrate treatment system Grant 8,703,400 - Tsutsumi , et al. April 22, 2 | 2014-04-22 |
Coating And Developing Apparatus, Coating Film Forming Method, And Storage Medium Storing Program For Performing The Method App 20130293856 - KYOUDA; Hideharu ;   et al. | 2013-11-07 |
Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method Grant 8,518,494 - Yamamoto , et al. August 27, 2 | 2013-08-27 |
Developing device and developing method Grant 8,445,189 - Yamamoto , et al. May 21, 2 | 2013-05-21 |
Substrate treatment method, coating film removing apparatus, and substrate treatment system Grant 8,366,872 - Tsutsumi , et al. February 5, 2 | 2013-02-05 |
Developing Method And Apparatus Using Organic-solvent Containing Developer App 20120218531 - Hontake; Kouichi ;   et al. | 2012-08-30 |
Coating And Developing Apparatus, Coating And Developing Method, And Storage Medium App 20120140191 - HONTAKE; Kouichi ;   et al. | 2012-06-07 |
Coating and developing apparatus, coating and developing method, and storage medium Grant 8,163,469 - Hontake , et al. April 24, 2 | 2012-04-24 |
Substrate Processing Method, Substrate Processing System, And Computer-readable Storage Medium App 20120061021 - Kyouda; Hideharu ;   et al. | 2012-03-15 |
Substrate treatment method Grant 8,110,325 - Niwa , et al. February 7, 2 | 2012-02-07 |
Coating film forming apparatus and coating film forming method for immersion light exposure Grant 8,111,372 - Kyouda , et al. February 7, 2 | 2012-02-07 |
Substrate Cleaning Device And Substrate Cleaning Method App 20120006362 - Yamamoto; Taro ;   et al. | 2012-01-12 |
Substrate processing method, substrate processing system, and computer-readable storage medium Grant 8,083,959 - Kyouda , et al. December 27, 2 | 2011-12-27 |
Substrate cleaning device and substrate cleaning method Grant 8,037,890 - Yamamoto , et al. October 18, 2 | 2011-10-18 |
Substrate Treatment Method, Coating Film Removing Apparatus, And Substrate Treatment System App 20110240597 - TSUTSUMI; Kenji ;   et al. | 2011-10-06 |
Developing apparatus and developing method Grant 8,026,048 - Ookouchi , et al. September 27, 2 | 2011-09-27 |
Cleaning apparatus and method for immersion light exposure Grant 8,010,221 - Hontake , et al. August 30, 2 | 2011-08-30 |
Substrate Treatment Method App 20110200923 - NIWA; Takafumi ;   et al. | 2011-08-18 |
Substrate Treatment Method, Coating Treatment Apparatus, And Substrate Treatment System App 20110155693 - TSUTSUMI; Kenji ;   et al. | 2011-06-30 |
Coating film forming apparatus and method Grant 7,959,988 - Yamamoto , et al. June 14, 2 | 2011-06-14 |
Developing Device And Developing Method App 20110127236 - YAMAMOTO; Taro ;   et al. | 2011-06-02 |
Substrate treatment method, coating treatment apparatus, and substrate treatment system Grant 7,926,441 - Tsutsumi , et al. April 19, 2 | 2011-04-19 |
Developing device and developing method Grant 7,918,182 - Yamamoto , et al. April 5, 2 | 2011-04-05 |
Developing Apparatus And Developing Method App 20100330508 - OOKOUCHI; Atsushi ;   et al. | 2010-12-30 |
Development device and development method Grant 7,823,534 - Ookouchi , et al. November 2, 2 | 2010-11-02 |
Coating and developing apparatus, coating and developing method, and storage medium App 20100232781 - Hontake; Kouichi ;   et al. | 2010-09-16 |
Coating and developing method, coating and developing system and storage medium Grant 7,742,146 - Kyouda , et al. June 22, 2 | 2010-06-22 |
Coating Film Forming Apparatus And Coating Film Forming Method For Immersion Light Exposure App 20100073647 - Kyouda; Hideharu ;   et al. | 2010-03-25 |
Coater/developer and coating/developing method Grant 7,665,916 - Yamamoto , et al. February 23, 2 | 2010-02-23 |
Heat processing apparatus and heat processing method Grant 7,601,933 - Yoshihara , et al. October 13, 2 | 2009-10-13 |
Development device and development method App 20090130614 - Ookouchi; Atsushi ;   et al. | 2009-05-21 |
Substrate Processing Method App 20090004607 - Shimoaoki; Takeshi ;   et al. | 2009-01-01 |
Substrate Treatment Method, Coating Film Removing Apparatus, And Substrate Treatment System App 20080176002 - TSUTSUMI; Kenji ;   et al. | 2008-07-24 |
Substrate Treatment Method, Coating Treatment Apparatus, And Substrate Treatment System App 20080176003 - TSUTSUMI; Kenji ;   et al. | 2008-07-24 |
Substrate Processing Method, Substrate Processing System, And Computer-readable Storage Medium App 20080160781 - KYOUDA; Hideharu ;   et al. | 2008-07-03 |
Cleaning Apparatus And Method For Immersion Light Exposure App 20080133045 - Hontake; Kouichi ;   et al. | 2008-06-05 |
Coating Film Forming Apparatus And Method App 20080124489 - Yamamoto; Taro ;   et al. | 2008-05-29 |
Exposure And Developing Method App 20080070167 - TAKAHASHI; Nobuhiro ;   et al. | 2008-03-20 |
Coating And Developing Apparatus, Coating Film Forming Method, And Storage Medium Storing Program For Performing The Method App 20070212884 - Yamamoto; Taro ;   et al. | 2007-09-13 |
Developing device and developing method App 20070184178 - Yamamoto; Taro ;   et al. | 2007-08-09 |
Coating And Developing Method, Coating And Developing System And Storage Medium App 20070184392 - Kyouda; Hideharu ;   et al. | 2007-08-09 |
Coater/developer and coating/developing method App 20070177869 - Yamamoto; Taro ;   et al. | 2007-08-02 |
Substrate cleaning device and substrate cleaning method App 20070044823 - Yamamoto; Taro ;   et al. | 2007-03-01 |
Heat processing apparatus and heat processing method App 20060193986 - Yoshihara; Kousuke ;   et al. | 2006-08-31 |
Method for developing processing and apparatus for supplying developing solution Grant 6,991,385 - Yoshihara , et al. January 31, 2 | 2006-01-31 |
Method for developing processing and apparatus for supplying developing solution App 20050053874 - Yoshihara, Kousuke ;   et al. | 2005-03-10 |
Method for developing processing and apparatus for supplying developing solution Grant 6,811,962 - Yoshihara , et al. November 2, 2 | 2004-11-02 |
Apparatus and method for development Grant 6,709,174 - Yamamoto , et al. March 23, 2 | 2004-03-23 |
Apparatus and method for development App 20030077083 - Yamamoto, Taro ;   et al. | 2003-04-24 |
Method for developing processing and apparatus for supplying developing solution App 20030044731 - Yoshihara, Kousuke ;   et al. | 2003-03-06 |
Developing method and developing apparatus App 20020008857 - Kosugi, Hitoshi ;   et al. | 2002-01-24 |