Kyogoku; Mitsusuke
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kyogoku; Mitsusuke.The latest application filed is for "sealing mechanism of multi-chamber load-locking device".
- Kyogoku; Mitsusuke - Tama JP
- Kyogoku; Mitsusuke - Tokyo JP
- Kyogoku; Mitsusuke - Hino JP
| Patent | Date |
|---|---|
| Sealing mechanism of multi-chamber load-locking device Grant 6,743,329 - Kyogoku , et al. June 1, 2 | 2004-06-01 |
| Device and method for load locking for semiconductor processing Grant 6,053,686 - Kyogoku April 25, 2 | 2000-04-25 |
| Vapor selective etching method and apparatus Grant 6,024,888 - Watanabe , et al. February 15, 2 | 2000-02-15 |
| HF vapor selective etching method and apparatus Grant 5,658,417 - Watanabe , et al. August 19, 1 | 1997-08-19 |
| Load lock chamber for vertical type heat treatment apparatus Grant 5,571,330 - Kyogoku November 5, 1 | 1996-11-05 |
| Electron beam apparatus with improved specimen holder Grant 4,596,934 - Yanaka , et al. June 24, 1 | 1986-06-24 |
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