Patent | Date |
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Exposure photolithography methods Grant 9,235,119 - Chen , et al. January 12, 2 | 2016-01-12 |
Exposure Photolithography Methods App 20140349237 - Chen; Kuang-Jung ;   et al. | 2014-11-27 |
Photoresist compositions Grant 8,846,296 - Chen , et al. September 30, 2 | 2014-09-30 |
Method and structure for reworking antireflective coating over semiconductor substrate Grant 8,835,307 - Akinmade-Yusuff , et al. September 16, 2 | 2014-09-16 |
Multiple exposure photolithography methods Grant 8,568,960 - Chen , et al. October 29, 2 | 2013-10-29 |
Method for reworking antireflective coating over semiconductor substrate Grant 8,288,271 - Akinmade Yusuff , et al. October 16, 2 | 2012-10-16 |
Method And Structure For Reworking Antireflective Coating Over Semiconductor Substrate App 20120231554 - Akinmade Yusuff; Hakeem ;   et al. | 2012-09-13 |
Photoresist Compositions App 20120214099 - Chen; Kuang-Jung ;   et al. | 2012-08-23 |
Method And Structure For Reworking Antireflective Coating Over Semiconductor Substrate App 20120205786 - Akinmade-Yusuff; Hakeem ;   et al. | 2012-08-16 |
Multiple exposure photolithography methods and photoresist compositions Grant 8,236,476 - Chen , et al. August 7, 2 | 2012-08-07 |
Multiple Exposure Photolithography Methods App 20120178027 - Chen; Kuang-Jung ;   et al. | 2012-07-12 |
Wet developable bottom antireflective coating composition and method for use thereof Grant 8,202,678 - Chen , et al. June 19, 2 | 2012-06-19 |
Photoresists and methods for optical proximity correction Grant 8,053,172 - Halle , et al. November 8, 2 | 2011-11-08 |
Photoresist compositions and methods related to near field masks Grant 8,021,828 - Huang , et al. September 20, 2 | 2011-09-20 |
Method And Structure For Reworking Antireflective Coating Over Semiconductor Substrate App 20110101507 - Akinmade Yusuff; Hakeem ;   et al. | 2011-05-05 |
Wet Developable Bottom Antireflective Coating Composition And Method For Use Thereof App 20090291392 - Chen; Kuang-Jung J. ;   et al. | 2009-11-26 |
Photoresist Compositions And Methods Related To Near Field Masks App 20090214959 - Huang; Wu-Song ;   et al. | 2009-08-27 |
Photoresists And Methods For Optical Proximity Correction App 20090214981 - Halle; Scott David ;   et al. | 2009-08-27 |
Wet developable bottom antireflective coating composition and method for use thereof Grant 7,563,563 - Chen , et al. July 21, 2 | 2009-07-21 |
Multiple Exposure Photolithography Methods And Photoresist Compostions App 20090176174 - Chen; Kuang-Jung ;   et al. | 2009-07-09 |
Apparatus And Method For Measuring The Quantity Of Condensable Materials Which Outgas During Cure Of Organic Thin Films App 20080248208 - Chace; Mark Stephen ;   et al. | 2008-10-09 |
Wet developable bottom antireflective coating composition and method for use thereof App 20070243484 - Chen; Kuang-Jung J. ;   et al. | 2007-10-18 |
Bottom antireflective coating composition and method for use thereof App 20070231736 - Chen; Kuang-Jung J. ;   et al. | 2007-10-04 |
Method of making a packaged radiation sensitive resist film-coated workpiece Grant 7,168,224 - Angelopoulos , et al. January 30, 2 | 2007-01-30 |
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20040045866 - Angelopoulos, Marie ;   et al. | 2004-03-11 |
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20030019782 - Angelopoulos, Marie ;   et al. | 2003-01-30 |