| Patent | Date |
|---|
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
Grant 11,365,476 - Jha , et al. June 21, 2 | 2022-06-21 |
Method For Forming Memory And Memory
App 20210398984 - ZHANG; Lintao ; et al. | 2021-12-23 |
3D CTF integration using hybrid charge trap layer of sin and self aligned SiGe nanodot
Grant 10,825,681 - Kwon , et al. November 3, 2 | 2020-11-03 |
Method and apparatus for depositing cobalt in a feature
Grant 10,714,388 - Park , et al. | 2020-07-14 |
Tungsten defluorination by high pressure treatment
Grant 10,622,214 - Wong , et al. | 2020-04-14 |
Tungsten Defluorination By High Pressure Treatment
App 20200098574 - WONG; Keith Tatseun ; et al. | 2020-03-26 |
Self-aligned nanodots for 3D NAND flash memory
Grant 10,446,392 - Jun , et al. Oc | 2019-10-15 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 10,410,864 - Kwon , et al. Sept | 2019-09-10 |
Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices
App 20190185996 - JHA; Praket P. ; et al. | 2019-06-20 |
Method And Apparatus For Depositing Cobalt In A Feature
App 20190122924 - PARK; JIN HEE ; et al. | 2019-04-25 |
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
Grant 10,246,772 - Jha , et al. | 2019-04-02 |
Method and apparatus for depositing cobalt in a feature
Grant 10,157,787 - Park , et al. Dec | 2018-12-18 |
Tungsten Defluorination By High Pressure Treatment
App 20180342396 - Wong; Keith Tatseun ; et al. | 2018-11-29 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20180277370 - KWON; Thomas Jongwan ; et al. | 2018-09-27 |
Self-aligned Nanodots For 3d Nand Flash Memory
App 20180233359 - JUN; Sungwon ; et al. | 2018-08-16 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 9,991,118 - Kwon , et al. June 5, 2 | 2018-06-05 |
3d Ctf Integration Using Hybrid Charge Trap Layer Of Sin And Self Aligned Sige Nanodot
App 20180047743 - KWON; Thomas Jongwan | 2018-02-15 |
Vertical floating gate NAND with selectively deposited ALD metal films
Grant 9,806,090 - Sharangpani , et al. October 31, 2 | 2017-10-31 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20170207088 - KWON; Thomas Jongwan ; et al. | 2017-07-20 |
Method And Apparatus For Depositing Cobalt In A Feature
App 20170178956 - PARK; Jin Hee ; et al. | 2017-06-22 |
Three dimensional vertical NAND device with floating gates
Grant 9,524,779 - Kai , et al. December 20, 2 | 2016-12-20 |
Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices
App 20160293609 - JHA; Praket P. ; et al. | 2016-10-06 |
Vertical Floating Gate Nand With Selectively Deposited Ald Metal Films
App 20160293617 - SHARANGPANI; Rahul ; et al. | 2016-10-06 |
Vertical floating gate NAND with selectively deposited ALD metal films
Grant 9,379,124 - Sharangpani , et al. June 28, 2 | 2016-06-28 |
Vertical Floating Gate NAND with Selectively Deposited ALD Metal Films
App 20150380422 - Sharangpani; Rahul ; et al. | 2015-12-31 |
Three Dimensional Vertical NAND Device With Floating Gates
App 20150371709 - Kai; James ; et al. | 2015-12-24 |
Methods of forming integrated circuit devices with metal-insulator-metal capacitors
App 20060060907 - Kim; Ki-Chul ; et al. | 2006-03-23 |
Integrated circuit devices with metal-insulator-metal capacitors
Grant 6,992,346 - Kim , et al. January 31, 2 | 2006-01-31 |
Integrated circuit devices with metal-insulator-metal capacitors and methods of forming the same
App 20040262661 - Kim, Ki-Chul ; et al. | 2004-12-30 |
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