Patent | Date |
---|
Balanced positioning system for use in lithographic apparatus Grant 7,202,937 - Kwan , et al. April 10, 2 | 2007-04-10 |
Balanced positioning system for use in lithographic apparatus App 20060203216 - Kwan; Yim Bun P. ;   et al. | 2006-09-14 |
Cooling of voice coil motors Grant 7,057,313 - Buis , et al. June 6, 2 | 2006-06-06 |
Balanced positioning system for use in lithographic apparatus Grant 7,034,920 - Kwan , et al. April 25, 2 | 2006-04-25 |
Balanced positioning system for use in lithographic apparatus Grant 6,924,882 - Kwan August 2, 2 | 2005-08-02 |
Cooling of voice coil motors App 20050056792 - Buis, Edwin J. ;   et al. | 2005-03-17 |
Positioning system for use in lithographic apparatus Grant 6,852,989 - Kwan , et al. February 8, 2 | 2005-02-08 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method App 20040211921 - Castenmiller, Thomas J.M. ;   et al. | 2004-10-28 |
Cooling of voice coil motors in lithographic projection apparatus App 20040079898 - Buis, Edwin J. ;   et al. | 2004-04-29 |
Balanced positioning system for use in lithographic apparatus App 20040041994 - Kwan, Yim Bun P. | 2004-03-04 |
Balanced positioning system for use in lithographic apparatus Grant 6,671,036 - Kwan December 30, 2 | 2003-12-30 |
Cooling of voice coil motors in lithographic projection apparatus Grant 6,657,204 - Buis , et al. December 2, 2 | 2003-12-02 |
Positioning system for use in lithographic apparatus Grant 6,635,887 - Kwan , et al. October 21, 2 | 2003-10-21 |
Purge gas systems for use in lithographic projection apparatus Grant 6,542,220 - Schrijver , et al. April 1, 2 | 2003-04-01 |
Lithographic projection apparatus having a temperature controlled heat shield Grant 6,509,951 - Loopstra , et al. January 21, 2 | 2003-01-21 |
Balanced positioning system for use in lithographic apparatus App 20020191173 - Kwan, Yim Bun P. | 2002-12-19 |
Balanced positioning system for use lithographic apparatus Grant 6,449,030 - Kwan September 10, 2 | 2002-09-10 |
Balanced positioning system for use lithographic apparatus App 20020048009 - Kwan, Yim Bun P. | 2002-04-25 |
Positioning system for use in lithographic apparatus App 20010050341 - Kwan, Yim Bun P. ;   et al. | 2001-12-13 |
Cooling of voice coil motors in lithographic projection apparatus App 20010013580 - Buis, Edwin J. ;   et al. | 2001-08-16 |
Lithographic projection apparatus having a temperature controlled heat shield App 20010013925 - Loopstra, Erik R. ;   et al. | 2001-08-16 |
Positioning device having two object holders Grant 6,262,796 - Loopstra , et al. July 17, 2 | 2001-07-17 |
Balanced positioning system for use in lithographic apparatus App 20010006762 - Kwan, Yim Bun P. ;   et al. | 2001-07-05 |
Crash prevention in positioning apparatus for use in lithographic projection apparatus App 20010004105 - Kwan, Yim Bun P. ;   et al. | 2001-06-21 |