Kvamme; Damon F.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kvamme; Damon F..The latest application filed is for "inspection system with non-circular pupil".

Company Profile

3.22.13

Kvamme; Damon F. - Los Gatos CA
Kvamme; Damon F. - San Jose CA
Kvamme; Damon F. - Ann Arbor MI
Kvamme; Damon F. - Plymouth MI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection system with non-circular pupil Grant 11,112,691 - Kvamme , et al. September 7, 2	2021-09-07
Inspection System with Non-Circular Pupil App 20200225574 - Kvamme; Damon F. ; et al.	2020-07-16
Methods And Apparatus For Polarizing Reticle Inspection App 20190003960 - Huang; Haifeng ; et al.	2019-01-03
Methods and apparatus for polarizing reticle inspection Grant 10,168,273 - Huang , et al. J	2019-01-01
Source multiplexing illumination for mask inspection Grant 9,625,810 - Wang , et al. April 18, 2	2017-04-18
Deep ultra-violet light sources for wafer and reticle inspection systems Grant 9,318,870 - Lei , et al. April 19, 2	2016-04-19
Illumination system with time multiplexed sources for reticle inspection Grant 9,151,718 - Wang , et al. October 6, 2	2015-10-06
Extreme Ultra-violet (euv) Inspection Systems App 20150192459 - Kvamme; Damon F.	2015-07-09
Apparatus for EUV imaging and methods of using same Grant 8,842,272 - Wack , et al. September 23, 2	2014-09-23
Deep Ultra-violet Light Sources For Wafer And Reticle Inspection Systems App 20140111799 - Lei; Gang ; et al.	2014-04-24
Illumination System with Time Multiplexed Sources for Reticle Inspection App 20130242295 - Wang; Daimian ; et al.	2013-09-19
Apparatus For Euv Imaging And Methods Of Using Same App 20130083321 - Wack; Daniel C. ; et al.	2013-04-04
Source Multiplexing Illumination For Mask Inspection App 20120236281 - Wang; Daimian ; et al.	2012-09-20
Multiple beam inspection apparatus and method Grant 7,486,393 - Kvamme , et al. February 3, 2	2009-02-03
Multiple beam inspection apparatus and method Grant 7,352,457 - Kvamme , et al. April 1, 2	2008-04-01
Multiple Beam Inspection Apparatus And Method App 20080018883 - Kvamme; Damon F. ; et al.	2008-01-24
Variable illuminator and speckle buster apparatus Grant 7,292,393 - Kvamme November 6, 2	2007-11-06
Multiple beam inspection apparatus and method App 20060209298 - Kvamme; Damon F. ; et al.	2006-09-21
Variable illuminator and speckle buster apparatus App 20060152810 - Kvamme; Damon F.	2006-07-13
Multiple beam inspection apparatus and method Grant 7,075,638 - Kvamme , et al. July 11, 2	2006-07-11
Multiple beam inspection apparatus and method App 20050174570 - Kvamme, Damon F. ; et al.	2005-08-11
Multiple beam inspection apparatus and method Grant 6,879,390 - Kvamme , et al. April 12, 2	2005-04-12
Method and system for detecting phase defects in lithographic masks and semiconductor wafers Grant 6,727,512 - Stokowski , et al. April 27, 2	2004-04-27
Method and system for detecting phase defects in lithographic masks and semiconductor wafers App 20040016897 - Stokowski, Stan ; et al.	2004-01-29
Differential detector coupled with defocus for improved phase defect sensitivity Grant 6,646,281 - Krantz , et al. November 11, 2	2003-11-11
Multiple beam inspection apparatus and method Grant 6,636,301 - Kvamme , et al. October 21, 2	2003-10-21
Automated photomask inspection apparatus and method Grant 5,737,072 - Emery , et al. April 7, 1	1998-04-07
Automated photomask inspection apparatus Grant 5,572,598 - Wihl , et al. November 5, 1	1996-11-05
Automated photomask inspection apparatus and method Grant 5,563,702 - Emery , et al. October 8, 1	1996-10-08
Lighting system for commercial refrigerator doors Grant 5,471,372 - Mamelson , et al. November 28, 1	1995-11-28
High-magnification wide-field-of-view telemicroscopic lens configuration Grant 5,394,272 - Kvamme , et al. February 28, 1	1995-02-28

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