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Bandgap measurements of patterned film stacks using spectroscopic metrology
Grant 11,378,451 - Wang , et al. July 5, 2 | 2022-07-05 |
Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction
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Soft X-Ray Optics With Improved Filtering
App 20210404979 - Kuznetsov; Alexander ; et al. | 2021-12-30 |
Measurement methodology of advanced nanostructures
Grant 11,156,548 - Nguyen , et al. October 26, 2 | 2021-10-26 |
Soft x-ray optics with improved filtering
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Soft X-Ray Optics With Improved Filtering
App 20210310968 - Kuznetsov; Alexander ; et al. | 2021-10-07 |
Additive-manufacturing head and manufacturing machine
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Methods and systems for characterization of an x-ray beam with high spatial resolution
Grant 11,073,487 - Bykanov , et al. July 27, 2 | 2021-07-27 |
Methods And Systems For Overlay Measurement Based On Soft X-Ray Scatterometry
App 20210207956 - Shchegrov; Andrei V. ; et al. | 2021-07-08 |
Measurement models of nanowire semiconductor structures based on re-useable sub-structures
Grant 11,036,898 - Chouaib , et al. June 15, 2 | 2021-06-15 |
On-device metrology using target decomposition
Grant 10,983,227 - Hench , et al. April 20, 2 | 2021-04-20 |
Methods And Systems For Semiconductor Metrology Based On Wavelength Resolved Soft X-Ray Reflectometry
App 20210063329 - Kuznetsov; Alexander ; et al. | 2021-03-04 |
Systems And Methods For Combined Reflectometry And Photoelectron Spectroscopy
App 20210055237 - Shchegrov; Andrei V. ; et al. | 2021-02-25 |
Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy
Grant 10,895,541 - Shchegrov , et al. January 19, 2 | 2021-01-19 |
Multilayer targets for calibration and alignment of X-ray based measurement systems
Grant 10,816,486 - Artemiev , et al. October 27, 2 | 2020-10-27 |
Methods and systems for co-located metrology
Grant 10,804,167 - Wang , et al. October 13, 2 | 2020-10-13 |
Integrated use of model-based metrology and a process model
Grant 10,769,320 - Kuznetsov , et al. Sep | 2020-09-08 |
Methods And Systems For Co-Located Metrology
App 20200243400 - Wang; David Y. ; et al. | 2020-07-30 |
Hybrid metrology for patterned wafer characterization
Grant 10,712,145 - Chen , et al. | 2020-07-14 |
Semiconductor metrology and defect classification using electron microscopy
Grant 10,580,673 - Pandev , et al. | 2020-03-03 |
System, Method And Computer Program Product For Fast Automatic Determination Of Signals For Efficient Metrology
App 20200025554 - Gellineau; Antonio A. ; et al. | 2020-01-23 |
Methods and apparatus for patterned wafer characterization
Grant 10,502,694 - Dziura , et al. Dec | 2019-12-10 |
Semiconductor metrology with information from multiple processing steps
Grant 10,504,759 - Kuznetsov , et al. Dec | 2019-12-10 |
Multilayer Targets For Calibration And Alignment Of X-Ray Based Measurement Systems
App 20190302039 - Artemiev; Nikolay ; et al. | 2019-10-03 |
Measurement Models Of Nanowire Semiconductor Structures Based On Re-Useable Sub-Structures
App 20190286787 - Chouaib; Houssam ; et al. | 2019-09-19 |
Additive-manufacturing Head And Manufacturing Machine
App 20190270246 - FUJISHIMA; Makoto ; et al. | 2019-09-05 |
Signal response metrology for scatterometry based overlay measurements
Grant 10,352,876 - Shchegrov , et al. July 16, 2 | 2019-07-16 |
Systems And Methods For Combined X-Ray Reflectometry And Photoelectron Spectroscopy
App 20190212281 - Shchegrov; Andrei V. ; et al. | 2019-07-11 |
Semiconductor Metrology and Defect Classification Using Electron Microscopy
App 20190214285 - Pandev; Stilian ; et al. | 2019-07-11 |
Measurement Methodology of Advanced Nanostructures
App 20190178788 - Nguyen; Manh ; et al. | 2019-06-13 |
Metrology of multiple patterning processes
Grant 10,215,559 - Pandev , et al. Feb | 2019-02-26 |
On-Device Metrology Using Target Decomposition
App 20190049602 - Hench; John ; et al. | 2019-02-14 |
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
App 20190041266 - Wang; Tianhan ; et al. | 2019-02-07 |
Methods And Systems For Semiconductor Metrology Based On Polychromatic Soft X-Ray Diffraction
App 20190017946 - Wack; Daniel ; et al. | 2019-01-17 |
Methods And Systems For Characterization Of An X-Ray Beam With High Spatial Resolution
App 20180328868 - Bykanov; Alexander ; et al. | 2018-11-15 |
Compressive sensing for metrology
Grant 10,062,157 - Pandev , et al. August 28, 2 | 2018-08-28 |
Hybrid Metrology For Patterned Wafer Characterization
App 20180112968 - Chen; Boxue ; et al. | 2018-04-26 |
Semiconductor Metrology With Information From Multiple Processing Steps
App 20170287751 - Kuznetsov; Alexander ; et al. | 2017-10-05 |
Compressive Sensing For Metrology
App 20170076440 - Pandev; Stilian Ivanov ; et al. | 2017-03-16 |
Compressive sensing for metrology
Grant 9,518,916 - Pandev , et al. December 13, 2 | 2016-12-13 |
Inspection System And Method Using An Off-axis Unobscured Objective Lens
App 20160139032 - Rampoldi; Claudio ; et al. | 2016-05-19 |
Metrology Of Multiple Patterning Processes
App 20160109230 - Pandev; Stilian Ivanov ; et al. | 2016-04-21 |
Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection
Grant 9,291,554 - Kuznetsov , et al. March 22, 2 | 2016-03-22 |
Metrology system optimization for parameter tracking
Grant 9,255,877 - Veldman , et al. February 9, 2 | 2016-02-09 |
Signal Response Metrology For Scatterometry Based Overlay Measurements
App 20150323316 - Shchegrov; Andrei V. ; et al. | 2015-11-12 |
Methods And Apparatus For Patterned Wafer Characterization
App 20150046121 - Dziura; Thaddeus Gerard ; et al. | 2015-02-12 |
Metrology System Optimization For Parameter Tracking
App 20140347666 - Veldman; Andrei ; et al. | 2014-11-27 |
Optical metrology using targets with field enhancement elements
Grant 8,879,073 - Madsen , et al. November 4, 2 | 2014-11-04 |
Metrology systems and methods for high aspect ratio and large lateral dimension structures
Grant 8,860,937 - Dziura , et al. October 14, 2 | 2014-10-14 |
Method Of Electromagnetic Modeling Of Finite Structures And Finite Illumination For Metrology And Inspection
App 20140222380 - Kuznetsov; Alexander ; et al. | 2014-08-07 |
Integrated Use Of Model-based Metrology And A Process Model
App 20140172394 - Kuznetsov; Alexander ; et al. | 2014-06-19 |
Optical Metrology Using Targets With Field Enhancement Elements
App 20130222795 - Madsen; Jonathan M. ; et al. | 2013-08-29 |
Programmable soft-output Viterbi algorithm system and method
Grant 8,307,267 - Venkataramani , et al. November 6, 2 | 2012-11-06 |
Network Router Based on Combinatorial Designs
App 20080267200 - Berkovich; Simon ; et al. | 2008-10-30 |
Structured Set Partitioning And Multilevel Coding For Partial Response Channels
App 20070096950 - Yang; Xueshi ; et al. | 2007-05-03 |
Structured set partitioning and multilevel coding for partial response channels
Grant 7,205,912 - Yang , et al. April 17, 2 | 2007-04-17 |
Precoders for partial response channels
Grant 6,718,502 - Kuznetsov , et al. April 6, 2 | 2004-04-06 |
Digital write-and-read method and signal processing apparatus
Grant 5,881,071 - Kuznetsov , et al. March 9, 1 | 1999-03-09 |
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